PL2724380T3 - Sposób wykonywania struktury obejmujący etapy powlekania i odpowiednie urządzenie - Google Patents

Sposób wykonywania struktury obejmujący etapy powlekania i odpowiednie urządzenie

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Publication number
PL2724380T3
PL2724380T3 PL11749217T PL11749217T PL2724380T3 PL 2724380 T3 PL2724380 T3 PL 2724380T3 PL 11749217 T PL11749217 T PL 11749217T PL 11749217 T PL11749217 T PL 11749217T PL 2724380 T3 PL2724380 T3 PL 2724380T3
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PL
Poland
Prior art keywords
making
corresponding device
coating steps
coating
steps
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Application number
PL11749217T
Other languages
English (en)
Inventor
Alexander John Topping
Peter Drysdale Lane
Original Assignee
Big Solar Limited
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Application filed by Big Solar Limited filed Critical Big Solar Limited
Publication of PL2724380T3 publication Critical patent/PL2724380T3/pl

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    • H01L31/02—Details
    • H01L31/0224—Electrodes
    • H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
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    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042—PV modules or arrays of single PV cells
    • H01L31/05—Electrical interconnection means between PV cells inside the PV module, e.g. series connection of PV cells
    • H01L31/0504—Electrical interconnection means between PV cells inside the PV module, e.g. series connection of PV cells specially adapted for series or parallel connection of solar cells in a module
    • H01L31/0508—Electrical interconnection means between PV cells inside the PV module, e.g. series connection of PV cells specially adapted for series or parallel connection of solar cells in a module the interconnection means having a particular shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/054—Optical elements directly associated or integrated with the PV cell, e.g. light-reflecting means or light-concentrating means
    • H01L31/0547—Optical elements directly associated or integrated with the PV cell, e.g. light-reflecting means or light-concentrating means comprising light concentrating means of the reflecting type, e.g. parabolic mirrors, concentrators using total internal reflection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
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    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
    • H01L33/24—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate of the light emitting region, e.g. non-planar junction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/64—Carriers or collectors
    • H01M4/70—Carriers or collectors characterised by shape or form
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    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/80—Constructional details
    • H10K10/82—Electrodes
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    • H—ELECTRICITY
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    • H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
    • H10K77/10—Substrates, e.g. flexible substrates
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    • H10N70/011—Manufacture or treatment of multistable switching devices
    • H10N70/021—Formation of switching materials, e.g. deposition of layers
    • H10N70/023—Formation of switching materials, e.g. deposition of layers by chemical vapor deposition, e.g. MOCVD, ALD
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    • H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/011—Manufacture or treatment of multistable switching devices
    • H10N70/021—Formation of switching materials, e.g. deposition of layers
    • H10N70/026—Formation of switching materials, e.g. deposition of layers by physical vapor deposition, e.g. sputtering
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
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    • Y02E10/50—Photovoltaic [PV] energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
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    • Y02E10/52—PV systems with concentrators
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
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    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/549—Organic PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
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  • Optics & Photonics (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Photovoltaic Devices (AREA)
  • Electroluminescent Light Sources (AREA)
PL11749217T 2011-06-23 2011-06-23 Sposób wykonywania struktury obejmujący etapy powlekania i odpowiednie urządzenie PL2724380T3 (pl)

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Families Citing this family (7)

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Publication number Priority date Publication date Assignee Title
GB201301683D0 (en) 2013-01-30 2013-03-13 Big Solar Ltd Method of creating non-conductive delineations with a selective coating technology on a structured surface
GB201405663D0 (en) * 2014-03-28 2014-05-14 Big Solar Ltd Apparatus and method
GB2549134B (en) 2016-04-07 2020-02-12 Power Roll Ltd Asymmetric groove
GB2549132A (en) 2016-04-07 2017-10-11 Big Solar Ltd Aperture in a semiconductor
GB2549133B (en) 2016-04-07 2020-02-19 Power Roll Ltd Gap between semiconductors
GB201617276D0 (en) 2016-10-11 2016-11-23 Big Solar Limited Energy storage
GB2565337A (en) * 2017-08-10 2019-02-13 Power Roll Ltd Energy storage

