PH12016000283A1 - Magnetic head cleaning device, magnetic head cleaning machine, and magnetic head cleaning method - Google Patents

Magnetic head cleaning device, magnetic head cleaning machine, and magnetic head cleaning method Download PDF

Info

Publication number
PH12016000283A1
PH12016000283A1 PH12016000283A PH12016000283A PH12016000283A1 PH 12016000283 A1 PH12016000283 A1 PH 12016000283A1 PH 12016000283 A PH12016000283 A PH 12016000283A PH 12016000283 A PH12016000283 A PH 12016000283A PH 12016000283 A1 PH12016000283 A1 PH 12016000283A1
Authority
PH
Philippines
Prior art keywords
magnetic head
wiping
head cleaning
magnetic
cleaning
Prior art date
Application number
PH12016000283A
Inventor
Huang Min
Original Assignee
Kind Prec Manufacturing Dongguan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kind Prec Manufacturing Dongguan Co Ltd filed Critical Kind Prec Manufacturing Dongguan Co Ltd
Publication of PH12016000283A1 publication Critical patent/PH12016000283A1/en

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/41Cleaning of heads

Landscapes

  • Cleaning By Liquid Or Steam (AREA)

Abstract

A magnetic head cleaning device includes a cleaning tank arranged for receiving magnetic heads and a wiping device configured in the cleaning tank, the wiping device includes a fixing assembly arranged for fixing a wiping cloth and a water spray passage that is opposite to the wiping cloth. By arranging a water spray passage, the magnetic head cleaning machine of the present invention can obtain good cleaning effect and improve the quality of the magnetic heads, furthermore the structure is simple. A magnetic head cleaning method and a magnetic head cleaning machine are provided as well.

