RU2016131868A3 - - Google Patents
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- Publication number
- RU2016131868A3 RU2016131868A3 RU2016131868A RU2016131868A RU2016131868A3 RU 2016131868 A3 RU2016131868 A3 RU 2016131868A3 RU 2016131868 A RU2016131868 A RU 2016131868A RU 2016131868 A RU2016131868 A RU 2016131868A RU 2016131868 A3 RU2016131868 A3 RU 2016131868A3
- Authority
- RU
- Russia
Links
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RU2016131868A RU2652156C2 (ru) | 2016-08-03 | 2016-08-03 | Способ измерения толщины тонкопленочных диэлектрических материалов |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RU2016131868A RU2652156C2 (ru) | 2016-08-03 | 2016-08-03 | Способ измерения толщины тонкопленочных диэлектрических материалов |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| RU2016131868A RU2016131868A (ru) | 2018-02-08 |
| RU2016131868A3 true RU2016131868A3 (ru) | 2018-04-03 |
| RU2652156C2 RU2652156C2 (ru) | 2018-04-25 |
Family
ID=61174199
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RU2016131868A RU2652156C2 (ru) | 2016-08-03 | 2016-08-03 | Способ измерения толщины тонкопленочных диэлектрических материалов |
Country Status (1)
| Country | Link |
|---|---|
| RU (1) | RU2652156C2 (ru) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114354976B (zh) * | 2022-03-21 | 2022-05-20 | 成都华托微纳智能传感科技有限公司 | 一种降低边缘效应的mems加速度计 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS607203B2 (ja) * | 1980-12-25 | 1985-02-22 | 富士電機株式会社 | 膜厚測定器 |
| SU1158857A1 (ru) * | 1982-10-18 | 1985-05-30 | Киевский технологический институт легкой промышленности | Измеритель толщины полимерных пленок |
| SU1186935A1 (ru) * | 1984-05-16 | 1985-10-23 | Киевский технологический институт легкой промышленности | Устройство дл контрол толщины диэлектрического покрыти на диэлектрической основе |
| SU1456765A1 (ru) * | 1987-06-11 | 1989-02-07 | Львовский Государственный Университет Им.И.Франко | Емкостный датчик-свидетель дл контрол толщины напыл емой диэлектрической пленки |
| FR2929704B1 (fr) * | 2008-04-04 | 2010-05-14 | Univ Joseph Fourier | Detecteur capacitif, procede de fabrication d'un detecteur capacitif et dispositif de mesure l'integrant |
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2016
- 2016-08-03 RU RU2016131868A patent/RU2652156C2/ru active
Also Published As
| Publication number | Publication date |
|---|---|
| RU2016131868A (ru) | 2018-02-08 |
| RU2652156C2 (ru) | 2018-04-25 |