RU2004116277A - Способ мониторинга хода процесса с использованием газа- реагента, содержащего один или несколько газообразных углеводородов - Google Patents
Способ мониторинга хода процесса с использованием газа- реагента, содержащего один или несколько газообразных углеводородов Download PDFInfo
- Publication number
- RU2004116277A RU2004116277A RU2004116277/02A RU2004116277A RU2004116277A RU 2004116277 A RU2004116277 A RU 2004116277A RU 2004116277/02 A RU2004116277/02 A RU 2004116277/02A RU 2004116277 A RU2004116277 A RU 2004116277A RU 2004116277 A RU2004116277 A RU 2004116277A
- Authority
- RU
- Russia
- Prior art keywords
- oil
- furnace
- monitoring
- information
- exhaust gases
- Prior art date
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
- B01D53/1487—Removing organic compounds
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Analytical Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Sampling And Sample Adjustment (AREA)
- Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
- Production Of Liquid Hydrocarbon Mixture For Refining Petroleum (AREA)
- Treating Waste Gases (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
- Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)
- Industrial Gases (AREA)
- Chemical Vapour Deposition (AREA)
Claims (14)
1. Способ мониторинга хода процесса, осуществляемого в печи и использующего газ-реагент, содержащий, по меньшей мере, один газообразный углеводород, причем указанный способ содержит настройку рабочих параметров печи, введение в печь газа-реагента, содержащего, по меньшей мере, один газообразный углеводород, и выведение из печи отходящих газов, содержащих побочные продукты реакции газа-реагента, отличающийся тем, что отходящие газы подвергают промывке маслом, абсорбирующим смолы, содержащиеся в отходящих газах, а из измерения количества смол, абсорбированных маслом, получают информацию о ходе процесса.
2. Способ по п.1, отличающийся тем, что информацию о ходе процесса получают из величины, соответствующей изменению во времени количества смол, абсорбированных маслом.
3. Способ по п.1 или 2, отличающийся тем, что осуществляют циркуляцию масла в замкнутом контуре и измеряют увеличение объема масла.
4. Способ по п.3, отличающийся тем, что масло непрерывно извлекают из резервуара и инжектируют в поток отходящих газов, масло, насыщенное смолами, возвращают в резервуар, а информацию о ходе процесса получают из измерений изменения уровня масла в баке.
5. Способ по п.1 или 2, отличающийся тем, что осуществляют циркуляцию масла в замкнутом контуре и измеряют увеличение массы масла.
6. Способ по п.1, отличающийся тем, что масло инжектируют в поток отходящих газов, циркулирующий в распылительной колонне.
7. Способ по п.6, отличающийся тем, что отходящие газы циркулируют в колонне с трубкой Вентури.
8. Способ по п.1, отличающийся тем, что указанное масло является маслом, способным абсорбировать полициклические ароматические углеводороды, содержащиеся в отходящих газах.
9. Способ по п.8, отличающийся тем, что указанное масло является минеральным ароматическим маслом.
10. Способ по п.1, отличающийся тем, что полученную информацию о ходе процесса используют для определения момента окончания данного процесса.
11. Способ по п.1, отличающийся тем, что полученную информацию о ходе процесса используют для управления процессом, изменяя в случае необходимости на основе полученной информации о ходе процесса, по меньшей мере, один из следующих рабочих параметров печи: температуру печи, давление в печи, расход газа-реагента и состав газа-реагента.
12. Применение способа по п.1 для мониторинга процесса уплотнения пористых подложек матрицей из пиролитического углерода, образованной путем химической инфильтрации паровой фазы.
13. Применение способа по п.1 для мониторинга процесса образования на подложках покрытия из пиролитического углерода путем химического осаждения из паровой фазы.