Description

Specifically, the cleaning tank 110 has an upward opening 111 whereby the magnetic head supporting device 800 could move up and down to reach to or move out of the cleaning tank 110. The wiping device 120 is fixedly configured in the cleaning tank 110. As shown in Figs. 3 and 4, the driver includes an
X-direction driving unit 131, a Y-direction driving unit 132 and a Z-direction driving unit 133 for driving the cleaning tank 110 and the wiping device 120. In the present embodiment, as shown in Fig. 4, the Z-direction driving unit 133 is fixed on the frame of the magnetic head cleaning machine, and the output end of the Z-direction driving unit 133 is fixed to the cleaning tank 110. By means of the Z-direction driving unit 133, the cleaning tank 110 and the wiping device 120 will be driven to close to or far from the magnetic supporting device 800, so that the wiping cloth of the wiping device 120 can reach to or move out of the magnetic heads. As shown in Fig. 3, the X-direction driving unit 131 and the
Y-direction driving unit 132 are arranged for driving the cleaning tank 110 and the wiping device 120 to move in a plane that is parallel to the magnetic head supporting device 800, so that the wiping cloth can wipe the surfaces of the magnetic heads to remove the dust particles. of course, the functions of the
X-direction driving unit 131, the Y-direction driving unit 132 and the Z-direction driving unit 133 can be determined by the layout and the arrangement of the magnetic head cleaning device 100. Preferably, the driving units can be air cylinders or hydraulic cylinders.
[0034] To be understood, the magnetic head supporting device 800 extended into the cleaning tank 110 will not be driven by the X-direction driving unit 131, the Y-direction driving unit 132 and the Z-direction driving unit 133, so that the magnetic heads on the magnetic head supporting device 800 and the wiping cloth can generate relative movement to carry out the cleaning process. In the present embodiment, the magnetic head cleaning device 100 further includes a fixing mechanism 140 for locating the magnetic head supporting device 800.
Specifically, as shown in Fig. 3, a plate-like structure is respectively configured at the upper side of the magnetic head cleaning device 100 and the edges of the cleaning tank 110, this plate-like structure is fixed on the frame of the magnetic head cleaning machine to form the fixing mechanism for locating the magnetic head supporting device 800.
[0035] In other embodiments of the present invention, the wiping device 120 can be fixed, and the magnetic head supporting device 800 is movable in a plane or along a vertical direction relatively to the wiping device 120 to perform the wiping. This solution also can achieve the same technical effect of the present invention.
[0036] Referring to Figs. 5-7, the wiping device 120 is arranged in the cleaning tank 110, and the magnetic head supporting device 800 can go into or go out of the cleaning tank 110 via the opening 111. When the magnetic head supporting device 800 goes into the tank, it is located above the wiping device 120, and the magnetic heads on the magnetic head supporting device 800 are faced to the wiping cloth of the wiping device 120, with the magnetic heads pressing against the wiping cloth.
[0037] Referring to Figs. 5 and 6, the wiping device 120 includes a plate-like structure which includes multiple retaining slots 121a and retaining poles 121b, the upper sides of the retaining slots 121a are located in the same level, and the retaining slots 121a are arranged at intervals. The retaining pole 121b is formed between the two adjacent retaining slots 121a, and the retaining poles 121b are located below the upper sides of the retaining slots 121a. As shown in Fig. 6, the wiping cloth is attached on the upper sides of the retaining slots 121a, and is arranged around on the retaining poles 121b, thus the wiping cloth forms a discontinuous plane that is to wipe the magnetic heads due to the spacing upper sides of the retaining slots 121a.
[0038] Furthermore, the water spray passage 122 is formed in the wiping device 120 and faced to the wiping cloth. As shown in Fig. 6, the water spray passage 122 is a hole that is formed on the retaining slot 121a and passes through the side of the retaining pole 121b. When the Z-direction driving unit 133 drives the wiping device 120 to move upward, the discontinuous plane of the wiping cloth is pressed against the magnetic heads held by the magnetic head supporting device 800. Under the actions of the X-direction driving unit 131and the Y-direction driving unit 132, the wiping cloth moves in a plane that is parallel to the plane of the magnetic head supporting device 800, so as to remove the dust particles from the surfaces of the magnetic heads by friction.
When the Z-direction driving unit 133 drives the wiping device 120 to move downward, the discontinuous plane of the wiping cloth is faced to every magnetic head, and the water from water spray passage 122 is opposite to the wiping cloth on the upper side of the retaining slot 121a, thus the dust particles will be removed from the wiping cloth thereby making the wiping cloth clean.
As a result, the thin film magnetic heads are prevented from being scratched by the dust particles attached on the wiping cloth.
[0039] By combination of Figs. 1~7, the operation process of the magnetic head cleaning machine is described in detail.
[0040] As shown in Figs. 1 and 2, the magnetic head supporting device 800 with magnetic heads supported thereon are loaded on the magnetic head loading area 600 via the charging opening 510 of the outer housing 500, and the then are transported to the cleaning tank 110 by the conveying device 400, via the upper opening 111 of the cleaning tank 110.
[0041] When the Z-direction driving unit 133 drives the wiping device 120 to move upward, the discontinuous plane of the wiping cloth is pressed against the magnetic heads held by the magnetic head supporting device 800. Under the actions of the X-direction driving unit 131 and the Y-direction driving unit 132, the wiping cloth moves in a plane that is parallel to the plane of the magnetic head supporting device 800, so as to remove the dust particles from the surfaces of the magnetic heads by friction.
[0042] After cleaned in the cleaning tank 110, the magnetic head supporting device 800 with magnetic heads is driven to move away from the cleaning tank 110, and then conveyed to the deionized water cleaning device 200 to perform further cleaning, after that, the magnetic heads are transported to the air oven 300 to perform drying, and then are transported to the unloading area 700, finally are unloaded at the discharging opening of the outer housing 500.
