RO98339B1 - Senzor piezorezistiv compensat termic - Google Patents
Senzor piezorezistiv compensat termicInfo
- Publication number
- RO98339B1 RO98339B1 RO128827A RO12882787A RO98339B1 RO 98339 B1 RO98339 B1 RO 98339B1 RO 128827 A RO128827 A RO 128827A RO 12882787 A RO12882787 A RO 12882787A RO 98339 B1 RO98339 B1 RO 98339B1
- Authority
- RO
- Romania
- Prior art keywords
- temperature
- same
- sensitive
- sensor
- pressure
- Prior art date
Links
- 239000012530 fluid Substances 0.000 abstract 2
- 229910015363 Au—Sn Inorganic materials 0.000 abstract 1
- 229910045601 alloy Inorganic materials 0.000 abstract 1
- 239000000956 alloy Substances 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 238000005259 measurement Methods 0.000 abstract 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Abstract
Senzorul piezorezistiv compensat termic, realizat în scopul masurarii precise a presiunii fluidelor într-o gama de temperatura, este alcatuit, în principal, dintr-o placheta de siliciu monocristalin dopat, în care s-au difuzat, pe o aceeasi diafragma, o punte activa de piezorezistente sensibile la presiune si temperatura si o punte martor, sensibila numai la temperatura, pe aceeasi placheta fiind dispusi, simetric fata de cele doua punti, tranzistori de încalzire, si dintr-o alta placheta având aceleasi caracteristici mecanice si electrice cu prima, lipita de prima placheta cu aliaj eutentic Au-Sn - prevazut cu un orificiu de admisie a fluidului.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RO128827A RO98339B1 (ro) | 1987-06-30 | 1987-06-30 | Senzor piezorezistiv compensat termic |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RO128827A RO98339B1 (ro) | 1987-06-30 | 1987-06-30 | Senzor piezorezistiv compensat termic |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| RO98339B1 true RO98339B1 (ro) | 1990-02-28 |
Family
ID=40906444
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RO128827A RO98339B1 (ro) | 1987-06-30 | 1987-06-30 | Senzor piezorezistiv compensat termic |
Country Status (1)
| Country | Link |
|---|---|
| RO (1) | RO98339B1 (ro) |
-
1987
- 1987-06-30 RO RO128827A patent/RO98339B1/ro unknown
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