14. Применение способа по п.1 для мониторинга процесса цементации деталей.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR0116518A FR2834052B1 (fr) | 2001-12-20 | 2001-12-20 | Procede pour le suivi du deroulement d'un processus utilisant un gaz reactif contenant un ou plusieurs hydrocarbures gazeux |
| FR01/16518 | 2001-12-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| RU2004116277A true RU2004116277A (ru) | 2005-06-10 |
| RU2291914C2 RU2291914C2 (ru) | 2007-01-20 |
Family
ID=8870724
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RU2004116277/02A RU2291914C2 (ru) | 2001-12-20 | 2002-12-20 | Способ мониторинга хода процесса с использованием газа-реагента, содержащего один или несколько газообразных углеводородов |
Country Status (12)
| Country | Link |
|---|---|
| US (1) | US7241470B2 (ru) |
| EP (1) | EP1456433B1 (ru) |
| JP (1) | JP4351060B2 (ru) |
| CN (1) | CN1314833C (ru) |
| AU (1) | AU2002364333A1 (ru) |
| CA (1) | CA2471266C (ru) |
| DE (1) | DE60215972T2 (ru) |
| FR (1) | FR2834052B1 (ru) |
| NO (1) | NO331366B1 (ru) |
| RU (1) | RU2291914C2 (ru) |
| UA (1) | UA77035C2 (ru) |
| WO (1) | WO2003054246A1 (ru) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7285257B2 (en) * | 2004-04-27 | 2007-10-23 | Honeywell International Inc. | Method of removing tar-forming gases from CVD/CVI furnace effluent |
| FR2881145B1 (fr) * | 2005-01-24 | 2007-11-23 | Snecma Propulsion Solide Sa | Procede d'infiltration chimique en phase gazeuse pour la densification de substrats poreux par du carbone pyrolytique |
| US20070184179A1 (en) * | 2006-02-09 | 2007-08-09 | Akshay Waghray | Methods and apparatus to monitor a process of depositing a constituent of a multi-constituent gas during production of a composite brake disc |
| US7829827B2 (en) * | 2006-04-21 | 2010-11-09 | Ameritherm, Inc. | Radio frequency (RF) induction cooking food heater |
| US20080124670A1 (en) * | 2006-11-29 | 2008-05-29 | Frank Jansen | Inductively heated trap |
| FR2910967B1 (fr) * | 2006-12-28 | 2009-04-03 | Commissariat Energie Atomique | Dispositif et procede de mesure continue de la concentration en goudrons dans un flux gazeux |
| FR2910966B1 (fr) | 2006-12-28 | 2009-04-17 | Commissariat Energie Atomique | Dispositif de mesures couplees permettant un suivi global et en continu de traces de goudrons presentes dans un flux gazeux |
| JP5233131B2 (ja) * | 2007-02-23 | 2013-07-10 | 株式会社Ｉｈｉ | 浸炭装置及び浸炭方法 |
| JP4833335B2 (ja) * | 2007-03-30 | 2011-12-07 | 川崎重工業株式会社 | ガム状物質監視装置および検知方法ならびにガスタービン設備 |
| US10689753B1 (en) * | 2009-04-21 | 2020-06-23 | Goodrich Corporation | System having a cooling element for densifying a substrate |
| US10648075B2 (en) | 2015-03-23 | 2020-05-12 | Goodrich Corporation | Systems and methods for chemical vapor infiltration and densification of porous substrates |
| RU2607401C1 (ru) * | 2015-09-25 | 2017-01-10 | Олег Викторович Барзинский | Способ получения углерод-углеродого композиционного материала |
| CN108318605A (zh) * | 2017-12-29 | 2018-07-24 | 广西壮族自治区环境监测中心站 | 一种废矿物油中多环芳烃的前处理及分析方法 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR514995A (fr) * | 1916-07-03 | 1921-03-22 | Leopold Singer | Procédé pour séparer des gaz de toutes sortes à l'aide d'ydrocarbures, l'acide sulfurique, les matières goudronneuses et les substances en suspension, solides ou vaporisées, ou sous forme de brouillard, qui sont insolubles ou difficilement solubles dans les hydrocarbures |