[0043] In comparison with the prior arts, since the magnetic head cleaning device 100 includes improved structure, specifically the water spray passage 122 is arranged in the wiping device 120 to spray water flow to the wiping cloth, so as to remove dust particles from the wiping cloth thereby making the wiping cloth clean. As a result, the thin film magnetic heads are prevented from being scratched by the dust particles attached on the wiping cloth, therefore the magnetic head cleaning device 100 can obtain improved cleaning effect, and the performance of the cleaned magnetic heads are reliable and stable. In a word, by arranging a water spray passage 122, the magnetic head cleaning machine can obtain good cleaning effect and improve the quality of the magnetic heads, further the structure is simple.
[0044] The above descriptions are considered to be the preferred embodiments,
it is to be understood that the invention is not to be limited to the disclosed embodiments, but on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the invention.
MAGNETIC HEAD CLEANING DEVICE, MAGNETIC HEAD CLEANING.
MACHINE, AND MAGNETIC HEAD CLEANING METHOD .
RELATED APPLICATIONS
This application claims the benefit of priority to Chinese Patent Application
No. 201610495320.8, filed June 27, 2016, which is hereby incorporated by reference in its entirety.
FIELD OF THE INVENTION
[0001] The present invention relates to a cleaning device for electronic components, and more particularly to a magnetic head cleaning device and a magnetic cleaning machine with the magnetic head cleaning device.
BACKGROUND OF THE INVENTION
[0002] Dust particles on thin film magnetic heads of magnetic disks will impact magnetic effect and light effect which may impact the normal use of the data storage magnetic disks or even may cause the thin film magnetic head broken, Thus the cleaning for the thin film magnetic head is a critical process in the magnetic disk manufacturing.
[0003] The conventional cleaning process for the thin film magnetic head mainly includes wiping the surfaces of the magnetic heads by using a wiping cloth that is mechanically driven, and meanwhile using detergent during the wiping, so as to achieve the cleaning. However, the wiping cloth will accumulate and gather dust particles after longtime wiping motion, and the dust particles may scratch and broke the thin film magnetic head, thus the cleaning effect for the magnetic heads is degraded and reduced.
[0004] Thus it’s desired to need an improved magnetic head cleaning device to improve the cleaning effect of the magnetic heads.
SUMMARY OF THE INVENTION
[0005] An objective of the present invention is to provide an improved magnetic head cleaning device thereby improving cleaning effect for the magnetic heads.
[0006] To achieve the objective, a magnetic head cleaning device comprises a cleaning tank arranged for receiving magnetic heads and a wiping device configured in the cleaning tank, the wiping device comprises a fixing assembly arranged for fixing a wiping cloth and a water spray passage that is opposite to the wiping cloth.
[0007] In comparison with the prior arts, since the water spray passage is arranged in the wiping device to spray water flow to the wiping cloth, so as to remove dust particles from the wiping cloth thereby making the wiping cloth clean. As a result, the thin film magnetic heads are prevented from being scratched by the dust particles attached on the wiping cloth, therefore the magnetic head cleaning device can obtain improved cleaning effect, and the performance of the cleaned magnetic heads are reliable and stable. In a word, by arranging a water spray passage, the magnetic head cleaning machine of the present invention can obtain good cleaning effect and improve the quality of the magnetic heads, furthermore the structure is simple.
[0008] Preferably, the magnetic head cleaning devices further includes a driver arranged for driving the cleaning tank and the wiping device, and the wiping cloth is driven to move close to or far from the magnetic heads. When the wiping cloth is driven to move close to the magnetic heads, the magnetic heads will be pressed against the wiping cloth and the dust particles will be removed by frictions; when the wiping cloth is driven to move far from the magnetic heads, the water flow from the water spray passage will flush and wash the wiping cloth, so that the dust particles on the wiping cloth will be cleaned to make sure the performance of the magnetic heads.
[0009] Preferably, the water spray passage is located at a side of the wiping device that is faced to the magnetic heads, and the wiping cloth is driven to be far from the magnetic heads. During the wiping motion, the dust particles on the magnetic heads will be removed and attached on one side of the wiping cloth; while since the water spray passage is configured on the other side of the wiping cloth, thus the water is sprayed out to flush the wiping cloth at an opposite direction where the dust particles are attached, in such a way, the cleaning process is much easier.
[0010] Preferably, the driver comprises an X-direction driving unit, a
Y-direction driving unit, and a Z-direction driving unit, one of which is to drive the wiping cloth to move along an opposite direction of the magnetic heads, the rest of which are to drive the wiping cloth to move along the surfaces of the magnetic heads to generate friction to remove the dust particles. The functions of the X-direction driving unit, the Y-direction driving unit and the Z-direction driving unit can be determined by the layout and the arrangement of the magnetic head cleaning device.
[0011] Preferably, the fixing assembly comprises retaining slots and retaining poles, upper sides of the retaining slots are located in the same level, the retaining slots are arranged at intervals, one of the retaining poles is arranged between two adjacent retaining slots, and the retaining poles are located below the upper sides of the retaining slots; and the water spray passage is a hole that is formed on the retaining slot and runs through the upper side of the retaining slot.
Such a structure of the water spray passage is simple and stable.
[0012] Preferably, the cleaning tank is provided with an opening whereby the magnetic heads are put into or taken out of the cleaning tank.
[0013] Preferably, the device further includes a fixing mechanism that is arranged for fixing a magnetic head supporting device.
[0014] Accordingly, a magnetic head cleaning method by using the mentioned-above magnetic head cleaning device includes placing magnetic heads in the cleaning tank; wiping the magnetic heads by the wiping device; washing the wiping cloth by water sprayed from the water spray passage; and taking the magnetic heads out of the cleaning tank.
