SG11201508970RA - Versatile holder for treating the surface of rod-shaped substrates - Google Patents

Versatile holder for treating the surface of rod-shaped substrates

Info

Publication number
SG11201508970RA
SG11201508970RA SG11201508970RA SG11201508970RA SG11201508970RA SG 11201508970R A SG11201508970R A SG 11201508970RA SG 11201508970R A SG11201508970R A SG 11201508970RA SG 11201508970R A SG11201508970R A SG 11201508970RA SG 11201508970R A SG11201508970R A SG 11201508970RA
Authority
SG
Singapore
Prior art keywords
treating
rod
shaped substrates
versatile holder
versatile
Prior art date
Application number
SG11201508970RA
Inventor
Max Siebert
Remo Vogel
Karl Wolfgang Jotz
Original Assignee
Oerlikon Surface Solutions Ag Trubbach
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Surface Solutions Ag Trubbach filed Critical Oerlikon Surface Solutions Ag Trubbach
Publication of SG11201508970RA publication Critical patent/SG11201508970RA/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/021Cleaning or etching treatments
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks
    • C23C14/042Coating on selected surface areas, e.g. using masks using masks
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50Substrate holders
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32403Treating multiple sides of workpieces, e.g. 3D workpieces
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32431Constructional details of the reactor
    • H01J37/32715Workpiece holder

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Physical Vapour Deposition (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Chemically Coating (AREA)
  • Cleaning In General (AREA)
  • Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
  • Silver Salt Photography Or Processing Solution Therefor (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
SG11201508970RA 2013-05-02 2014-04-24 Versatile holder for treating the surface of rod-shaped substrates SG11201508970RA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102013007454.1A DE102013007454A1 (en) 2013-05-02 2013-05-02 Versatile holding device for surface treatment of bar-shaped substrates
PCT/EP2014/001091 WO2014177254A1 (en) 2013-05-02 2014-04-24 Versatile holder for treating the surface of rod-shaped substrates

Publications (1)

Publication Number Publication Date
SG11201508970RA true SG11201508970RA (en) 2015-11-27

Family

ID=50685858

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201508970RA SG11201508970RA (en) 2013-05-02 2014-04-24 Versatile holder for treating the surface of rod-shaped substrates

Country Status (14)

Country Link
US (1) US10072326B2 (en)
EP (1) EP2992122B1 (en)
JP (1) JP6338654B2 (en)
KR (1) KR102203484B1 (en)
CN (1) CN105579611B (en)
AR (1) AR096157A1 (en)
CA (1) CA2921064C (en)
DE (1) DE102013007454A1 (en)
MX (1) MX2015015254A (en)
MY (1) MY178231A (en)
PH (1) PH12015502506A1 (en)
PL (1) PL2992122T3 (en)
SG (1) SG11201508970RA (en)
WO (1) WO2014177254A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013007454A1 (en) * 2013-05-02 2014-11-06 Oerlikon Trading Ag, Trübbach Versatile holding device for surface treatment of bar-shaped substrates
AR101884A1 (en) * 2014-09-17 2017-01-18 Oerlikon Surface Solutions Ag Trubbach SUPPORT TO TREAT BLADES
DE102015105169A1 (en) * 2015-04-02 2016-10-06 Cemecon Ag Charging of workpieces in a coating plant
SG11201906439PA (en) * 2017-02-16 2019-08-27 Oerlikon Surface Solutions Ag Pfaeffikon Tool fixture for multiple process steps
USD881242S1 (en) * 2018-01-29 2020-04-14 Oerlikon Surface Solutions Ag, Pfaffikon Tool holder
DE102019135182A1 (en) * 2019-12-19 2021-06-24 Oerlikon Surface Solutions Ag, Pfäffikon Holding device for holding a substrate

