PL2992122T3 - Wszechstronne urządzenie mocujące do powierzchniowej obróbki podłoży prętowych - Google Patents

Wszechstronne urządzenie mocujące do powierzchniowej obróbki podłoży prętowych

Info

Publication number
PL2992122T3
PL2992122T3 PL14728823T PL14728823T PL2992122T3 PL 2992122 T3 PL2992122 T3 PL 2992122T3 PL 14728823 T PL14728823 T PL 14728823T PL 14728823 T PL14728823 T PL 14728823T PL 2992122 T3 PL2992122 T3 PL 2992122T3
Authority
PL
Poland
Prior art keywords
treating
rod
shaped substrates
versatile holder
versatile
Prior art date
Application number
PL14728823T
Other languages
English (en)
Inventor
Max Siebert
Remo Vogel
Karl Wolfgang Jotz
Original Assignee
Oerlikon Surface Solutions Ag, Pfäffikon
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Surface Solutions Ag, Pfäffikon filed Critical Oerlikon Surface Solutions Ag, Pfäffikon
Publication of PL2992122T3 publication Critical patent/PL2992122T3/pl

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/021Cleaning or etching treatments
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks
    • C23C14/042Coating on selected surface areas, e.g. using masks using masks
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50Substrate holders
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32403Treating multiple sides of workpieces, e.g. 3D workpieces
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32431Constructional details of the reactor
    • H01J37/32715Workpiece holder

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemically Coating (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning In General (AREA)
  • Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
  • Silver Salt Photography Or Processing Solution Therefor (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
PL14728823T 2013-05-02 2014-04-24 Wszechstronne urządzenie mocujące do powierzchniowej obróbki podłoży prętowych PL2992122T3 (pl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102013007454.1A DE102013007454A1 (de) 2013-05-02 2013-05-02 Vielseitige Haltevorrichtung zur Oberflächenbehandlung von stangenförmigen Substraten

Publications (1)

Publication Number Publication Date
PL2992122T3 true PL2992122T3 (pl) 2017-09-29

Family

ID=50685858

Family Applications (1)

Application Number Title Priority Date Filing Date
PL14728823T PL2992122T3 (pl) 2013-05-02 2014-04-24 Wszechstronne urządzenie mocujące do powierzchniowej obróbki podłoży prętowych

Country Status (14)

Country Link
US (1) US10072326B2 (pl)
EP (1) EP2992122B1 (pl)
JP (1) JP6338654B2 (pl)
KR (1) KR102203484B1 (pl)
CN (1) CN105579611B (pl)
AR (1) AR096157A1 (pl)
CA (1) CA2921064C (pl)
DE (1) DE102013007454A1 (pl)
MX (1) MX2015015254A (pl)
MY (1) MY178231A (pl)
PH (1) PH12015502506A1 (pl)
PL (1) PL2992122T3 (pl)
SG (1) SG11201508970RA (pl)
WO (1) WO2014177254A1 (pl)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013007454A1 (de) * 2013-05-02 2014-11-06 Oerlikon Trading Ag, Trübbach Vielseitige Haltevorrichtung zur Oberflächenbehandlung von stangenförmigen Substraten
AR101884A1 (es) * 2014-09-17 2017-01-18 Oerlikon Surface Solutions Ag Trübbach Soporte para tratar cuchillas
DE102015105169A1 (de) * 2015-04-02 2016-10-06 Cemecon Ag Chargierung von Werkstücken in einer Beschichtungsanlage
KR102655730B1 (ko) * 2017-02-16 2024-04-09 오를리콘 서피스 솔루션스 아크티엔게젤샤프트, 페피콘 복수 공정 단계용 공구 유지 장치
USD881242S1 (en) * 2018-01-29 2020-04-14 Oerlikon Surface Solutions Ag, Pfaffikon Tool holder
DE102019135182A1 (de) * 2019-12-19 2021-06-24 Oerlikon Surface Solutions Ag, Pfäffikon Haltevorrichtung zum Halten eines Substrats