[0015] In comparison with the prior arts, since the method includes washing the wiping cloth by water sprayed from the water spray passage, so as to remove dust particles from the wiping cloth thereby making the wiping cloth clean. As a result, the thin film magnetic heads are prevented from being scratched by the dust particles attached on the wiping cloth, therefore the magnetic head cleaning device can obtain improved cleaning effect, and the performance of the cleaned magnetic heads are reliable and stable.
[0016] Preferably, before washing the wiping cloth by water sprayed from the water spray passage, the method further includes driving the wiping mechanism to be far from the magnetic heads.
[0017] Accordingly, a magnetic head cleaning machine includes a magnetic head cleaning device, a deionized water cleaning device, an air oven and a conveying device, a magnetic head supporting device being driven by the conveying device to move among the magnetic head cleaning device, the deionized water cleaning device and the air oven. The magnetic cleaning device is as mentioned above.
[0018] In comparison with the prior arts, since the water spray passage is arranged in the wiping device to spray water flow to the wiping cloth, so as to remove dust particles from the wiping cloth thereby making the wiping cloth clean. As a result, the thin film magnetic heads are prevented from being scratched by the dust particles attached on the wiping cloth, therefore the magnetic head cleaning device can obtain improved cleaning effect, and the performance of the cleaned magnetic heads are reliable and stable. In a word, by arranging a water spray passage, the magnetic head cleaning machine of the present invention can obtain good cleaning effect and improve the quality of the magnetic heads, furthermore the structure is simple.
BRIEF DESCRIPTION OF THE DRAWINGS
[0019] Fig. 1 is a structure view of a magnetic head cleaning machine according to one embodiment of the present invention;
[0020] Fig. 2 is a schematic view showing the interior structure of the magnetic head cleaning machine with its outer housing is removed;
[0021] Fig. 3 is a structure view of a magnetic head cleaning device according to one embodiment of the present invention;
[0022] Fig. 4 is another structure view of a magnetic head cleaning device according to one embodiment of the present invention;
[0023] Fig. 5 is a cross-sectional view of Fig. 3 along the A-A direction;
[0024] Fig. 6 is an enlarged view of portion B in Fig. 5;
[0025] Fig. 7 is an exploded view of a magnetic head cleaning device according to one embodiment of the present invention.
DETAILED DESCRIPTION OF ILLUSTRATED EMBODIMENTS
[0026] Following is the preferred embodiments of the present invention, which will not limit the scope of the present invention however.
[0027] As shown in Figs. 1 and 2, a magnetic head cleaning machine of the present invention includes a magnetic head cleaning device 100, a deionized water cleaning device 200, an air oven 300 and a conveying device 400. A magnetic head supporting device 800 is driven by the conveying device 400 to move among the magnetic head cleaning device 100, the deionized water cleaning device 200 and the air oven 300.
[0028] In details, as shown in Fig. 1, the magnetic head cleaning machine is covered by an outer housing 500 to form a large frame structure, which is capable to automatically clean magnetic heads. To be understood, the outer housing 500 is provided with human machine interfaces supplied for operators to control the cleaning machine, several doors supplied for overhauling and indicating lights for showing the operation status of the cleaning machine.
[0029] Fig. 2 shows the interior structure of the magnetic head cleaning machine with the outer housing 500 is removed. This figure is for showing the mainly interior structure and arrangement of magnetic head cleaning machine, and some well-known structures such as control boxes, motors, and governors are not illustrated here.
[0030] As shown in Fig. 2, the magnetic head cleaning machine includes magnetic head loading area 600, the magnetic head cleaning device 100, the deionized water cleaning device 200, the air oven 300 and magnetic head unloading area 700, which are arranged in linearity. The conveying device 400 is located at a side of the magnetic head cleaning machine, by means of fixtures and conveyor belts, the magnetic heads are to be moved among the magnetic head loading area 600, the magnetic head cleaning device 100, the deionized water cleaning device 200, the air oven 300 and the magnetic head unloading area 700. Specifically, the magnetic heads at the magnetic head loading area 600 are to be conveyed to the magnetic head cleaning device 100 to perform cleaning, then are to be conveyed to the deionized water cleaning device 200 to perform further cleaning, then are to be conveyed to the air oven 300 to perform drying, finally are to be conveyed to the magnetic head unloading area 700 to unload. In addition, the outer housing 500 is provided with a charging opening 510 that is opposite to the magnetic head loading area 600, and a discharging opening (not shown) that is opposite to the magnetic head unloading area 700.
[0031] To be understood, the multiple magnetic heads are carried and held by the magnetic head supporting device 800 for improving the cleaning efficiency and the cleaning capability, and the magnetic head supporting device 800 together with the magnetic heads held thereon are to be transported into the magnetic head cleaning machine to perform movement, washing, cleaning and drying.
[0032] Referring to Figs. 3~7, the magnetic head cleaning device 100 of the magnetic head cleaning machine includes a cleaning tank 110 for receiving the magnetic heads and a wiping device 120 configured in the cleaning tank 110.
The wiping device 120 includes a fixing assembly 121 for locating a wiping cloth. Further, in the magnetic head cleaning device 100 of the present invention, the wiping device 120 has a water spray passage that is opposite to the wiping cloth. The water spray passage is arranged to spray water flow to the wiping cloth, so as to remove dust particles from the wiping cloth thereby making the wiping cloth clean. As a result, the thin film magnetic heads are prevented from being scratched by the dust particles attached on the wiping cloth, therefore the magnetic head cleaning device 100 obtains improved cleaning effect, and the performance of the cleaned magnetic heads are reliable and stable.
[0033] As shown in Fig. 5, the magnetic head cleaning device 100 includes the cleaning tank 110, the wiping device 120 in the cleaning tank 110, and a driver for driving the cleaning tank 110 and the wiping device 120 to move.

