RU2001133770A - METHOD FOR PRODUCING ION BEAM - Google Patents
METHOD FOR PRODUCING ION BEAMInfo
- Publication number
- RU2001133770A RU2001133770A RU2001133770/09A RU2001133770A RU2001133770A RU 2001133770 A RU2001133770 A RU 2001133770A RU 2001133770/09 A RU2001133770/09 A RU 2001133770/09A RU 2001133770 A RU2001133770 A RU 2001133770A RU 2001133770 A RU2001133770 A RU 2001133770A
- Authority
- RU
- Russia
- Prior art keywords
- ion beam
- target
- probe
- substrate
- electric
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title claims 2
- 238000010884 ion-beam technique Methods 0.000 claims 3
- 230000005684 electric field Effects 0.000 claims 2
- 239000000523 sample Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 239000007789 gas Substances 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU2001133770A RU2219618C2 (en) | 2001-12-17 | 2001-12-17 | Ion beam generation process |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU2001133770A RU2219618C2 (en) | 2001-12-17 | 2001-12-17 | Ion beam generation process |
Publications (2)
Publication Number | Publication Date |
---|---|
RU2001133770A true RU2001133770A (en) | 2003-07-20 |
RU2219618C2 RU2219618C2 (en) | 2003-12-20 |
Family
ID=32065738
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
RU2001133770A RU2219618C2 (en) | 2001-12-17 | 2001-12-17 | Ion beam generation process |
Country Status (1)
Country | Link |
---|---|
RU (1) | RU2219618C2 (en) |
-
2001
- 2001-12-17 RU RU2001133770A patent/RU2219618C2/en not_active IP Right Cessation
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