PL1887411T3 - Sposób wytwarzania lustra o zmiennym kształcie - Google Patents
Sposób wytwarzania lustra o zmiennym kształcieInfo
- Publication number
- PL1887411T3 PL1887411T3 PL07015392T PL07015392T PL1887411T3 PL 1887411 T3 PL1887411 T3 PL 1887411T3 PL 07015392 T PL07015392 T PL 07015392T PL 07015392 T PL07015392 T PL 07015392T PL 1887411 T3 PL1887411 T3 PL 1887411T3
- Authority
- PL
- Poland
- Prior art keywords
- manufacturing
- variable shape
- shape mirror
- mirror
- variable
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Elements Other Than Lenses (AREA)
- Micromachines (AREA)
- Optical Head (AREA)
- Mechanical Optical Scanning Systems (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006216675A JP4211817B2 (ja) | 2006-08-09 | 2006-08-09 | 形状可変ミラーの製造方法 |
EP07015392A EP1887411B1 (en) | 2006-08-09 | 2007-08-06 | Manufacturing method for variable shape mirror |
Publications (1)
Publication Number | Publication Date |
---|---|
PL1887411T3 true PL1887411T3 (pl) | 2011-11-30 |
Family
ID=38666945
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PL07015392T PL1887411T3 (pl) | 2006-08-09 | 2007-08-06 | Sposób wytwarzania lustra o zmiennym kształcie |
Country Status (5)
Country | Link |
---|---|
US (1) | US8118965B2 (pl) |
EP (1) | EP1887411B1 (pl) |
JP (1) | JP4211817B2 (pl) |
CN (1) | CN101122678B (pl) |
PL (1) | PL1887411T3 (pl) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5539628B2 (ja) * | 2008-06-20 | 2014-07-02 | キヤノン電子株式会社 | 光走査用マイクロミラーデバイス、光走査装置、画像形成装置、表示装置および入力装置 |
JP5740819B2 (ja) * | 2010-02-22 | 2015-07-01 | 株式会社ニコン | 空間光変調器の製造方法、空間光変調器、照明光発生装置および露光装置 |
JP6308790B2 (ja) | 2013-02-18 | 2018-04-11 | キヤノン株式会社 | 可変形状ミラー及びその製造方法 |
DE102021103895A1 (de) | 2021-02-18 | 2022-08-18 | Leibniz-Institut Für Neue Materialien Gemeinnützige Gesellschaft Mit Beschränkter Haftung | Krafttolerante Struktur |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3904274A (en) * | 1973-08-27 | 1975-09-09 | Itek Corp | Monolithic piezoelectric wavefront phase modulator |
US4655563A (en) * | 1985-11-25 | 1987-04-07 | Itek Corporation | Variable thickness deformable mirror |
US4940318A (en) * | 1988-11-03 | 1990-07-10 | Itek Corporation | Gradient membrane deformable mirror having replaceable actuators |
US4934803A (en) * | 1989-10-12 | 1990-06-19 | Litton Systems, Inc. | Differential pressure deformable mirror |
JPH05333274A (ja) * | 1992-05-29 | 1993-12-17 | Hitachi Ltd | 形状可変鏡および該形状可変鏡の組立方法ならびに該形状可変鏡を用いた補償光学装置、アレイレーザ発振器、レーザ同位体分離器 |
WO1993025929A1 (en) * | 1992-06-08 | 1993-12-23 | United Technologies Corporation | Coaxial integrated deformable mirror actuator/retraction arrangement |
JPH09152505A (ja) * | 1995-11-30 | 1997-06-10 | Sharp Corp | 変形可能ミラー及びその製造方法及び光学装置並びに記録再生装置 |
US6464363B1 (en) * | 1999-03-17 | 2002-10-15 | Olympus Optical Co., Ltd. | Variable mirror, optical apparatus and decentered optical system which include variable mirror, variable-optical characteristic optical element or combination thereof |
US6512323B2 (en) * | 2000-03-22 | 2003-01-28 | Caterpillar Inc. | Piezoelectric actuator device |
JP2004109769A (ja) | 2002-09-20 | 2004-04-08 | Ricoh Co Ltd | 波面収差補正ミラーおよび光ピックアップ |
JP4297690B2 (ja) | 2003-01-20 | 2009-07-15 | 株式会社リコー | 波面収差補正ミラーおよび光ピックアップ |
US7708415B2 (en) * | 2003-10-20 | 2010-05-04 | Bae Systems Plc | Mirror structure having piezoelectric element bonded to a mirror substrate |
JP4483718B2 (ja) * | 2005-06-20 | 2010-06-16 | 船井電機株式会社 | 形状可変ミラー及びそれを備えた光ピックアップ装置 |
-
2006
- 2006-08-09 JP JP2006216675A patent/JP4211817B2/ja not_active Expired - Fee Related
-
2007
- 2007-08-06 EP EP07015392A patent/EP1887411B1/en not_active Expired - Fee Related
- 2007-08-06 PL PL07015392T patent/PL1887411T3/pl unknown
- 2007-08-08 US US11/889,068 patent/US8118965B2/en not_active Expired - Fee Related
- 2007-08-09 CN CN2007101413868A patent/CN101122678B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN101122678B (zh) | 2011-02-02 |
US8118965B2 (en) | 2012-02-21 |
EP1887411A2 (en) | 2008-02-13 |
JP4211817B2 (ja) | 2009-01-21 |
EP1887411A3 (en) | 2009-01-21 |
EP1887411B1 (en) | 2011-06-22 |
US20080037149A1 (en) | 2008-02-14 |
CN101122678A (zh) | 2008-02-13 |
JP2008040304A (ja) | 2008-02-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP2074445A4 (en) | METHOD FOR MANUFACTURING ADJUSTABLE LENS | |
EP1811339B8 (en) | Pattern forming method | |
EP2036586A4 (en) | METHOD FOR PRODUCING A MICRONADEL | |
EP1983636A4 (en) | PROCESS FOR PRODUCING ROTOR | |
GB0601961D0 (en) | Method | |
PT1854783E (pt) | Processo para a preparação de isocianatos | |
GB0603081D0 (en) | Method | |
HK1116471A1 (en) | Continuous method for making chlorhydrines | |
EP2031979A4 (en) | PRODUCTION METHOD FOR REVICE | |
EP2230708A4 (en) | METHOD FOR MANUFACTURING ELECTRODE-FILM FRAME ASSEMBLY | |
EP2171524A4 (en) | METHOD FOR PRODUCING GLASSES | |
PL2049720T3 (pl) | Sposób wytwarzania kształtowych produktów filtracyjnych | |
PL1887408T3 (pl) | Sposób wytwarzania zwierciadła o zmiennym kształcie | |
PT2007207E (pt) | Método para fritura final de donuts | |
EP2116853A4 (en) | MICROCHIP MANUFACTURING METHOD | |
IL185627A0 (en) | Alkyl-anilide producing method | |
EP2058114A4 (en) | METHOD OF MANUFACTURING A TIRE | |
GB0603008D0 (en) | Method | |
GB0604018D0 (en) | Method | |
GB0601699D0 (en) | Method | |
GB2439600B (en) | Method for fabricating mold | |
GB0602986D0 (en) | Method | |
EP2065420A4 (en) | PROCESS FOR PREPARING A POLYARYLENE | |
PL1887411T3 (pl) | Sposób wytwarzania lustra o zmiennym kształcie | |
EP2123611A4 (en) | METHOD FOR MANUFACTURING GRIN LENS |