PL410024A1 - Sposób wytwarzania szeregowego układu pojemność-indukcyjność do układów scalonych - Google Patents

Sposób wytwarzania szeregowego układu pojemność-indukcyjność do układów scalonych

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Publication number
PL410024A1
PL410024A1 PL410024A PL41002414A PL410024A1 PL 410024 A1 PL410024 A1 PL 410024A1 PL 410024 A PL410024 A PL 410024A PL 41002414 A PL41002414 A PL 41002414A PL 410024 A1 PL410024 A1 PL 410024A1
Authority
PL
Poland
Prior art keywords
integrated circuits
inductance
serial circuit
circuit capacitance
manufacturing serial
Prior art date
Application number
PL410024A
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English (en)
Other versions
PL222094B1 (pl
Inventor
Tomasz Kołtunowicz
Paweł Żukowski
Vitalii Bondariev
Julia Fedotova
Alexander Fedotov
Original Assignee
Politechnika Lubelska
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Politechnika Lubelska filed Critical Politechnika Lubelska
Priority to PL410024A priority Critical patent/PL222094B1/pl
Publication of PL410024A1 publication Critical patent/PL410024A1/pl
Publication of PL222094B1 publication Critical patent/PL222094B1/pl

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  • Semiconductor Integrated Circuits (AREA)
  • Compounds Of Iron (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)

Abstract

Sposób wytwarzania szeregowego układu pojemność-indukcyjność do układów scalonych, na płytce (3) podłożowej z krzemu, poddanej wcześniej wszystkim operacjom technologicznym wymaganym do wykonania układu scalonego polega na tym, że wykonuje się naniesienie rozpylaniem jonowym (6) warstwy (1) materiału o składzie (FeCoZr)62,7(CaF2)37,3 w atmosferze argonu i tlenu w zakresie ciśnień argonu od 10-2 Pa do 10-1 Pa oraz tlenu w zakresie ciśnień od 10-2 Pa do 10-1 Pa, a następnie wykonuje się wygrzewanie stabilizujące w temperaturze 150°C, w czasie 10 - 20 minut.
PL410024A 2014-11-03 2014-11-03 Sposób wytwarzania szeregowego układu pojemność-indukcyjność do układów scalonych PL222094B1 (pl)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL410024A PL222094B1 (pl) 2014-11-03 2014-11-03 Sposób wytwarzania szeregowego układu pojemność-indukcyjność do układów scalonych

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL410024A PL222094B1 (pl) 2014-11-03 2014-11-03 Sposób wytwarzania szeregowego układu pojemność-indukcyjność do układów scalonych

Publications (2)

Publication Number Publication Date
PL410024A1 true PL410024A1 (pl) 2015-08-03
PL222094B1 PL222094B1 (pl) 2016-06-30

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Family Applications (1)

Application Number Title Priority Date Filing Date
PL410024A PL222094B1 (pl) 2014-11-03 2014-11-03 Sposób wytwarzania szeregowego układu pojemność-indukcyjność do układów scalonych

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PL (1) PL222094B1 (pl)

Also Published As

Publication number Publication date
PL222094B1 (pl) 2016-06-30

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