RU2018102394A3 - - Google Patents

Download PDF

Info

Publication number
RU2018102394A3
RU2018102394A3 RU2018102394A RU2018102394A RU2018102394A3 RU 2018102394 A3 RU2018102394 A3 RU 2018102394A3 RU 2018102394 A RU2018102394 A RU 2018102394A RU 2018102394 A RU2018102394 A RU 2018102394A RU 2018102394 A3 RU2018102394 A3 RU 2018102394A3
Authority
RU
Russia
Application number
RU2018102394A
Other versions
RU2710526C2 (ru
RU2018102394A (ru
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from NO20150829A external-priority patent/NO342324B1/en
Priority claimed from GB1511114.9A external-priority patent/GB2539688B/en
Application filed filed Critical
Publication of RU2018102394A publication Critical patent/RU2018102394A/ru
Publication of RU2018102394A3 publication Critical patent/RU2018102394A3/ru
Application granted granted Critical
Publication of RU2710526C2 publication Critical patent/RU2710526C2/ru

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/60Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrostatic variables, e.g. electrographic flaw testing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/002Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the work function voltage
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/30Scanning potential microscopy
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/07Non contact-making probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07307Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00Testing or calibrating of apparatus covered by the other groups of this subclass
    • G01R35/005Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references
    • G01R35/007Standards or reference devices, e.g. voltage or resistance standards, "golden references"

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)
  • Measuring Leads Or Probes (AREA)
  • Sampling And Sample Adjustment (AREA)
RU2018102394A 2015-06-24 2016-06-24 Система с зондом кельвина с вращающейся внешней поверхностью зонда RU2710526C2 (ru)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
GB1511114.9 2015-06-24
NO20150829A NO342324B1 (en) 2015-06-24 2015-06-24 Field Kelvin Probe
NO20150829 2015-06-24
GB1511114.9A GB2539688B (en) 2015-06-24 2015-06-24 Field Kelvin probe
PCT/NO2016/050140 WO2016209087A1 (en) 2015-06-24 2016-06-24 Kelvin probe system with a rotating probe face

Publications (3)

Publication Number Publication Date
RU2018102394A RU2018102394A (ru) 2019-07-24
RU2018102394A3 true RU2018102394A3 (ru) 2019-11-15
RU2710526C2 RU2710526C2 (ru) 2019-12-26

Family

ID=57585185

Family Applications (1)

Application Number Title Priority Date Filing Date
RU2018102394A RU2710526C2 (ru) 2015-06-24 2016-06-24 Система с зондом кельвина с вращающейся внешней поверхностью зонда

Country Status (9)

Country Link
US (1) US10620159B2 (ru)
EP (1) EP3314272B1 (ru)
JP (1) JP6861704B2 (ru)
KR (1) KR102569330B1 (ru)
CN (1) CN209148735U (ru)
AU (1) AU2016281432B2 (ru)
CA (1) CA2990048C (ru)
RU (1) RU2710526C2 (ru)
WO (1) WO2016209087A1 (ru)

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4018993A1 (de) 1990-06-13 1991-12-19 Max Planck Inst Eisenforschung Verfahren und einrichtung zur untersuchung beschichteter metalloberflaechen
JPH0567652A (ja) * 1991-09-05 1993-03-19 Tokyo Electron Ltd プローブ装置
DE29517436U1 (de) * 1995-11-03 1996-01-04 Nohlen, Martin, Dipl.-Chem., 53111 Bonn Kelvinsonde zur Messung der Elektronenaustrittsarbeit
US6051982A (en) * 1996-08-02 2000-04-18 International Business Machines Corporation Electronic component test apparatus with rotational probe and conductive spaced apart means
US5974869A (en) 1996-11-14 1999-11-02 Georgia Tech Research Corp. Non-vibrating capacitance probe for wear monitoring
JP4044241B2 (ja) * 1999-05-24 2008-02-06 日本分光株式会社 プローブ顕微鏡
US6771091B2 (en) * 2002-09-24 2004-08-03 Semiconductor Diagnostics, Inc. Method and system for elevated temperature measurement with probes designed for room temperature measurement
KR100657789B1 (ko) * 2004-07-15 2006-12-14 삼성전자주식회사 유전막의 누설 전류 특성을 검사하는 방법 및 이를수행하기 위한 장치
GB0612072D0 (en) * 2006-06-17 2006-07-26 Kp Technology Measurement device and method
DE102006044962B4 (de) * 2006-09-22 2011-04-07 Amrhein Messtechnik Gmbh Messeinrichtung zum elektrischen Vermessen
JP2009068930A (ja) * 2007-09-12 2009-04-02 Canon Inc 原子間力顕微鏡及びプローブ
EP2141491A1 (de) * 2008-07-02 2010-01-06 Micronas GmbH Gassensor
GB2495998B (en) * 2012-02-24 2013-09-25 Kp Technology Ltd Measurement apparatus
WO2014033844A1 (ja) * 2012-08-28 2014-03-06 株式会社日立製作所 走査プローブ顕微鏡およびそれを用いた計測方法
JP6227262B2 (ja) * 2013-03-06 2017-11-08 株式会社荏原製作所 表面電位測定装置および表面電位測定方法
JP5819880B2 (ja) * 2013-05-08 2015-11-24 本田技研工業株式会社 平行度調整装置および平行度調整方法
CN203965529U (zh) * 2014-09-10 2014-11-26 国家电网公司 一种绝缘材料表面电荷二维分布自动测量系统

Also Published As

Publication number Publication date
KR20180021102A (ko) 2018-02-28
KR102569330B1 (ko) 2023-08-21
AU2016281432A1 (en) 2018-02-01
EP3314272B1 (en) 2022-10-05
WO2016209087A1 (en) 2016-12-29
EP3314272A1 (en) 2018-05-02
RU2710526C2 (ru) 2019-12-26
EP3314272A4 (en) 2018-12-05
CA2990048C (en) 2021-03-30
RU2018102394A (ru) 2019-07-24
US10620159B2 (en) 2020-04-14
JP2018519533A (ja) 2018-07-19
US20180196002A1 (en) 2018-07-12
AU2016281432B2 (en) 2021-08-05
JP6861704B2 (ja) 2021-04-21
CA2990048A1 (en) 2016-12-29
CN209148735U (zh) 2019-07-23

Similar Documents

Publication Publication Date Title
RU2018102394A3 (ru)
BE2015C044I2 (ru)
BR0005041B1 (ru)
BR0009717B1 (ru)
BR0000763F1 (ru)
BR0001536B1 (ru)
BR0001684B1 (ru)
BR0001810B1 (ru)
BR0002033B1 (ru)
BR0002402B1 (ru)
BR0002435B1 (ru)
BR0002694B1 (ru)
BR0002802B1 (ru)
BR0002874B1 (ru)
BR0003166B1 (ru)
BR0003189B1 (ru)
BR0005085B1 (ru)
BR0003401B1 (ru)
BR0003686B1 (ru)
BR0003746B1 (ru)
BR0003751B1 (ru)
BR0003928B1 (ru)
BR0004687B1 (ru)
CN303074622S (ru)
BR0003208B1 (ru)