PT3642674T - Compensação de ampliação e/ou direcionamento de feixe em sistemas óticos - Google Patents

Compensação de ampliação e/ou direcionamento de feixe em sistemas óticos

Info

Publication number
PT3642674T
PT3642674T PT187381702T PT18738170T PT3642674T PT 3642674 T PT3642674 T PT 3642674T PT 187381702 T PT187381702 T PT 187381702T PT 18738170 T PT18738170 T PT 18738170T PT 3642674 T PT3642674 T PT 3642674T
Authority
PT
Portugal
Prior art keywords
optical systems
beam steering
magnification compensation
magnification
compensation
Prior art date
Application number
PT187381702T
Other languages
English (en)
Original Assignee
Suss Microtec Solutions Gmbh & Co Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suss Microtec Solutions Gmbh & Co Kg filed Critical Suss Microtec Solutions Gmbh & Co Kg
Publication of PT3642674T publication Critical patent/PT3642674T/pt

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0896—Catadioptric systems with variable magnification or multiple imaging planes, including multispectral systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B15/00—Optical objectives with means for varying the magnification
    • G02B15/14—Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective
    • G02B15/16—Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective with interdependent non-linearly related movements between one lens or lens group, and another lens or lens group
    • G02B15/177—Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective with interdependent non-linearly related movements between one lens or lens group, and another lens or lens group having a negative front lens or group of lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/008—Systems specially adapted to form image relays or chained systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0892—Catadioptric systems specially adapted for the UV
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G02B7/09—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification adapted for automatic focusing or varying magnification
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G02B7/10—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification by relative axial movement of several lenses, e.g. of varifocal objective lens
    • G02B7/102—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification by relative axial movement of several lenses, e.g. of varifocal objective lens controlled by a microcomputer
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B13/00—Viewfinders; Focusing aids for cameras; Means for focusing for cameras; Autofocus systems for cameras
    • G03B13/18—Focusing aids
    • G03B13/24—Focusing screens
    • G03B13/26—Focusing screens with magnifiers for inspecting image formed on screen
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70191—Optical correction elements, filters or phase plates for controlling intensity, wavelength, polarisation, phase or the like
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70225—Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70258—Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/682—Mask-wafer alignment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/24—Optical objectives specially designed for the purposes specified below for reproducing or copying at short object distances
    • G02B13/26—Optical objectives specially designed for the purposes specified below for reproducing or copying at short object distances for reproducing with unit magnification

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Nonlinear Science (AREA)
  • Lenses (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
PT187381702T 2017-06-19 2018-06-18 Compensação de ampliação e/ou direcionamento de feixe em sistemas óticos PT3642674T (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201762522062P 2017-06-19 2017-06-19

Publications (1)

Publication Number Publication Date
PT3642674T true PT3642674T (pt) 2023-05-02

Family

ID=62842324

Family Applications (1)

Application Number Title Priority Date Filing Date
PT187381702T PT3642674T (pt) 2017-06-19 2018-06-18 Compensação de ampliação e/ou direcionamento de feixe em sistemas óticos

Country Status (8)

Country Link
US (2) US10539770B2 (pt)
EP (1) EP3642674B1 (pt)
JP (1) JP6803483B2 (pt)
KR (1) KR102290482B1 (pt)
CN (1) CN110998453A (pt)
PT (1) PT3642674T (pt)
TW (1) TWI706158B (pt)
WO (1) WO2018236770A1 (pt)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11175487B2 (en) 2017-06-19 2021-11-16 Suss Microtec Photonic Systems Inc. Optical distortion reduction in projection systems
US11835838B2 (en) 2017-10-27 2023-12-05 Exciting Technology LLC System, method and apparatus for non-mechanical optical and photonic beam steering
US11835841B2 (en) 2017-10-27 2023-12-05 Exciting Technology LLC System, method and apparatus for non-mechanical optical and photonic beam steering
US10845671B2 (en) 2017-10-27 2020-11-24 Exciting Technology, Llc System, method and apparatus for non-mechanical optical and photonic beam steering
US11561451B2 (en) 2018-10-23 2023-01-24 Exciting Technology LLC System, method and apparatus for non-mechanical optical and photonic beam steering
CN110646091B (zh) * 2019-10-08 2021-08-20 中国科学院光电研究院 一种采用自由曲面的大视场Dyson光谱成像系统
EP4127813A4 (en) * 2020-04-17 2024-04-03 Exciting Tech Llc DECENTRATED LENS BEAM CONTROL
US11822205B2 (en) 2020-04-17 2023-11-21 Exciting Technology LLC System, method, and apparatus for high precision light beam steering using rotating lens elements
CN111399202B (zh) * 2020-05-12 2020-12-15 西安交通大学 无零级衍射光的空间光调制器耦合装置
US20220014682A1 (en) * 2020-07-08 2022-01-13 Cognex Corporation System and method for extending depth of field for 2d vision system cameras in the presence of moving objects

