PH23213A - Method and apparatus for automated polymeric film coating - Google Patents

Method and apparatus for automated polymeric film coating

Info

Publication number
PH23213A
PH23213A PH34328A PH34328A PH23213A PH 23213 A PH23213 A PH 23213A PH 34328 A PH34328 A PH 34328A PH 34328 A PH34328 A PH 34328A PH 23213 A PH23213 A PH 23213A
Authority
PH
Philippines
Prior art keywords
automated
film coating
polymeric film
polymeric
coating
Prior art date
Application number
PH34328A
Other languages
English (en)
Inventor
John A Riley
Original Assignee
John A Riley
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by John A Riley filed Critical John A Riley
Publication of PH23213A publication Critical patent/PH23213A/en

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D29/00—Simultaneous control of electric and non-electric variables
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/60—Deposition of organic layers from vapour phase
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C15/00—Enclosures for apparatus; Booths

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
PH34328A 1986-04-08 1986-10-03 Method and apparatus for automated polymeric film coating PH23213A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/849,473 US4683143A (en) 1986-04-08 1986-04-08 Method and apparatus for automated polymeric film coating

Publications (1)

Publication Number Publication Date
PH23213A true PH23213A (en) 1989-06-06

Family

ID=25305827

Family Applications (1)

Application Number Title Priority Date Filing Date
PH34328A PH23213A (en) 1986-04-08 1986-10-03 Method and apparatus for automated polymeric film coating

Country Status (6)

