RO83178B1 - PROCEDEU DE REALIZARE A TRANZISTOARELOR PNP DE îNALTA FRECVENTA - Google Patents
PROCEDEU DE REALIZARE A TRANZISTOARELOR PNP DE îNALTA FRECVENTAInfo
- Publication number
- RO83178B1 RO83178B1 RO109044A RO10904482A RO83178B1 RO 83178 B1 RO83178 B1 RO 83178B1 RO 109044 A RO109044 A RO 109044A RO 10904482 A RO10904482 A RO 10904482A RO 83178 B1 RO83178 B1 RO 83178B1
- Authority
- RO
- Romania
- Prior art keywords
- diffusion
- high frequency
- pnp transistors
- deposition
- initial
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000009792 diffusion process Methods 0.000 abstract 3
- 238000000151 deposition Methods 0.000 abstract 2
- 230000008021 deposition Effects 0.000 abstract 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 abstract 1
- UQZIWOQVLUASCR-UHFFFAOYSA-N alumane;titanium Chemical compound [AlH3].[Ti] UQZIWOQVLUASCR-UHFFFAOYSA-N 0.000 abstract 1
- 238000005538 encapsulation Methods 0.000 abstract 1
- 238000001465 metallisation Methods 0.000 abstract 1
- 230000001590 oxidative effect Effects 0.000 abstract 1
- 230000003071 parasitic effect Effects 0.000 abstract 1
- 238000011282 treatment Methods 0.000 abstract 1
Landscapes
- Bipolar Transistors (AREA)
Abstract
Prezenta inventie se refera la un procedeu de realizare a tranzistoarelor PNP de foarte înalta frecventa (FIF) si de ultra înalta frecventa (UIF). Procedeul de realizare a tranzistoarelor PNP de înalta frecventa conform inventiei care cuprinde difuzii fotogravuri oxidare initiala tratamente termice testari initiale si finale încapsulari prevede în scopul reducerii capacitatilor parazite difuzia inelului de garda în imediata vecinatate a bazei precum si depunerea unui oxid pirolitic gros dupa difuzia inelului de garda depunere care se realsizeaza în doua straturi cu capacitati diferite dintr-o sursa de tetraetilortosilicat ceea ce permite realizarea unei pante line la trecerea de la ferestrele de contactare iar în scopul cresterii fiabilitatii contactelor utilizarea unui strat dublu din titan-aluminiu pentru metalizare.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RO109044A RO83178B1 (ro) | 1982-11-15 | 1982-11-15 | PROCEDEU DE REALIZARE A TRANZISTOARELOR PNP DE îNALTA FRECVENTA |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RO109044A RO83178B1 (ro) | 1982-11-15 | 1982-11-15 | PROCEDEU DE REALIZARE A TRANZISTOARELOR PNP DE îNALTA FRECVENTA |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| RO83178A2 RO83178A2 (ro) | 1984-02-21 |
| RO83178B1 true RO83178B1 (ro) | 1984-02-28 |
Family
ID=20112227
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RO109044A RO83178B1 (ro) | 1982-11-15 | 1982-11-15 | PROCEDEU DE REALIZARE A TRANZISTOARELOR PNP DE îNALTA FRECVENTA |
Country Status (1)
| Country | Link |
|---|---|
| RO (1) | RO83178B1 (ro) |
-
1982
- 1982-11-15 RO RO109044A patent/RO83178B1/ro unknown
Also Published As
| Publication number | Publication date |
|---|---|
| RO83178A2 (ro) | 1984-02-21 |
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