Claims (10)

WHAT IS CLAIMED IS: lg r
1. A magnetic head cleaning device, comprising: A /5 a cleaning tank arranged for receiving magnetic heads; and a wiping device configured in the cleaning tank, the wiping device comprising a fixing assembly arranged for fixing a wiping cloth and a water spray passage that is opposite to the wiping cloth.
2. The magnetic head cleaning device according to claim 1, further comprising a driver arranged for driving the cleaning tank and the wiping device, and the wiping cloth being driven to move close to or far from the magnetic heads.
3. The magnetic head cleaning device according to claim 2, wherein the water spray passage is located at a side of the wiping device that is faced to the magnetic heads, and the wiping cloth is driven to be far from the magnetic heads.
4. The magnetic head cleaning device according to claim 3, wherein the driver comprises an X-direction driving unit, a Y-direction driving unit, and a Z-direction driving unit.
5. The magnetic head cleaning device according to claim 1, wherein the fixing assembly comprises retaining slots and retaining poles, upper sides of the retaining slots are located in the same level, the retaining slots are arranged at intervals, one of the retaining poles is arranged between two adjacent retaining slots, and the retaining poles are located below the upper sides of the retaining slots; and the water spray passage is a hole that is formed on the retaining slot and runs through the upper side of the retaining slot.
6. The magnetic head cleaning device according to claim 1, wherein the cleaning tank is provided with an opening whereby the magnetic heads are put into or taken out of the cleaning tank.
7. The magnetic head cleaning device according to claim 1, further comprising a fixing mechanism that is arranged for fixing a magnetic head supporting device.
8. A magnetic head cleaning method by using the magnetic head cleaning device according to any of claims 1~7, comprising: placing magnetic heads in the cleaning tank; wiping the magnetic heads by the wiping device; washing the wiping cloth by water sprayed from the water spray passage; and taking the magnetic heads out of the cleaning tank.
9. The magnetic head cleaning method according to claim 8, before washing the wiping cloth by water sprayed from the water spray passage, further comprising driving the wiping mechanism to be far from the magnetic heads.
10. A magnetic head cleaning machine, comprising a magnetic head cleaning device, a deionized water cleaning device, an air oven and a conveying device, a magnetic head supporting device being driven by the conveying device to move among the magnetic head cleaning device, the deionized water cleaning device and the air oven, wherein the magnetic cleaning device is recited as any of claims 1~7.
PH12016000283A 2016-06-27 2016-08-15 Magnetic head cleaning device, magnetic head cleaning machine, and magnetic head cleaning method PH12016000283A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610495320.8A CN106205641A (en) 2016-06-27 2016-06-27 Magnetic head cleaning device, magnetic head cleaner and magnetic head cleaning method thereof

