JPS6430290A - Ceramic wiring board - Google Patents

Ceramic wiring board

Info

Publication number
JPS6430290A
JPS6430290A JP18704287A JP18704287A JPS6430290A JP S6430290 A JPS6430290 A JP S6430290A JP 18704287 A JP18704287 A JP 18704287A JP 18704287 A JP18704287 A JP 18704287A JP S6430290 A JPS6430290 A JP S6430290A
Authority
JP
Japan
Prior art keywords
layer
main conductor
bonding layer
bonding
barrier layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18704287A
Other languages
Japanese (ja)
Inventor
Masami Terasawa
Toshiya Kono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP18704287A priority Critical patent/JPS6430290A/en
Publication of JPS6430290A publication Critical patent/JPS6430290A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To facilitate formation of a wiring layer which has excellent heat resistant properties and layer strength against soldering heat treatment conditions by providing a wiring layer composed of a bonding layer made of titanium, a barrier layer made of copper and one of tungsten and molybdenum and a main conductor layer which are formed successively on a ceramic substrate made of sintered silicon carbide. CONSTITUTION:A bonding layer 2 and a barrier layer 3 are formed on a ceramic substrate 1 made of silicon carbide ceramic by a vapor growth method and further a main conductor layer 4 is formed. The main conductor layer 4 is provided for forming an electric wiring constituting a predetermined electric circuit on the substrate 1, the bonding layer 2 is provided for improving the adhesiveness with the substrate 1 and the barrier layer 3 is provided for avoiding mutual diffusion between the bonding layer 2 and the main conductor layer 4. The bonding layer 2 is made of titanium and the barrier layer made of copper and one of tungsten and molybdenum is formed on the bonding layer 2 and then the main conductor layer 4 is formed on the barrier layer 3.
JP18704287A 1987-07-27 1987-07-27 Ceramic wiring board Pending JPS6430290A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18704287A JPS6430290A (en) 1987-07-27 1987-07-27 Ceramic wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18704287A JPS6430290A (en) 1987-07-27 1987-07-27 Ceramic wiring board

Publications (1)

Publication Number Publication Date
JPS6430290A true JPS6430290A (en) 1989-02-01

Family

ID=16199157

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18704287A Pending JPS6430290A (en) 1987-07-27 1987-07-27 Ceramic wiring board

Country Status (1)

Country Link
JP (1) JPS6430290A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030005751A (en) * 2001-07-10 2003-01-23 페어차일드코리아반도체 주식회사 Power module substrate
JP2013225645A (en) * 2012-04-23 2013-10-31 Lg Display Co Ltd Array substrate and method of manufacturing the same

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030005751A (en) * 2001-07-10 2003-01-23 페어차일드코리아반도체 주식회사 Power module substrate
JP2013225645A (en) * 2012-04-23 2013-10-31 Lg Display Co Ltd Array substrate and method of manufacturing the same
US9564532B2 (en) 2012-04-23 2017-02-07 Lg Display Co., Ltd. Array substrate and method of fabricating the same
US9842934B2 (en) 2012-04-23 2017-12-12 Lg Display Co., Ltd. Array substrate and method of fabricating the same

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