Country Link
US (1) US4683143A (de)
EP (1) EP0241112A3 (de)
JP (1) JPS62238361A (de)
KR (1) KR870010429A (de)
AU (1) AU6237886A (de)
PH (1) PH23213A (de)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62273714A (ja) * 1986-05-21 1987-11-27 Clarion Co Ltd 有機金属ガス供給方法および装置
US5121706A (en) * 1987-10-16 1992-06-16 The Curators Of The University Of Missouri Apparatus for applying a composite insulative coating to a substrate
JPH01215976A (ja) * 1988-02-24 1989-08-29 Fujitsu Ltd 自己診断機能を具備したスパッタリング装置
US5167718A (en) * 1988-06-23 1992-12-01 Jeffrey Stewart Parylene deposition chamber and method of use
US5078091A (en) * 1988-06-23 1992-01-07 Jeffrey Stewart Parylene deposition chamber and method of use
US4935261A (en) * 1988-10-17 1990-06-19 Micro Robotics Systems Inc. Method for controlling accurate dispensing of adhesive droplets
JP2906624B2 (ja) * 1990-09-27 1999-06-21 株式会社島津製作所 薄膜形成装置
US5268033A (en) * 1991-07-01 1993-12-07 Jeffrey Stewart Table top parylene deposition chamber
US5264039A (en) * 1992-02-24 1993-11-23 Union Carbide Chemicals & Plastics Technology Corporation Vapor deposition apparatus
US5355832A (en) * 1992-12-15 1994-10-18 Advanced Surface Technology, Inc. Polymerization reactor
US5312489A (en) * 1993-09-30 1994-05-17 Union Carbide Chemicals & Plastics Technology Corporation Rotary fixture for vapor deposition coating apparatus
US5424097A (en) * 1993-09-30 1995-06-13 Specialty Coating Systems, Inc. Continuous vapor deposition apparatus
US5488833A (en) * 1994-09-26 1996-02-06 Stewart; Jeffrey Tangential flow cold trap
RU2129475C1 (ru) * 1995-04-03 1999-04-27 Российская национальная библиотека Устройство для нанесения поли-пара-ксилиленовых покрытий
US5536322A (en) * 1995-10-27 1996-07-16 Specialty Coating Systems, Inc. Parylene deposition apparatus including a heated and cooled support platen and an electrostatic clamping device
US5536317A (en) * 1995-10-27 1996-07-16 Specialty Coating Systems, Inc. Parylene deposition apparatus including a quartz crystal thickness/rate controller
US5536319A (en) * 1995-10-27 1996-07-16 Specialty Coating Systems, Inc. Parylene deposition apparatus including an atmospheric shroud and inert gas source
US5709753A (en) * 1995-10-27 1998-01-20 Specialty Coating Sysetms, Inc. Parylene deposition apparatus including a heated and cooled dimer crucible
US5536321A (en) * 1995-10-27 1996-07-16 Specialty Coating Systems, Inc. Parylene deposition apparatus including a post-pyrolysis filtering chamber and a deposition chamber inlet filter
US5556473A (en) * 1995-10-27 1996-09-17 Specialty Coating Systems, Inc. Parylene deposition apparatus including dry vacuum pump system and downstream cold trap
US5538758A (en) * 1995-10-27 1996-07-23 Specialty Coating Systems, Inc. Method and apparatus for the deposition of parylene AF4 onto semiconductor wafers
US5879808A (en) * 1995-10-27 1999-03-09 Alpha Metals, Inc. Parylene polymer layers
US5534068A (en) * 1995-10-27 1996-07-09 Specialty Coating Systems, Inc. Parylene deposition apparatus including a tapered deposition chamber and dual vacuum outlet pumping arrangement
US5806319A (en) * 1997-03-13 1998-09-15 Wary; John Method and apparatus for cryogenically cooling a deposition chamber
US6051276A (en) * 1997-03-14 2000-04-18 Alpha Metals, Inc. Internally heated pyrolysis zone
US5841005A (en) * 1997-03-14 1998-11-24 Dolbier, Jr.; William R. Parylene AF4 synthesis
US5882725A (en) * 1997-07-01 1999-03-16 Para Tech Coating, Inc. Parylene deposition chamber including eccentric part tumbler
EP1696049B1 (de) * 1998-05-28 2010-04-28 Ulvac, Inc. Vakuumverdampfungseinrichtung
EP0962260B1 (de) * 1998-05-28 2005-01-05 Ulvac, Inc. Verdampfungssystem für organisches Material
US6275649B1 (en) 1998-06-01 2001-08-14 Nihon Shinku Gijutsu Kabushiki Kaisha Evaporation apparatus
US6428848B1 (en) 1998-08-06 2002-08-06 Toray Industries, Inc. Method for producing a metal evaporated article
US6473564B1 (en) 2000-01-07 2002-10-29 Nihon Shinku Gijutsu Kabushiki Kaisha Method of manufacturing thin organic film
US20030196680A1 (en) * 2002-04-19 2003-10-23 Dielectric Systems, Inc Process modules for transport polymerization of low epsilon thin films
US6737224B2 (en) 2001-04-17 2004-05-18 Jeffrey Stewart Method of preparing thin supported films by vacuum deposition
JP3828821B2 (ja) * 2002-03-13 2006-10-04 株式会社堀場エステック 液体材料気化供給装置
JP2004207687A (ja) * 2002-12-10 2004-07-22 Sharp Corp 半導体製造装置とそれを用いた半導体製造方法
US7883745B2 (en) 2007-07-30 2011-02-08 Micron Technology, Inc. Chemical vaporizer for material deposition systems and associated methods
JP5639816B2 (ja) * 2009-09-08 2014-12-10 東京応化工業株式会社 塗布方法及び塗布装置
JP5439097B2 (ja) * 2009-09-08 2014-03-12 東京応化工業株式会社 塗布装置及び塗布方法
JP5719546B2 (ja) * 2009-09-08 2015-05-20 東京応化工業株式会社 塗布装置及び塗布方法
JP5469966B2 (ja) * 2009-09-08 2014-04-16 東京応化工業株式会社 塗布装置及び塗布方法
CN103454179B (zh) * 2013-08-15 2015-04-01 贵州航天精工制造有限公司 一种测定航空紧固件材料蒙乃尔合金中镍含量的方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4495889A (en) * 1982-11-24 1985-01-29 Riley Thomas J Polymeric film coating apparatus
US4518623A (en) * 1982-11-24 1985-05-21 Riley Thomas J Polymeric film coating method with continuous deposition pressure control

Also Published As

Publication number Publication date
KR870010429A (ko) 1987-11-30
EP0241112A2 (de) 1987-10-14
JPS62238361A (ja) 1987-10-19
AU6237886A (en) 1987-10-15
US4683143A (en) 1987-07-28
EP0241112A3 (de) 1988-11-02

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