RU1837246C - Device for measuring hall sensor magnetosensitivity temperature coefficient - Google Patents

Abstract

The invention relates to a technique for testing semiconductor devices and can be used in testing Hall sensors. The purpose of the invention is to increase measurement accuracy and reduce energy consumption. The goal is achieved in that the thermostat chamber is made in the form of a measuring rod with a groove in which the Hall sensor is located. The device also contains a measure of constant magnetic induction, an excitation source, a recording device (voltmeter), a heater-cooler located in the chamber of the thermostat, yes (a temperature sensor and a layer of thermal insulation, a temperature meter is located in the thermostat. 1 ill.

Description

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The invention relates to a technique for testing semiconductor devices and can be used in testing Hall sensors.

The purpose of the invention is to increase the accuracy of measurements of the temperature coefficient of the magnetosensitivity of the Hall sensor and to reduce the energy consumption.

The drawing shows a structural diagram of the device.

The device comprises a thermostat 1, including a chamber in the form of a copper rod 2 with a recess 3, a heater-cooler A, a temperature sensor 5 connected to a temperature meter 6, a thermal insulation layer 7 and a casing 8. In addition, the device contains a measure of constant magnetic induction 9, Hall sensor 10, located in the gap 11 measures constant

magnetic induction 9 and in the recess 3, the excitation current source 12, the inputs of which are connected to the inputs of the hall sensor 10, a voltmeter 13, the inputs of which are connected to the outputs of the Hall sensor 10.

The part of the thermostat 1, where the recess 3 is located in the copper rod 2, is placed in the gap 11 of the constant magnetic induction measure.

The device operates as follows.

Due to the operation of the heater-cooler 4 and the thermal conductivity of the copper rod 2, a temperature T1 is set in the recess 3. It is converted by the temperature sensor 5 of the thermostat 1 into an electrical signal, which is fed to the input of the temperature meter 6 of the thermostat 1. Thus, the temperature T1 is recorded

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ABOUT

a temperature measurer 6. A measure of the constant magnetic induction 9 in the gap 11 creates a magnetic field whose magnetic induction is equal to B. A current I is generated by the excitation current source 12, which flows through the Hall sensor 10.

Under the influence of a magnetic field and current, the Hall EMF is generated at the outputs of the Hall sensor 10, the value of which E (T1) is measured with a voltmeter 13, Then the temperature T2 is set similarly and the EMF E (T2) is measured. The TKy value is calculated.

Using the device will improve the accuracy of measuring the TC of Hall sensors by approximately 1.5 times, which will entail an increase in the yield of suitable sensors by at least 1%.

Claims (1)

The claims A device for measuring the temperature coefficient of magnetosensitivity of a Hall sensor, comprising a thermostat, a measure of constant magnetic induction, a Hall sensor located in the gap of a measure of constant magnetic induction and in the thermostat chamber, an excitation current source whose outputs are connected to the inputs of the Hall sensor, a voltmeter, the inputs of which are connected to the outputs of the Hall sensor, characterized in that, in order to increase the accuracy of measurements and reduce energy consumption, the thermostat chambers are made in the form of a copper rod with a groove, in which the Hall sensor is located.