JPS6430290A - Ceramic wiring board - Google Patents
Ceramic wiring boardInfo
- Publication number
- JPS6430290A JPS6430290A JP18704287A JP18704287A JPS6430290A JP S6430290 A JPS6430290 A JP S6430290A JP 18704287 A JP18704287 A JP 18704287A JP 18704287 A JP18704287 A JP 18704287A JP S6430290 A JPS6430290 A JP S6430290A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- main conductor
- bonding layer
- bonding
- barrier layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To facilitate formation of a wiring layer which has excellent heat resistant properties and layer strength against soldering heat treatment conditions by providing a wiring layer composed of a bonding layer made of titanium, a barrier layer made of copper and one of tungsten and molybdenum and a main conductor layer which are formed successively on a ceramic substrate made of sintered silicon carbide. CONSTITUTION:A bonding layer 2 and a barrier layer 3 are formed on a ceramic substrate 1 made of silicon carbide ceramic by a vapor growth method and further a main conductor layer 4 is formed. The main conductor layer 4 is provided for forming an electric wiring constituting a predetermined electric circuit on the substrate 1, the bonding layer 2 is provided for improving the adhesiveness with the substrate 1 and the barrier layer 3 is provided for avoiding mutual diffusion between the bonding layer 2 and the main conductor layer 4. The bonding layer 2 is made of titanium and the barrier layer made of copper and one of tungsten and molybdenum is formed on the bonding layer 2 and then the main conductor layer 4 is formed on the barrier layer 3.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18704287A JPS6430290A (en) | 1987-07-27 | 1987-07-27 | Ceramic wiring board |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18704287A JPS6430290A (en) | 1987-07-27 | 1987-07-27 | Ceramic wiring board |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6430290A true JPS6430290A (en) | 1989-02-01 |
Family
ID=16199157
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18704287A Pending JPS6430290A (en) | 1987-07-27 | 1987-07-27 | Ceramic wiring board |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6430290A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20030005751A (en) * | 2001-07-10 | 2003-01-23 | 페어차일드코리아반도체 주식회사 | Power module substrate |
JP2013225645A (en) * | 2012-04-23 | 2013-10-31 | Lg Display Co Ltd | Array substrate and method of manufacturing the same |
-
1987
- 1987-07-27 JP JP18704287A patent/JPS6430290A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20030005751A (en) * | 2001-07-10 | 2003-01-23 | 페어차일드코리아반도체 주식회사 | Power module substrate |
JP2013225645A (en) * | 2012-04-23 | 2013-10-31 | Lg Display Co Ltd | Array substrate and method of manufacturing the same |
US9564532B2 (en) | 2012-04-23 | 2017-02-07 | Lg Display Co., Ltd. | Array substrate and method of fabricating the same |
US9842934B2 (en) | 2012-04-23 | 2017-12-12 | Lg Display Co., Ltd. | Array substrate and method of fabricating the same |
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