PH12012000075A1 - Polishing carrier, method for polishing glass substrate using the carrier, method for producing glass substrate, and glass substrate for magnetic recording medium - Google Patents

Polishing carrier, method for polishing glass substrate using the carrier, method for producing glass substrate, and glass substrate for magnetic recording medium

Info

Publication number
PH12012000075A1
PH12012000075A1 PH12012000075A PH12012000075A PH12012000075A1 PH 12012000075 A1 PH12012000075 A1 PH 12012000075A1 PH 12012000075 A PH12012000075 A PH 12012000075A PH 12012000075 A PH12012000075 A PH 12012000075A PH 12012000075 A1 PH12012000075 A1 PH 12012000075A1
Authority
PH
Philippines
Prior art keywords
glass substrate
polishing
carrier
fiber
holding hole
Prior art date
Application number
PH12012000075A
Other languages
English (en)
Inventor
Shida Norihito
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Publication of PH12012000075A1 publication Critical patent/PH12012000075A1/en

Links

PH12012000075A 2011-04-07 2012-04-03 Polishing carrier, method for polishing glass substrate using the carrier, method for producing glass substrate, and glass substrate for magnetic recording medium PH12012000075A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011085796A JP5741157B2 (ja) 2011-04-07 2011-04-07 研磨用キャリア及び該キャリアを用いたガラス基板の研磨方法及びガラス基板の製造方法

Publications (1)

Publication Number Publication Date
PH12012000075A1 true PH12012000075A1 (en) 2014-08-04

Family

ID=47270194

Family Applications (1)

Application Number Title Priority Date Filing Date
PH12012000075A PH12012000075A1 (en) 2011-04-07 2012-04-03 Polishing carrier, method for polishing glass substrate using the carrier, method for producing glass substrate, and glass substrate for magnetic recording medium

Country Status (2)

Country Link
JP (1) JP5741157B2 (ja)
PH (1) PH12012000075A1 (ja)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150097484A (ko) * 2012-12-27 2015-08-26 호야 가부시키가이샤 마스크 블랭크용 기판처리장치, 마스크 블랭크용 기판처리방법, 마스크 블랭크용 기판의 제조방법, 마스크 블랭크의 제조방법 및 전사용 마스크의 제조방법
MY170789A (en) * 2013-06-30 2019-08-28 Hoya Corp Carrier, method for manufacturing magnetic-disk substrate, and method for manufacturing magnetic disk
JP6208565B2 (ja) * 2013-11-29 2017-10-04 Hoya株式会社 研磨用キャリアの製造方法、磁気ディスク用基板の製造方法、および磁気ディスク用ガラス基板の製造方法
CN108857869B (zh) * 2013-11-29 2021-04-27 Hoya株式会社 研磨或磨削处理用载体及其制造方法、基板的制造方法
JP6152340B2 (ja) * 2013-12-26 2017-06-21 Hoya株式会社 円板形状の基板の製造方法、及び研削又は研磨用キャリア
JP6695318B2 (ja) * 2017-12-27 2020-05-20 Hoya株式会社 円盤状ガラス基板の製造方法、薄板ガラス基板の製造方法、導光板の製造方法及び円盤状ガラス基板
JP6783401B2 (ja) * 2018-01-31 2020-11-11 Hoya株式会社 円盤形状のガラス素板の製造方法、及び磁気ディスク用ガラス基板の製造方法
KR102434418B1 (ko) * 2022-03-10 2022-08-22 (주)뉴이스트 반도체 웨이퍼의 연마 공정에 사용되는 캐리어 제조 방법

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11309665A (ja) * 1998-04-30 1999-11-09 Toshiba Corp 酸化物単結晶基板の製造方法
JP2000084834A (ja) * 1998-09-04 2000-03-28 Ngk Insulators Ltd 研削加工用キャリア
JP5037975B2 (ja) * 2006-03-28 2012-10-03 Ｈｏｙａ株式会社 磁気ディスク用ガラス基板の製造方法及び磁気ディスクの製造方法
KR100898821B1 (ko) * 2007-11-29 2009-05-22 주식회사 실트론 웨이퍼 캐리어의 제조방법
WO2010150757A1 (ja) * 2009-06-24 2010-12-29 旭硝子株式会社 ガラスディスク研磨装置及びガラスディスク研磨方法

Also Published As

Publication number Publication date
JP5741157B2 (ja) 2015-07-01
JP2012218103A (ja) 2012-11-12

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