RU2019115879A - Деталь с подложкой из монокристаллического суперсплава на основе никеля и способ её изготовления - Google Patents

Деталь с подложкой из монокристаллического суперсплава на основе никеля и способ её изготовления Download PDF

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RU2019115879A
RU2019115879A RU2019115879A RU2019115879A RU2019115879A RU 2019115879 A RU2019115879 A RU 2019115879A RU 2019115879 A RU2019115879 A RU 2019115879A RU 2019115879 A RU2019115879 A RU 2019115879A RU 2019115879 A RU2019115879 A RU 2019115879A
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silicon
platinum
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Амар САБУНДЖИ
Виржини ЖАКЕ
Жереми РАМ
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    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
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    • B32B15/00—Layered products comprising a layer of metal
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    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
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    • C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
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    • B—PERFORMING OPERATIONS; TRANSPORTING
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Claims (18)

1. Способ изготовления детали (1) с подложкой (2) из монокристаллического суперсплава на основе никеля, отличающийся тем, что он включает в себя этапы:
изготовления подложки (2) из монокристаллического суперсплава на основе никеля,
образования на подложке (2) покрытия (3), содержащего по меньшей мере один слой (30) первого типа, содержащий алюминий и платину, по меньшей мере один слой (31) второго типа, содержащий алюминий, кремний и платину, и слой (32) третьего типа, содержащий никель, алюминий, кремний и платину, причём этот слой (32) третьего типа расположен полностью на верху набора слоёв покрытия (3),
образования глинозёмного слоя (4) с добавкой кремния на слое (32) третьего типа.
2. Способ по п. 1, отличающийся тем, что указанное покрытие (3) содержит по меньшей мере три слоя (30) первого типа.
3. Способ по п. 1 или 2, отличающийся тем, что покрытие (3) содержит два слоя (31) второго типа.
4. Способ по любому из пп. 1-3, отличающийся тем, что покрытие (3) содержит последовательность слоёв (30) первого типа и/или последовательность слоёв (31) второго типа.
5. Способ по любому из пп. 1-4, отличающийся тем, что в покрытии (3) слой, контактирующий с подложкой (2) из монокристаллического суперсплава на основе никеля, является слоем (30) первого типа.
6. Способ по любому из пп. 1-5, отличающийся тем, что по меньшей мере один из слоёв среди слоя (30) первого типа, слоя (31) второго типа и слоя (32) третьего типа, образован:
для указанного слоя (30) первого типа посредством осаждения алюминиевого нанокристаллического слоя (302), затем платинового нанокристаллического слоя (301) или наоборот,
для указанного слоя (31) второго типа посредством осаждения, в любой последовательности, алюминиевого нанокристаллического слоя (302), платинового нанокристаллического слоя (301) и кремниевого нанокристаллического слоя (310),
для указанного слоя (32) третьего типа осаждением, в любой последовательности, алюминиевого нанокристаллического слоя (302), платинового нанокристаллического слоя (301), никелевого нанокристаллического слоя (303) и кремниевого нанокритисталлического слоя (320),
при этом нанокристаллические слои (301, 302, 303, 310, 320) подвергают диффузионной обработке для образования покрытия (3).
7. Способ по любому из пп. 1-6, отличающийся тем, что осаждение разных слоёв покрытия (3) производят физическим осаждением из паровой фазы или химическим осаждением из паровой фазы.
8. Способ по п. 7, отличающийся тем, что осаждение разных слоёв покрытия (3) производят катодным напылением.
9. Способ по любому из пп. 1-8, отличающийся тем, что он включает в себя дополнительный этап для нанесения теплового барьера (5) на глинозёмный слой (4) с добавкой кремния.
10. Деталь (1) с подложкой (2) из монокристаллического суперсплава на основе никеля, отличающаяся тем, что она содержит последовательно расположенные подложку (2), покрытие (3) с нанесённым глинозёмным слоем (4) с добавкой кремния, при этом указанное покрытие (3) содержит по меньшей мере один слой (30) первого типа, содержащий алюминий и платину, по меньшей мере один слой (31) второго типа, содержащий алюминий, кремний и платину, и слой (32) третьего типа, содержащий никель, алюминий, кремний и платину, причём слой (32) третьего типа расположен на самом верху набора слоёв покрытия (3).
11. Деталь по п. 10, отличающаяся тем, что глинозёмный слой (4) с добавкой кремния покрыт тепловым барьером (5).
RU2019115879A 2016-10-27 2017-10-19 Деталь с подложкой из монокристаллического суперсплава на основе никеля и способ её изготовления RU2738628C2 (ru)

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FR1660417 2016-10-27
FR1660417A FR3058164B1 (fr) 2016-10-27 2016-10-27 Piece comprenant un substrat en superalliage monocristallin a base de nickel et son procede de fabrication.
PCT/FR2017/052880 WO2018078246A1 (fr) 2016-10-27 2017-10-19 Pièce comprenant un substrat en superalliage monocristallin à base de nickel et son procédé de fabrication

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FR3081883B1 (fr) * 2018-06-04 2020-08-21 Safran Superalliage a base de nickel, aube monocristalline et turbomachine

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5989733A (en) * 1996-07-23 1999-11-23 Howmet Research Corporation Active element modified platinum aluminide diffusion coating and CVD coating method
FR2814473B1 (fr) * 2000-09-25 2003-06-27 Snecma Moteurs Procede de realisation d'un revetement de protection formant barriere thermique avec sous-couche de liaison sur un substrat en superalliage et piece obtenue
US6533875B1 (en) * 2000-10-20 2003-03-18 General Electric Co. Protecting a surface of a nickel-based article with a corrosion-resistant aluminum-alloy layer
FR2861423B1 (fr) * 2003-10-28 2008-05-30 Snecma Moteurs Piece de turbine a gaz muni d'un revetement de protection et procede de realisation d'un revetement de protection sur un substrat metallique en superalliage
SG127768A1 (en) * 2005-05-27 2006-12-29 Turbine Overhaul Services Priv Thermal barrier coating
US7527877B2 (en) * 2006-10-27 2009-05-05 General Electric Company Platinum group bond coat modified for diffusion control
CN101358351A (zh) * 2008-09-19 2009-02-04 昆明贵金属研究所 一种高温合金用纳米铂铝抗氧化涂层的制备方法
FR2941963B1 (fr) * 2009-02-10 2011-03-04 Snecma Methode de fabrication d'une barriere thermique recouvrant un substrat metallique en superalliage et piece thermomecanique resultant de cette methode de fabrication
US9222163B2 (en) * 2009-05-26 2015-12-29 Siemens Aktiengesellschaft Layered coating system with a MCrAlX layer and a chromium rich layer and a method to produce it
EP2557201A1 (de) * 2011-08-09 2013-02-13 Siemens Aktiengesellschaft Legierung, Schutzschicht und Bauteil

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BR112019008297A2 (pt) 2019-07-09
WO2018078246A1 (fr) 2018-05-03
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CN109891001A (zh) 2019-06-14
JP2019536905A (ja) 2019-12-19
FR3058164B1 (fr) 2020-02-07
FR3058164A1 (fr) 2018-05-04
CA3040769A1 (fr) 2018-05-03
EP3532653A1 (fr) 2019-09-04
JP7057778B2 (ja) 2022-04-20
RU2738628C2 (ru) 2020-12-15
RU2019115879A3 (ru) 2020-11-27
EP3532653B1 (fr) 2023-03-15
CN109891001B (zh) 2021-01-05

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