RU2018102394A3 - - Google Patents
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- Publication number
- RU2018102394A3 RU2018102394A3 RU2018102394A RU2018102394A RU2018102394A3 RU 2018102394 A3 RU2018102394 A3 RU 2018102394A3 RU 2018102394 A RU2018102394 A RU 2018102394A RU 2018102394 A RU2018102394 A RU 2018102394A RU 2018102394 A3 RU2018102394 A3 RU 2018102394A3
- Authority
- RU
- Russia
Links
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/60—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrostatic variables, e.g. electrographic flaw testing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/002—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the work function voltage
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/30—Scanning potential microscopy
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/07—Non contact-making probes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
- G01R35/005—Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references
- G01R35/007—Standards or reference devices, e.g. voltage or resistance standards, "golden references"
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Electrochemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Life Sciences & Earth Sciences (AREA)
- Pathology (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)
- Measuring Leads Or Probes (AREA)
- Sampling And Sample Adjustment (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1511114.9 | 2015-06-24 | ||
NO20150829A NO342324B1 (en) | 2015-06-24 | 2015-06-24 | Field Kelvin Probe |
NO20150829 | 2015-06-24 | ||
GB1511114.9A GB2539688B (en) | 2015-06-24 | 2015-06-24 | Field Kelvin probe |
PCT/NO2016/050140 WO2016209087A1 (en) | 2015-06-24 | 2016-06-24 | Kelvin probe system with a rotating probe face |
Publications (3)
Publication Number | Publication Date |
---|---|
RU2018102394A RU2018102394A (ru) | 2019-07-24 |
RU2018102394A3 true RU2018102394A3 (ru) | 2019-11-15 |
RU2710526C2 RU2710526C2 (ru) | 2019-12-26 |
Family
ID=57585185
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
RU2018102394A RU2710526C2 (ru) | 2015-06-24 | 2016-06-24 | Система с зондом кельвина с вращающейся внешней поверхностью зонда |
Country Status (9)
Country | Link |
---|---|
US (1) | US10620159B2 (ru) |
EP (1) | EP3314272B1 (ru) |
JP (1) | JP6861704B2 (ru) |
KR (1) | KR102569330B1 (ru) |
CN (1) | CN209148735U (ru) |
AU (1) | AU2016281432B2 (ru) |
CA (1) | CA2990048C (ru) |
RU (1) | RU2710526C2 (ru) |
WO (1) | WO2016209087A1 (ru) |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4018993A1 (de) | 1990-06-13 | 1991-12-19 | Max Planck Inst Eisenforschung | Verfahren und einrichtung zur untersuchung beschichteter metalloberflaechen |
JPH0567652A (ja) * | 1991-09-05 | 1993-03-19 | Tokyo Electron Ltd | プローブ装置 |
DE29517436U1 (de) * | 1995-11-03 | 1996-01-04 | Nohlen, Martin, Dipl.-Chem., 53111 Bonn | Kelvinsonde zur Messung der Elektronenaustrittsarbeit |
US6051982A (en) * | 1996-08-02 | 2000-04-18 | International Business Machines Corporation | Electronic component test apparatus with rotational probe and conductive spaced apart means |
US5974869A (en) | 1996-11-14 | 1999-11-02 | Georgia Tech Research Corp. | Non-vibrating capacitance probe for wear monitoring |
JP4044241B2 (ja) * | 1999-05-24 | 2008-02-06 | 日本分光株式会社 | プローブ顕微鏡 |
US6771091B2 (en) * | 2002-09-24 | 2004-08-03 | Semiconductor Diagnostics, Inc. | Method and system for elevated temperature measurement with probes designed for room temperature measurement |
KR100657789B1 (ko) * | 2004-07-15 | 2006-12-14 | 삼성전자주식회사 | 유전막의 누설 전류 특성을 검사하는 방법 및 이를수행하기 위한 장치 |
GB0612072D0 (en) * | 2006-06-17 | 2006-07-26 | Kp Technology | Measurement device and method |
DE102006044962B4 (de) * | 2006-09-22 | 2011-04-07 | Amrhein Messtechnik Gmbh | Messeinrichtung zum elektrischen Vermessen |
JP2009068930A (ja) * | 2007-09-12 | 2009-04-02 | Canon Inc | 原子間力顕微鏡及びプローブ |
EP2141491A1 (de) * | 2008-07-02 | 2010-01-06 | Micronas GmbH | Gassensor |
GB2495998B (en) * | 2012-02-24 | 2013-09-25 | Kp Technology Ltd | Measurement apparatus |
WO2014033844A1 (ja) * | 2012-08-28 | 2014-03-06 | 株式会社日立製作所 | 走査プローブ顕微鏡およびそれを用いた計測方法 |
JP6227262B2 (ja) * | 2013-03-06 | 2017-11-08 | 株式会社荏原製作所 | 表面電位測定装置および表面電位測定方法 |
JP5819880B2 (ja) * | 2013-05-08 | 2015-11-24 | 本田技研工業株式会社 | 平行度調整装置および平行度調整方法 |
CN203965529U (zh) * | 2014-09-10 | 2014-11-26 | 国家电网公司 | 一种绝缘材料表面电荷二维分布自动测量系统 |
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2016
- 2016-06-24 AU AU2016281432A patent/AU2016281432B2/en active Active
- 2016-06-24 RU RU2018102394A patent/RU2710526C2/ru active
- 2016-06-24 CN CN201690000915.5U patent/CN209148735U/zh active Active
- 2016-06-24 CA CA2990048A patent/CA2990048C/en active Active
- 2016-06-24 US US15/739,945 patent/US10620159B2/en active Active
- 2016-06-24 JP JP2018519673A patent/JP6861704B2/ja active Active
- 2016-06-24 WO PCT/NO2016/050140 patent/WO2016209087A1/en active Application Filing
- 2016-06-24 EP EP16814787.4A patent/EP3314272B1/en active Active
- 2016-06-24 KR KR1020187002059A patent/KR102569330B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
KR20180021102A (ko) | 2018-02-28 |
KR102569330B1 (ko) | 2023-08-21 |
AU2016281432A1 (en) | 2018-02-01 |
EP3314272B1 (en) | 2022-10-05 |
WO2016209087A1 (en) | 2016-12-29 |
EP3314272A1 (en) | 2018-05-02 |
RU2710526C2 (ru) | 2019-12-26 |
EP3314272A4 (en) | 2018-12-05 |
CA2990048C (en) | 2021-03-30 |
RU2018102394A (ru) | 2019-07-24 |
US10620159B2 (en) | 2020-04-14 |
JP2018519533A (ja) | 2018-07-19 |
US20180196002A1 (en) | 2018-07-12 |
AU2016281432B2 (en) | 2021-08-05 |
JP6861704B2 (ja) | 2021-04-21 |
CA2990048A1 (en) | 2016-12-29 |
CN209148735U (zh) | 2019-07-23 |