| US2721888A (en) * | 1952-06-02 | 1955-10-25 | Wulff Process Company | Process for removing undesired tars from a cracked gas |
| US5348774A (en) * | 1993-08-11 | 1994-09-20 | Alliedsignal Inc. | Method of rapidly densifying a porous structure |
| FR2709677B1 (fr) * | 1993-09-10 | 1995-12-15 | Sgn Soc Gen Tech Nouvelle | Procédé d'épuration d'un gaz par lavage - Colonne venturi pour sa mise en Óoeuvre. |
| US5747096A (en) * | 1994-12-19 | 1998-05-05 | Alliedsignal Inc. | Method for measuring the depositions, densification of etching rate of an electrically conductive body |
| FR2732677B1 (fr) * | 1995-04-07 | 1997-06-27 | Europ Propulsion | Procede d'infiltration chimique en phase vapeur avec parametres d'infiltration variables |
| US5916365A (en) * | 1996-08-16 | 1999-06-29 | Sherman; Arthur | Sequential chemical vapor deposition |
| CN2345851Y (zh) * | 1998-08-18 | 1999-10-27 | 林新 | 湿式高效脱硫除尘装置 |
| US6210745B1 (en) * | 1999-07-08 | 2001-04-03 | National Semiconductor Corporation | Method of quality control for chemical vapor deposition |
| FR2832936B1 (fr) * | 2001-12-05 | 2004-02-20 | Snecma Moteurs | Procede et installation pour le traitement de gaz effluent contenant des hydrocarbures |
-
2001
- 2001-12-20 FR FR0116518A patent/FR2834052B1/fr not_active Expired - Fee Related
-
2002
- 2002-12-20 US US10/499,415 patent/US7241470B2/en not_active Expired - Lifetime
- 2002-12-20 DE DE60215972T patent/DE60215972T2/de not_active Expired - Lifetime
- 2002-12-20 RU RU2004116277/02A patent/RU2291914C2/ru not_active IP Right Cessation
- 2002-12-20 JP JP2003554945A patent/JP4351060B2/ja not_active Expired - Fee Related
- 2002-12-20 CA CA2471266A patent/CA2471266C/en not_active Expired - Fee Related
- 2002-12-20 CN CNB02825547XA patent/CN1314833C/zh not_active Expired - Fee Related
- 2002-12-20 AU AU2002364333A patent/AU2002364333A1/en not_active Abandoned
- 2002-12-20 WO PCT/FR2002/004492 patent/WO2003054246A1/fr active IP Right Grant
- 2002-12-20 EP EP02799107A patent/EP1456433B1/fr not_active Expired - Fee Related
- 2002-12-20 UA UA20040604814A patent/UA77035C2/ru unknown
-
2003
- 2003-08-19 NO NO20033681A patent/NO331366B1/no not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| NO20033681D0 (no) | 2003-08-19 |
| WO2003054246A1 (fr) | 2003-07-03 |
| FR2834052A1 (fr) | 2003-06-27 |
| CA2471266C (en) | 2010-06-01 |
| EP1456433A1 (fr) | 2004-09-15 |
| EP1456433B1 (fr) | 2006-11-08 |
| FR2834052B1 (fr) | 2004-03-19 |
| AU2002364333A1 (en) | 2003-07-09 |
| US20050163929A1 (en) | 2005-07-28 |
| DE60215972D1 (de) | 2006-12-21 |
| NO331366B1 (no) | 2011-12-12 |
| DE60215972T2 (de) | 2007-09-13 |
| JP4351060B2 (ja) | 2009-10-28 |
| CN1314833C (zh) | 2007-05-09 |
| NO20033681L (no) | 2003-10-20 |
| CA2471266A1 (en) | 2003-07-03 |
| RU2291914C2 (ru) | 2007-01-20 |
| US7241470B2 (en) | 2007-07-10 |
| CN1606634A (zh) | 2005-04-13 |
| JP2005513267A (ja) | 2005-05-12 |
| UA77035C2 (ru) | 2006-10-16 |
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Effective date: 20171221 |