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4528208A (en) 1983-10-13 1985-07-09 Zymet, Inc. Method and apparatus for controlling article temperature during treatment in vacuum
US4711353A (en) * 1986-05-01 1987-12-08 Rozmestor Raymond L Socket organizer
JPH0217552A (en) * 1988-07-06 1990-01-22 Nec Corp Performance data measuring system
US5031974A (en) * 1990-04-04 1991-07-16 Liberty Diversified Industries, Inc. Organizer cabinet
US5560480A (en) * 1994-11-04 1996-10-01 Singleton; Robert P. Socket holder apparatus
US5823361A (en) * 1996-02-06 1998-10-20 Progressive System Technologies, Inc. Substrate support apparatus for a substrate housing
US5775513A (en) * 1996-09-19 1998-07-07 Anthony; Larry L. Golf club holder
US5996818A (en) * 1998-11-24 1999-12-07 Lab-Interlink, Inc. Specimen tube rack
GB9916558D0 (en) 1999-07-14 1999-09-15 Dormer Tools Sheffield Ltd Method and means for drill production
DE10012575A1 (en) * 2000-03-15 2001-09-27 Schott Glas Transport unit for medicinal containers comprises a plastic carrier plate with openings, with the cross section of the openings and the thickness of the carrier plate chosen so that the containers are centrally clamped
US6474481B1 (en) * 2001-06-08 2002-11-05 Yung-Yuan Liu Flexible tool storage device
US7442285B2 (en) * 2004-06-17 2008-10-28 Vapor Technologies, Inc. Common rack for electroplating and PVD coating operations
DE102005003047A1 (en) 2005-01-22 2006-07-27 Identif Gmbh Device for moving workpieces
CN100529171C (en) 2005-07-21 2009-08-19 林泓庆 Plating article holder of physical gas phase depositing steam plating machine
US8703240B2 (en) 2005-10-18 2014-04-22 American Axle & Manufacturing, Inc. Apparatus and method for masking and coating tool blades
JP2008260973A (en) 2007-04-10 2008-10-30 Shinko Seiki Co Ltd Support for object to be treated for film deposition system
AU2009256934B2 (en) * 2008-06-11 2014-06-26 Oerlikon Trading Ag, Trubbach Workpiece carrier
USD598566S1 (en) * 2008-08-12 2009-08-18 Diagenode Societe Anonyme Medical instrument for laboratory use
USD608013S1 (en) * 2009-01-29 2010-01-12 ABgene Limited PCR multi-well plate
US8016118B2 (en) * 2009-01-31 2011-09-13 Charles Arthur Boll Digger sifter with ergonomic handle
DE102010056157A1 (en) * 2010-12-28 2012-06-28 Oerlikon Trading Ag, Trübbach Mount for drill head coating
DE102011050451A1 (en) 2011-05-18 2012-11-22 Renate Richardt Bar blade head has connection region that is provided in lower position in relation to level of front end of outer edge of cutting head main portion to couple main portion to adapter
DE102013007454A1 (en) * 2013-05-02 2014-11-06 Oerlikon Trading Ag, Trübbach Versatile holding device for surface treatment of bar-shaped substrates

Also Published As

Publication number Publication date
PH12015502506B1 (en) 2016-02-22
CA2921064A1 (en) 2014-11-06
MY178231A (en) 2020-10-07
US10072326B2 (en) 2018-09-11
PL2992122T3 (en) 2017-09-29
WO2014177254A1 (en) 2014-11-06
EP2992122A1 (en) 2016-03-09
DE102013007454A1 (en) 2014-11-06
AR096157A1 (en) 2015-12-09
US20160076131A1 (en) 2016-03-17
CN105579611B (en) 2018-05-15
KR102203484B1 (en) 2021-01-18
PH12015502506A1 (en) 2016-02-22
CA2921064C (en) 2021-02-23
MX2015015254A (en) 2016-07-05
JP6338654B2 (en) 2018-06-06
KR20160003157A (en) 2016-01-08
EP2992122B1 (en) 2017-03-22
JP2016524650A (en) 2016-08-18
CN105579611A (en) 2016-05-11

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