PL2816137T3 - Sposób przeprowadzania procesu osadzania pcvd - Google Patents

Sposób przeprowadzania procesu osadzania pcvd

Info

Publication number
PL2816137T3
PL2816137T3 PL14184932T PL14184932T PL2816137T3 PL 2816137 T3 PL2816137 T3 PL 2816137T3 PL 14184932 T PL14184932 T PL 14184932T PL 14184932 T PL14184932 T PL 14184932T PL 2816137 T3 PL2816137 T3 PL 2816137T3
Authority
PL
Poland
Prior art keywords
carrying
deposition process
pcvd deposition
pcvd
deposition
Prior art date
Application number
PL14184932T
Other languages
English (en)
Inventor
Igor Milicevic
Mattheus Jacobus Nicolaas Van Stralen
Johannes Antoon Hartsuiker
Original Assignee
Draka Comteq B.V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=47191617&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=PL2816137(T3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Draka Comteq B.V. filed Critical Draka Comteq B.V.
Publication of PL2816137T3 publication Critical patent/PL2816137T3/pl

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413Reactant delivery systems
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00Other methods of shaping glass
    • C03B19/14Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1415Reactant delivery systems
    • C03B19/1423Reactant deposition burners
    • C03B19/143Plasma vapour deposition
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • C03B37/01807Reactant delivery systems, e.g. reactant deposition burners
    • C03B37/01815Reactant deposition burners or deposition heating means
    • C03B37/01823Plasma deposition burners or heating means
    • C03B37/0183Plasma deposition burners or heating means for plasma within a tube substrate
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04Coating on selected surface areas, e.g. using masks
    • C23C16/045Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45523Pulsed gas flow or change of composition over time
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/511Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/36Fuel or oxidant details, e.g. flow rate, flow rate ratio, fuel additives
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/60Relationship between burner and deposit, e.g. position
    • C03B2207/66Relative motion
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/70Control measures

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Chemical Vapour Deposition (AREA)
PL14184932T 2011-11-21 2012-11-16 Sposób przeprowadzania procesu osadzania pcvd PL2816137T3 (pl)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
NL2007831A NL2007831C2 (en) 2011-11-21 2011-11-21 Apparatus and method for carrying out a pcvd deposition process.
EP14184932.3A EP2816137B1 (en) 2011-11-21 2012-11-16 Method for carrying out a pcvd deposition process
EP12192965.7A EP2594659B1 (en) 2011-11-21 2012-11-16 Method for carrying out a PCVD deposition process

Publications (1)

Publication Number Publication Date
PL2816137T3 true PL2816137T3 (pl) 2019-12-31

Family

ID=47191617

Family Applications (1)

Application Number Title Priority Date Filing Date
PL14184932T PL2816137T3 (pl) 2011-11-21 2012-11-16 Sposób przeprowadzania procesu osadzania pcvd

Country Status (8)

Country Link
US (1) US9067816B2 (pl)
EP (2) EP2816137B1 (pl)
JP (1) JP6129522B2 (pl)
CN (2) CN107265841B (pl)
BR (1) BR102012029370B1 (pl)
DK (2) DK2816137T3 (pl)
NL (1) NL2007831C2 (pl)
PL (1) PL2816137T3 (pl)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
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NL2007447C2 (nl) * 2011-09-20 2013-03-21 Draka Comteq Bv Werkwijze voor de vervaardiging van een primaire voorvorm voor optische vezels, primaire voorvorm, uiteindelijke voorvorm, optische vezel.
NL2007831C2 (en) 2011-11-21 2013-05-23 Draka Comteq Bv Apparatus and method for carrying out a pcvd deposition process.
WO2013160714A1 (en) 2012-04-27 2013-10-31 Draka Comteq Bv Hybrid single and multimode optical fiber for a home network
US9188754B1 (en) 2013-03-15 2015-11-17 Draka Comteq, B.V. Method for manufacturing an optical-fiber buffer tube
JP6298893B2 (ja) * 2013-12-20 2018-03-20 ドラカ・コムテツク・ベー・ベー 損失低下を示す、台形コアを有するシングルモードファイバ
NL2012857B1 (en) * 2014-05-22 2016-03-07 Draka Comteq Bv Apparatus and method for carrying out a plasma deposition process.
US11365481B2 (en) * 2015-10-06 2022-06-21 City University Of Hong Kong Homogeneous and transparent protective coatings for precious metals and copper alloys
NL2017575B1 (en) * 2016-10-04 2018-04-13 Draka Comteq Bv A method and an apparatus for performing a plasma chemical vapour deposition process and a method
DK3729151T3 (da) 2017-12-21 2022-07-11 Draka Comteq France Singlemodefiber, som er ufølsom over for bøjningstab, med en lav rende og tilsvarende optisk system
CN112408775B (zh) * 2020-11-13 2022-10-18 烽火通信科技股份有限公司 一种光纤预制棒制造设备

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JP2013107820A (ja) 2013-06-06
CN103130411A (zh) 2013-06-05
CN107265841B (zh) 2020-11-10
EP2816137A1 (en) 2014-12-24
EP2816137B1 (en) 2019-08-21
EP2594659A1 (en) 2013-05-22
BR102012029370A2 (pt) 2014-03-25
US9067816B2 (en) 2015-06-30
DK2816137T3 (da) 2019-10-07
EP2594659B1 (en) 2015-01-07
DK2594659T3 (en) 2015-02-16
CN103130411B (zh) 2017-07-14
US20130167593A1 (en) 2013-07-04
NL2007831C2 (en) 2013-05-23
JP6129522B2 (ja) 2017-05-17
CN107265841A (zh) 2017-10-20
BR102012029370B1 (pt) 2020-12-08

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