Publications (1)

Publication Number Publication Date
PH12016000283A1 true PH12016000283A1 (en) 2018-03-12

Family

ID=57461773

Family Applications (1)

Application Number Title Priority Date Filing Date
PH12016000283A PH12016000283A1 (en) 2016-06-27 2016-08-15 Magnetic head cleaning device, magnetic head cleaning machine, and magnetic head cleaning method

Country Status (2)

Country Link
CN (1) CN106205641A (en)
PH (1) PH12016000283A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109967418B (en) * 2019-03-28 2020-11-06 福建实达电脑设备有限公司 Magnetic head cleaning device and method
CN111986704A (en) * 2020-08-18 2020-11-24 全南群英达电子有限公司 Part soaking device for manufacturing audio magnetic head arm

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1057628C (en) * 1997-09-04 2000-10-18 深圳开发科技股份有限公司 Method for suppersonic cleaning magnetic head
WO2001080226A1 (en) * 2000-04-13 2001-10-25 Sae Magnetics (H.K.) Ltd. Polish cleaning apparatus and method in manufacture of hga
US6609529B2 (en) * 2000-06-02 2003-08-26 Seagate Technology, Llc Method and apparatus for cleaning disc drive components
CN103962319B (en) * 2014-04-03 2016-08-17 华为技术有限公司 Wiping mechanism and there is the automatic flushing device of Wiping mechanism
CN104624590B (en) * 2015-01-12 2017-07-04 广州联科自动化设备有限公司 A kind of surface automatic erasing cleaning device and automatic rinser
CN104759440B (en) * 2015-04-13 2019-08-02 深圳市利步瑞科技有限公司 Wipe cleaning machine

Also Published As

Publication number Publication date
CN106205641A (en) 2016-12-07

Similar Documents

Publication Publication Date Title
US11237478B2 (en) Cleaning module, cleaning apparatus and method of cleaning photomask
CN106540895B (en) Cleaning system
JP2016042759A (en) Cleaning device for control panel air filter
PH12016000283A1 (en) Magnetic head cleaning device, magnetic head cleaning machine, and magnetic head cleaning method
JP2017007801A (en) Liquid discharge device and conveyor belt cleaning method for the same
KR20130024738A (en) Substrate processing apparatus
KR20220053013A (en) substrate cleaning device
CN102513301A (en) Megasonic cleaning device for wafer
KR20090098711A (en) Substrate cleaning apparatus, substrate cleaning method, and storage medium
JP2013071033A (en) Nozzle washing device and coating applicator with the nozzle washing device
WO2018201346A1 (en) Cleaning device, and apparatus for manufacturing flexible display device
JP5651226B1 (en) Device for cleaning the end face of a substrate
KR102011519B1 (en) Nozzle cleaning apparatus, coating apparatus, nozzle cleaning method, coating method, and computer storage medium
KR101375348B1 (en) Automatic cleaning process apparatus for display panel glass
KR20140031722A (en) Apparatus and method for cleaning carrier for glass panel
US20150135452A1 (en) Cleaning apparatus
JP2019155212A (en) Washing device
KR20110017677A (en) Polishing pad changing unit and substrate treating apparatus with the same
KR100806223B1 (en) Substrate cleaning apparatus
KR20150027600A (en) Cleaning apparatus and method of fabricating the display device including cleaning using the same
KR102096956B1 (en) Apparatus and Method for treating substrate
JP5160953B2 (en) Pre-coating device, coating device and cleaning method for pre-coating device
CN100396387C (en) Coating device
KR101846069B1 (en) The elastomer removal machine of the donor tray surface
KR102415297B1 (en) Substrate coating apparatus