NO941768D0 - Anordning og fremgangsmåte for utförelse av tynnfilmsjikt-tykkelsesmetrologi med höy romopplösning - Google Patents

Anordning og fremgangsmåte for utförelse av tynnfilmsjikt-tykkelsesmetrologi med höy romopplösning

Info

Publication number
NO941768D0
NO941768D0 NO941768A NO941768A NO941768D0 NO 941768 D0 NO941768 D0 NO 941768D0 NO 941768 A NO941768 A NO 941768A NO 941768 A NO941768 A NO 941768A NO 941768 D0 NO941768 D0 NO 941768D0
Authority
NO
Norway
Prior art keywords
carrying
thin film
film layer
layer thickness
out thin
Prior art date
Application number
NO941768A
Other languages
English (en)
Other versions
NO941768L (no
Inventor
Peter B Mumola
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Publication of NO941768D0 publication Critical patent/NO941768D0/no
Publication of NO941768L publication Critical patent/NO941768L/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
NO941768A 1993-05-14 1994-05-11 Anordning og fremgangsmåte for utförelse av tynnfilmsjikt-tykkelsesmetrologi med höy romopplösning NO941768L (no)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US6431693A 1993-05-14 1993-05-14

Publications (2)

Publication Number Publication Date
NO941768D0 true NO941768D0 (no) 1994-05-11
NO941768L NO941768L (no) 1994-11-15

Family

ID=22055096

Family Applications (1)

Application Number Title Priority Date Filing Date
NO941768A NO941768L (no) 1993-05-14 1994-05-11 Anordning og fremgangsmåte for utförelse av tynnfilmsjikt-tykkelsesmetrologi med höy romopplösning

Country Status (5)

Country Link
US (1) US5543919A (no)
EP (1) EP0624775A1 (no)
JP (1) JPH07134007A (no)
IL (1) IL109589A0 (no)
NO (1) NO941768L (no)

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US6030887A (en) * 1998-02-26 2000-02-29 Memc Electronic Materials, Inc. Flattening process for epitaxial semiconductor wafers
US5946102A (en) * 1997-07-28 1999-08-31 Mmr Technologies, Inc. Method and apparatus for parameter difference imaging of a sample surface
US6142855A (en) * 1997-10-31 2000-11-07 Canon Kabushiki Kaisha Polishing apparatus and polishing method
US5972162A (en) * 1998-01-06 1999-10-26 Speedfam Corporation Wafer polishing with improved end point detection
US6200908B1 (en) 1999-08-04 2001-03-13 Memc Electronic Materials, Inc. Process for reducing waviness in semiconductor wafers
US7151609B2 (en) * 2000-07-06 2006-12-19 Filmetrics, Inc. Determining wafer orientation in spectral imaging
US6900900B2 (en) * 2000-11-16 2005-05-31 Process Diagnostics, Inc. Apparatus and method for enabling high resolution film thickness and thickness-uniformity measurements
US6654698B2 (en) 2001-06-12 2003-11-25 Applied Materials, Inc. Systems and methods for calibrating integrated inspection tools
US6897941B2 (en) * 2001-11-07 2005-05-24 Applied Materials, Inc. Optical spot grid array printer
KR20050044369A (ko) 2001-11-07 2005-05-12 어플라이드 머티어리얼스, 인코포레이티드 마스크없는 광자-전자 스팟-그리드 어레이 프린터
EP1613933A1 (de) * 2003-04-07 2006-01-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Anordnung zur optischen abstandsbestimmung einer reflektierenden oberfläche
US7068363B2 (en) * 2003-06-06 2006-06-27 Kla-Tencor Technologies Corp. Systems for inspection of patterned or unpatterned wafers and other specimen
US7084966B2 (en) * 2003-10-20 2006-08-01 Infineon Technologies Ag Optical measurement of device features using lenslet array illumination
WO2006078471A2 (en) * 2005-01-07 2006-07-27 Filmetrics, Inc. Determining wafer orientation in spectral imaging
US20100006785A1 (en) * 2008-07-14 2010-01-14 Moshe Finarov Method and apparatus for thin film quality control
RU2523773C2 (ru) 2009-05-13 2014-07-20 СиО2 Медикал Продактс, Инк., Способ по выделению газа для инспектирования поверхности с покрытием
WO2013170052A1 (en) 2012-05-09 2013-11-14 Sio2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
US7985188B2 (en) 2009-05-13 2011-07-26 Cv Holdings Llc Vessel, coating, inspection and processing apparatus
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication
JP5365581B2 (ja) * 2010-05-28 2013-12-11 信越半導体株式会社 薄膜付ウェーハの評価方法
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
JP6095678B2 (ja) 2011-11-11 2017-03-15 エスアイオーツー・メディカル・プロダクツ・インコーポレイテッド 薬剤パッケージ用の不動態化、ｐＨ保護又は滑性皮膜、被覆プロセス及び装置
US9554968B2 (en) 2013-03-11 2017-01-31 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging
US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
JP6509734B2 (ja) 2012-11-01 2019-05-08 エスアイオーツー・メディカル・プロダクツ・インコーポレイテッド 皮膜検査方法
WO2014078666A1 (en) 2012-11-16 2014-05-22 Sio2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
WO2014085348A2 (en) 2012-11-30 2014-06-05 Sio2 Medical Products, Inc. Controlling the uniformity of pecvd deposition on medical syringes, cartridges, and the like
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
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US10295342B2 (en) 2015-08-14 2019-05-21 Kla-Tencor Corporation System, method and computer program product for calibration of metrology tools
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EP3150959B1 (en) * 2015-10-02 2018-12-26 Soitec Method for measuring thickness variations in a layer of a multilayer semiconductor structure
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GB2016678B (en) * 1978-03-10 1982-09-15 Asahi Dow Ltd Infrared multilayer film thickness measuring method and apparatus
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JPS6453101A (en) * 1987-05-25 1989-03-01 Kurashiki Boseki Kk Equal tilt angle interference type film thickness gauge
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US5333049A (en) * 1991-12-06 1994-07-26 Hughes Aircraft Company Apparatus and method for interferometrically measuring the thickness of thin films using full aperture irradiation
US5291269A (en) * 1991-12-06 1994-03-01 Hughes Aircraft Company Apparatus and method for performing thin film layer thickness metrology on a thin film layer having shape deformations and local slope variations
US5293214A (en) * 1991-12-06 1994-03-08 Hughes Aircraft Company Apparatus and method for performing thin film layer thickness metrology by deforming a thin film layer into a reflective condenser
US5337150A (en) * 1992-08-04 1994-08-09 Hughes Aircraft Company Apparatus and method for performing thin film layer thickness metrology using a correlation reflectometer

Also Published As

Publication number Publication date
EP0624775A1 (en) 1994-11-17
US5543919A (en) 1996-08-06
JPH07134007A (ja) 1995-05-23
IL109589A0 (en) 1994-08-26
NO941768L (no) 1994-11-15

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