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4528208A (en) 1983-10-13 1985-07-09 Zymet, Inc. Method and apparatus for controlling article temperature during treatment in vacuum
US4711353A (en) * 1986-05-01 1987-12-08 Rozmestor Raymond L Socket organizer
JPH0217552A (ja) * 1988-07-06 1990-01-22 Nec Corp 性能データ計測方式
US5031974A (en) * 1990-04-04 1991-07-16 Liberty Diversified Industries, Inc. Organizer cabinet
US5560480A (en) * 1994-11-04 1996-10-01 Singleton; Robert P. Socket holder apparatus
US5823361A (en) * 1996-02-06 1998-10-20 Progressive System Technologies, Inc. Substrate support apparatus for a substrate housing
US5775513A (en) * 1996-09-19 1998-07-07 Anthony; Larry L. Golf club holder
US5996818A (en) * 1998-11-24 1999-12-07 Lab-Interlink, Inc. Specimen tube rack
GB9916558D0 (en) * 1999-07-14 1999-09-15 Dormer Tools Sheffield Ltd Method and means for drill production
DE10012575A1 (de) * 2000-03-15 2001-09-27 Schott Glas Transportvorrichtung für medizinische Behälter
US6474481B1 (en) * 2001-06-08 2002-11-05 Yung-Yuan Liu Flexible tool storage device
US7442285B2 (en) * 2004-06-17 2008-10-28 Vapor Technologies, Inc. Common rack for electroplating and PVD coating operations
DE102005003047A1 (de) 2005-01-22 2006-07-27 Identif Gmbh Vorrichtung zum Bewegen von Werkstücken
CN100529171C (zh) 2005-07-21 2009-08-19 林泓庆 物理气相沉积蒸镀机的被镀物固持装置
US8703240B2 (en) 2005-10-18 2014-04-22 American Axle & Manufacturing, Inc. Apparatus and method for masking and coating tool blades
JP2008260973A (ja) 2007-04-10 2008-10-30 Shinko Seiki Co Ltd 成膜装置用の被処理物の支持具
AU2009256934B2 (en) * 2008-06-11 2014-06-26 Oerlikon Trading Ag, Trubbach Workpiece carrier
USD598566S1 (en) * 2008-08-12 2009-08-18 Diagenode Societe Anonyme Medical instrument for laboratory use
USD608013S1 (en) * 2009-01-29 2010-01-12 ABgene Limited PCR multi-well plate
US8016118B2 (en) * 2009-01-31 2011-09-13 Charles Arthur Boll Digger sifter with ergonomic handle
DE102010056157A1 (de) * 2010-12-28 2012-06-28 Oerlikon Trading Ag, Trübbach Halterung für Bohrkopfbeschichtung
DE102011050451A1 (de) 2011-05-18 2012-11-22 Renate Richardt Stabmesserkopf, Beschichtungsabdeckvorrichtung und Verfahren zum Schleifen und Beschichten von austauschbaren Stabmessern eines Stabmesserkopfes
DE102013007454A1 (de) * 2013-05-02 2014-11-06 Oerlikon Trading Ag, Trübbach Vielseitige Haltevorrichtung zur Oberflächenbehandlung von stangenförmigen Substraten

Also Published As

Publication number Publication date
PH12015502506B1 (en) 2016-02-22
DE102013007454A1 (de) 2014-11-06
MX2015015254A (es) 2016-07-05
CN105579611A (zh) 2016-05-11
KR102203484B1 (ko) 2021-01-18
SG11201508970RA (en) 2015-11-27
AR096157A1 (es) 2015-12-09
CN105579611B (zh) 2018-05-15
US10072326B2 (en) 2018-09-11
US20160076131A1 (en) 2016-03-17
JP6338654B2 (ja) 2018-06-06
CA2921064A1 (en) 2014-11-06
JP2016524650A (ja) 2016-08-18
PH12015502506A1 (en) 2016-02-22
WO2014177254A1 (de) 2014-11-06
KR20160003157A (ko) 2016-01-08
CA2921064C (en) 2021-02-23
EP2992122B1 (de) 2017-03-22
EP2992122A1 (de) 2016-03-09
MY178231A (en) 2020-10-07

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