NO992688D0 - Sensor struktur og framgangsmÕte for sammenkobling av isolerte strukturer - Google Patents
Sensor struktur og framgangsmÕte for sammenkobling av isolerte strukturerInfo
- Publication number
- NO992688D0 NO992688D0 NO992688A NO992688A NO992688D0 NO 992688 D0 NO992688 D0 NO 992688D0 NO 992688 A NO992688 A NO 992688A NO 992688 A NO992688 A NO 992688A NO 992688 D0 NO992688 D0 NO 992688D0
- Authority
- NO
- Norway
- Prior art keywords
- sensor structure
- insulated structures
- connecting insulated
- structures
- sensor
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
- G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10594398A | 1998-06-26 | 1998-06-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
NO992688D0 true NO992688D0 (no) | 1999-06-03 |
NO992688L NO992688L (no) | 1999-12-27 |
Family
ID=22308652
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NO992688A NO992688L (no) | 1998-06-26 | 1999-06-03 | Sensor struktur og framgangsmåte for sammenkobling av isolerte strukturer |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2000031503A (no) |
DE (1) | DE19928291A1 (no) |
NO (1) | NO992688L (no) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10029012C2 (de) * | 2000-06-13 | 2002-06-06 | Amtec Gmbh | Mikrostruktur und Verfahren zu deren Herstellung |
FR2880128B1 (fr) | 2004-12-29 | 2007-02-02 | Commissariat Energie Atomique | Accelerometre micro-usine a peignes capacitifs |
DE102005052087A1 (de) * | 2005-10-28 | 2007-05-03 | Kmw Kaufbeurer Mikrosysteme Wiedemann Gmbh | Sensor |
US8138007B2 (en) * | 2009-08-26 | 2012-03-20 | Freescale Semiconductor, Inc. | MEMS device with stress isolation and method of fabrication |
DE102010043980A1 (de) * | 2010-11-16 | 2011-09-01 | Robert Bosch Gmbh | Sensor und Verfahren zur Herstellung eines Sensors |
US11757378B1 (en) * | 2022-06-06 | 2023-09-12 | Taiwan Semiconductor Manufacturing Company, Ltd. | Micromechanical arm array in micro-electromechanical system (MEMS) actuators |
-
1999
- 1999-06-03 NO NO992688A patent/NO992688L/no not_active Application Discontinuation
- 1999-06-22 DE DE1999128291 patent/DE19928291A1/de not_active Withdrawn
- 1999-06-23 JP JP17621799A patent/JP2000031503A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
NO992688L (no) | 1999-12-27 |
JP2000031503A (ja) | 2000-01-28 |
DE19928291A1 (de) | 1999-12-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FC2A | Withdrawal, rejection or dismissal of laid open patent application |