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JP3451721B2 (ja) * 1994-06-06 2003-09-29 株式会社ニコン 投影光学装置及びそれを備えた露光装置並びにその調整方法
US5729331A (en) 1993-06-30 1998-03-17 Nikon Corporation Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus
JPH088169A (ja) * 1994-06-23 1996-01-12 Nikon Corp 露光装置
JP3610597B2 (ja) * 1994-07-29 2005-01-12 株式会社ニコン 露光装置及び方法
US5559629A (en) 1994-08-19 1996-09-24 Tamarack Scientific Co., Inc. Unit magnification projection system and method
US5557469A (en) 1994-10-28 1996-09-17 Ultratech Stepper, Inc. Beamsplitter in single fold optical system and optical variable magnification method and system
US5757469A (en) * 1995-03-22 1998-05-26 Etec Systems, Inc. Scanning lithography system haing double pass Wynne-Dyson optics
US7301605B2 (en) * 2000-03-03 2007-11-27 Nikon Corporation Projection exposure apparatus and method, catadioptric optical system and manufacturing method of devices
US7116404B2 (en) * 2004-06-30 2006-10-03 Asml Netherlands B.V Lithographic apparatus and device manufacturing method
US7924406B2 (en) 2005-07-13 2011-04-12 Asml Netherlands B.V. Stage apparatus, lithographic apparatus and device manufacturing method having switch device for two illumination channels
US8654307B2 (en) * 2006-03-20 2014-02-18 Nikon Corporation Scanning type exposure apparatus, method of manufacturing micro-apparatus, mask, projection optical apparatus, and method of manufacturing mask
EP2126636B1 (en) 2007-01-30 2012-06-13 Carl Zeiss SMT GmbH Illumination system of a microlithographic projection exposure apparatus
WO2009008999A1 (en) 2007-07-06 2009-01-15 Enodis Corporation System and method for distributing air within a display case
DE102008004762A1 (de) * 2008-01-16 2009-07-30 Carl Zeiss Smt Ag Projektionsbelichtungsanlage für die Mikrolithographie mit einer Messeinrichtung
EP2649493A1 (en) * 2010-08-30 2013-10-16 Carl Zeiss SMT GmbH Illumination system of a microlithographic projection exposure apparatus
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EP2876498B1 (en) * 2013-11-22 2017-05-24 Carl Zeiss SMT GmbH Illumination system of a microlithographic projection exposure apparatus
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CN105549327B (zh) 2014-10-29 2018-03-02 上海微电子装备（集团）股份有限公司 曝光装置的调整装置及调整方法
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Also Published As

Publication number Publication date
JP2020524309A (ja) 2020-08-13
KR20200020812A (ko) 2020-02-26
US11209635B2 (en) 2021-12-28
TW201905535A (zh) 2019-02-01
KR102290482B1 (ko) 2021-08-13
US10539770B2 (en) 2020-01-21
EP3642674B1 (en) 2023-03-15
JP6803483B2 (ja) 2020-12-23
US20180364463A1 (en) 2018-12-20
US20200150409A1 (en) 2020-05-14
CN110998453A (zh) 2020-04-10
EP3642674A1 (en) 2020-04-29
WO2018236770A1 (en) 2018-12-27
TWI706158B (zh) 2020-10-01

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