Family Cites Families (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3948682A (en) 1974-10-31 1976-04-06 Ninel Mineevna Bordina Semiconductor photoelectric generator
US4110122A (en) 1976-05-26 1978-08-29 Massachusetts Institute Of Technology High-intensity, solid-state-solar cell device
US4283589A (en) 1978-05-01 1981-08-11 Massachusetts Institute Of Technology High-intensity, solid-state solar cell
US4295002A (en) 1980-06-23 1981-10-13 International Business Machines Corporation Heterojunction V-groove multijunction solar cell
US4335503A (en) 1980-12-24 1982-06-22 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Method of making a high voltage V-groove solar cell
US4379944A (en) 1981-02-05 1983-04-12 Varian Associates, Inc. Grooved solar cell for deployment at set angle
JPS6135573Y2 (pl) 1981-06-16 1986-10-16
JPS6486053A (en) 1987-09-29 1989-03-30 Toshiba Corp Sensitive element
US5067985A (en) 1990-06-08 1991-11-26 The United States Of America As Represented By The Secretary Of The Air Force Back-contact vertical-junction solar cell and method
JP2804839B2 (ja) 1990-10-17 1998-09-30 三菱電機株式会社 半導体装置の製造方法
US5585957A (en) 1993-03-25 1996-12-17 Nippon Telegraph And Telephone Corporation Method for producing various semiconductor optical devices of differing optical characteristics
US6084175A (en) 1993-05-20 2000-07-04 Amoco/Enron Solar Front contact trenches for polycrystalline photovoltaic devices and semi-conductor devices with buried contacts
US6090661A (en) 1998-03-19 2000-07-18 Lsi Logic Corporation Formation of novel DRAM cell capacitors by integration of capacitors with isolation trench sidewalls
DE19937724C1 (de) 1999-08-10 2000-12-07 Bosch Gmbh Robert Lichtemittierende Matrixanzeige sowie Verfahren zur Herstellung einer lichtemittierenden Matrixanzeige
DE19943720A1 (de) 1999-09-02 2000-05-25 Wagemann Hans Guenther Seriell verschaltete Solarzelle
US6762359B2 (en) * 2001-01-15 2004-07-13 Fuji Machine Mfg. Co., Ltd. Photovoltaic panel and method of producing same
DE10103114A1 (de) 2001-01-24 2002-10-31 Univ Stuttgart Herstellen elektrischer Verbindungen in Substratöffnungen von Schaltungseinheiten mittels gerichteter Abscheidung leitfähiger Schichten
CA2456671C (en) * 2001-08-13 2009-09-22 Josuke Nakata Light emitting or light receiving semiconductor module and making method thereof
WO2005013378A1 (en) * 2003-08-01 2005-02-10 Grenzone Pte Ltd An improved thin-film photovoltaic module
US7902453B2 (en) 2005-07-27 2011-03-08 Rensselaer Polytechnic Institute Edge illumination photovoltaic devices and methods of making same
DE102006019534A1 (de) 2006-04-27 2007-11-08 CiS Institut für Mikrosensorik gGmbH Mikrosensor
US20080202581A1 (en) * 2007-02-12 2008-08-28 Solasta, Inc. Photovoltaic cell with reduced hot-carrier cooling
CN101711405B (zh) 2007-05-31 2013-10-30 无限科技全球公司 制造可寻址及静态电子显示器、发电或其它电子装置的方法
US8013238B2 (en) * 2007-07-09 2011-09-06 Energy Related Devices, Inc. Micro concentrators elastically coupled with spherical photovoltaic cells
JP2009088203A (ja) 2007-09-28 2009-04-23 Sanyo Electric Co Ltd 太陽電池、太陽電池モジュール及び太陽電池の製造方法
CN101836264B (zh) 2007-10-24 2012-07-18 积水化学工业株式会社 导电性微粒、各向异性导电材料、连接结构体及导电性微粒的制造方法
US20100089443A1 (en) * 2008-09-24 2010-04-15 Massachusetts Institute Of Technology Photon processing with nanopatterned materials
AU2010235273A1 (en) * 2009-04-06 2011-11-10 Ensol As Photovoltaic cell
EP2256820A3 (en) 2009-05-25 2011-04-20 Nxp B.V. Photo-electronic device comprising a vertical p-n or p-i-n junction and manufacturing method thereof
JP2010272466A (ja) 2009-05-25 2010-12-02 Fujifilm Corp 透明導電体及びその製造方法
US9581870B2 (en) * 2009-08-13 2017-02-28 3M Innovative Properties Company Conducting film or electrode with improved optical and electrical performance for display and lighting devices and solar cells
TWI539631B (zh) 2009-09-15 2016-06-21 無限科技全球公司 製造發光、光伏或其它電子裝置及系統的方法
NL2004065C2 (en) 2010-01-06 2011-07-07 Stichting Energie Solar panel module and method for manufacturing such a solar panel module.
US8952519B2 (en) 2010-01-13 2015-02-10 Chia-Sheng Lin Chip package and fabrication method thereof
KR101060239B1 (ko) 2010-08-26 2011-08-29 한국과학기술원 집적형 박막 광기전력 소자 및 그의 제조 방법
KR101699310B1 (ko) 2010-12-17 2017-02-13 엘지전자 주식회사 태양 전지 및 그 제조 방법
US9876129B2 (en) 2012-05-10 2018-01-23 International Business Machines Corporation Cone-shaped holes for high efficiency thin film solar cells

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CA2840327C (en) 2018-09-25
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CA2840327A1 (en) 2012-12-27
CN103843149B (zh) 2017-03-22
WO2012175902A1 (en) 2012-12-27
US10665737B2 (en) 2020-05-26
US20140230895A1 (en) 2014-08-21
EP2724380B1 (en) 2016-09-28
CN103843149A (zh) 2014-06-04

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