PL3392633T3 - Przetwornik ciśnienia - Google Patents

Przetwornik ciśnienia

Info

Publication number
PL3392633T3
PL3392633T3 PL18163881T PL18163881T PL3392633T3 PL 3392633 T3 PL3392633 T3 PL 3392633T3 PL 18163881 T PL18163881 T PL 18163881T PL 18163881 T PL18163881 T PL 18163881T PL 3392633 T3 PL3392633 T3 PL 3392633T3
Authority
PL
Poland
Prior art keywords
pressure transducer
transducer
pressure
Prior art date
Application number
PL18163881T
Other languages
English (en)
Inventor
Juerg Hess
Original Assignee
Huba Control Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Huba Control Ag filed Critical Huba Control Ag
Publication of PL3392633T3 publication Critical patent/PL3392633T3/pl

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/06—Devices or apparatus for measuring differences of two or more fluid pressure values using electric or magnetic pressure-sensitive elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0002—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using variations in ohmic resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0069—Electrical connection means from the sensor to its support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/02—Arrangements for preventing, or for compensating for, effects of inclination or acceleration of the measuring device; Zero-setting means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0005—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0044—Constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0047—Diaphragm with non uniform thickness, e.g. with grooves, bosses or continuously varying thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
PL18163881T 2017-04-19 2018-03-26 Przetwornik ciśnienia PL3392633T3 (pl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP17166967 2017-04-19
EP18163881.8A EP3392633B1 (en) 2017-04-19 2018-03-26 Pressure transducer

Publications (1)

Publication Number Publication Date
PL3392633T3 true PL3392633T3 (pl) 2020-06-01

Family

ID=58578879

Family Applications (1)

Application Number Title Priority Date Filing Date
PL18163881T PL3392633T3 (pl) 2017-04-19 2018-03-26 Przetwornik ciśnienia

Country Status (3)

Country Link
US (1) US10697844B2 (pl)
EP (1) EP3392633B1 (pl)
PL (1) PL3392633T3 (pl)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3671161B1 (de) * 2018-12-21 2025-01-29 Exentis Knowledge GmbH Formkörper sowie verfahren zur herstellung eines formkörpers
EP3671159B1 (de) 2018-12-21 2022-12-21 Exentis Knowledge GmbH Körper hergestellt durch additives herstellungsverfahren und verfahren zur herstellung des körpers
US11573143B2 (en) * 2021-04-21 2023-02-07 Vitesco Technologies USA, LLC Mems pressure sensing element with stress adjustors to minimize thermal hysteresis induced by electrical field
CN112729399B (zh) * 2020-12-25 2023-03-14 武汉理工大学 一种液气压力、液气振动传感器及制备方法
GB2641223A (en) * 2024-05-17 2025-11-26 Nano Analytik Gmbh Silicon microdevices with planar strain sensing members

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3722264A (en) * 1971-01-25 1973-03-27 Itt Transducer and components therefor
CA1078217A (en) * 1976-03-31 1980-05-27 Robert C. Whitehead (Jr.) Force transducing cantilever beam and pressure transducer incorporating it
US4376929A (en) 1976-12-27 1983-03-15 Myhre Kjell E Optimized stress and strain distribution diaphragms
GB2043907B (en) * 1979-03-08 1983-04-20 Standard Telephones Cables Ltd Differential pressure sensor
US4395915A (en) * 1981-10-06 1983-08-02 Bourns Instruments, Inc. Pressure measuring apparatus
JPS6188120A (ja) * 1984-10-05 1986-05-06 Nippon Denso Co Ltd 圧力変換器
US4791818A (en) 1987-07-20 1988-12-20 Itt Corporation Cantilever beam, insertable, vortex meter sensor
JPH01242933A (ja) * 1988-03-24 1989-09-27 Yokogawa Electric Corp 半導体圧力センサ
US5177661A (en) 1989-01-13 1993-01-05 Kopin Corporation SOI diaphgram sensor
EP0468098B1 (en) * 1990-07-27 1995-08-02 Data Instruments Inc. Method of manufacturing pressure transducers
US5511427A (en) * 1993-07-21 1996-04-30 Honeywell Inc. Cantilevered microbeam temperature sensor
GB9524624D0 (en) 1995-12-01 1996-01-31 Weston Aerospace Ltd Pressure sensor
WO2002101347A1 (en) * 2001-06-08 2002-12-19 Radi Medical Systems Ab Miniaturized pressure sensor
GB2369889B (en) * 2001-07-13 2004-06-09 John David Barnett Strain sensing installation
US6959608B2 (en) 2002-05-23 2005-11-01 The Board Of Trustees Of The Leland Stanford Junior University Ultra-miniature pressure sensors and probes
JP2004045140A (ja) * 2002-07-10 2004-02-12 Tem-Tech Kenkyusho:Kk 荷重変換型の金属ダイヤフラム圧力センサ
US7290453B2 (en) 2004-12-28 2007-11-06 Amnon Brosh Composite MEMS pressure sensor configuration
DE602007012995D1 (de) 2007-01-31 2011-04-21 Infineon Technologies Ag Mikromechanischer Drucksensor
JP2009264890A (ja) 2008-04-24 2009-11-12 Panasonic Electric Works Co Ltd 圧力センサ
JP6021110B2 (ja) * 2012-12-28 2016-11-02 国立大学法人 東京大学 感圧型センサ
JP6194624B2 (ja) 2013-04-25 2017-09-13 ミツミ電機株式会社 物理量検出素子及び物理量検出装置
JP6432722B2 (ja) 2013-07-30 2018-12-05 俊 保坂 半導体センサー・デバイスおよびその製造方法
JP6214433B2 (ja) * 2013-10-04 2017-10-18 株式会社フジクラ 半導体圧力センサ
EP2899548B1 (en) 2014-01-27 2023-06-21 Siemens Schweiz AG Versatile detection circuit
CN106062525B (zh) 2014-03-13 2019-07-09 精工电子有限公司 压力传感器
US9863828B2 (en) * 2014-06-18 2018-01-09 Seiko Epson Corporation Physical quantity sensor, electronic device, altimeter, electronic apparatus, and mobile object
JP6563939B2 (ja) * 2014-09-24 2019-08-21 セイコーインスツル株式会社 圧力変化測定装置、高度測定装置及び圧力変化測定方法
DE102014014103A1 (de) * 2014-09-30 2016-03-31 Hella Kgaa Hueck & Co. Sensormodul zur Messung eines Druckes eines Fluides mit mindestens einer auf einem Schaltungsträger angeordneten elektronischen Schaltung, insbesondere einem integrierten Schaltkreis und mindestens einem Druckmesschip
US9995642B2 (en) 2014-10-06 2018-06-12 The University Of Tokyo Cantilever pressure sensor with division portions for dividing lever resistance and having piezoresistor element
EP3258235A1 (en) * 2016-06-16 2017-12-20 Huba Control Ag Differential pressure transducer

Also Published As

Publication number Publication date
EP3392633B1 (en) 2019-12-11
US10697844B2 (en) 2020-06-30
EP3392633A1 (en) 2018-10-24
US20180306663A1 (en) 2018-10-25

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