RU2006136761A - METHOD FOR FILM THICKNESS CONTROL DURING ITS APPLICATION BY DEPOSITION IN A VACUUM CAMERA - Google Patents
METHOD FOR FILM THICKNESS CONTROL DURING ITS APPLICATION BY DEPOSITION IN A VACUUM CAMERA Download PDFInfo
- Publication number
- RU2006136761A RU2006136761A RU2006136761/28A RU2006136761A RU2006136761A RU 2006136761 A RU2006136761 A RU 2006136761A RU 2006136761/28 A RU2006136761/28 A RU 2006136761/28A RU 2006136761 A RU2006136761 A RU 2006136761A RU 2006136761 A RU2006136761 A RU 2006136761A
- Authority
- RU
- Russia
- Prior art keywords
- deposition
- film thickness
- thickness control
- application
- control during
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0683—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating measurement during deposition or removal of the layer
Claims (1)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU2006136761/28A RU2006136761A (en) | 2006-10-18 | 2006-10-18 | METHOD FOR FILM THICKNESS CONTROL DURING ITS APPLICATION BY DEPOSITION IN A VACUUM CAMERA |
PCT/RU2006/000643 WO2008048136A1 (en) | 2006-10-18 | 2006-11-30 | Method for checking a film thickness during the application thereof by evaporating in a vacuum chamber |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU2006136761/28A RU2006136761A (en) | 2006-10-18 | 2006-10-18 | METHOD FOR FILM THICKNESS CONTROL DURING ITS APPLICATION BY DEPOSITION IN A VACUUM CAMERA |
Publications (1)
Publication Number | Publication Date |
---|---|
RU2006136761A true RU2006136761A (en) | 2008-04-27 |
Family
ID=39314260
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
RU2006136761/28A RU2006136761A (en) | 2006-10-18 | 2006-10-18 | METHOD FOR FILM THICKNESS CONTROL DURING ITS APPLICATION BY DEPOSITION IN A VACUUM CAMERA |
Country Status (2)
Country | Link |
---|---|
RU (1) | RU2006136761A (en) |
WO (1) | WO2008048136A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013105870A1 (en) * | 2012-01-10 | 2013-07-18 | Labusov Vladimir Alexandrovich | Method for measuring thicknesses of nanometric layers of a multi-layered coating during spraying of said coating |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54110938A (en) * | 1978-02-20 | 1979-08-30 | Matsushita Electric Ind Co Ltd | Method and apparatus for controlling film thickness |
SU1233208A1 (en) * | 1984-01-02 | 1986-05-23 | Киевский Ордена Ленина Государственный Университет Им.Т.Г.Шевченко | Method of measuring thickness of multilayer polymeric film |
JPS6176904A (en) * | 1984-09-21 | 1986-04-19 | Oak Seisakusho:Kk | Method for measuring film thickness |
US4909631A (en) * | 1987-12-18 | 1990-03-20 | Tan Raul Y | Method for film thickness and refractive index determination |
RU2025675C1 (en) * | 1992-08-06 | 1994-12-30 | Научно-производственный концерн "Синтез" | Device for measuring temperature and temperature difference |
-
2006
- 2006-10-18 RU RU2006136761/28A patent/RU2006136761A/en not_active Application Discontinuation
- 2006-11-30 WO PCT/RU2006/000643 patent/WO2008048136A1/en active Application Filing
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013105870A1 (en) * | 2012-01-10 | 2013-07-18 | Labusov Vladimir Alexandrovich | Method for measuring thicknesses of nanometric layers of a multi-layered coating during spraying of said coating |
Also Published As
Publication number | Publication date |
---|---|
WO2008048136A1 (en) | 2008-04-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FA93 | Acknowledgement of application withdrawn (no request for examination) |
Effective date: 20091019 |
|
FZ9A | Application not withdrawn (correction of the notice of withdrawal) |
Effective date: 20100423 |