NO321281B1 - Infrarod kilde - Google Patents
Infrarod kilde Download PDFInfo
- Publication number
- NO321281B1 NO321281B1 NO20043883A NO20043883A NO321281B1 NO 321281 B1 NO321281 B1 NO 321281B1 NO 20043883 A NO20043883 A NO 20043883A NO 20043883 A NO20043883 A NO 20043883A NO 321281 B1 NO321281 B1 NO 321281B1
- Authority
- NO
- Norway
- Prior art keywords
- membrane
- container part
- emitter
- silicon
- source
- Prior art date
Links
- 239000012528 membrane Substances 0.000 claims abstract description 40
- 239000004020 conductor Substances 0.000 claims abstract description 18
- 230000005855 radiation Effects 0.000 claims abstract description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 43
- 229910052710 silicon Inorganic materials 0.000 claims description 42
- 239000010703 silicon Substances 0.000 claims description 42
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 7
- 229910052796 boron Inorganic materials 0.000 claims description 7
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 6
- 229910052698 phosphorus Inorganic materials 0.000 claims description 6
- 239000011574 phosphorus Substances 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000009529 body temperature measurement Methods 0.000 claims description 2
- 238000012544 monitoring process Methods 0.000 claims description 2
- 239000011810 insulating material Substances 0.000 claims 2
- 239000010410 layer Substances 0.000 description 56
- 239000000758 substrate Substances 0.000 description 13
- 238000000034 method Methods 0.000 description 12
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 11
- 229920005591 polysilicon Polymers 0.000 description 11
- 235000012431 wafers Nutrition 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 7
- 230000004927 fusion Effects 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005530 etching Methods 0.000 description 2
- 238000009313 farming Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000002329 infrared spectrum Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01K—ELECTRIC INCANDESCENT LAMPS
- H01K1/00—Details
- H01K1/62—One or more circuit elements structurally associated with the lamp
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
- G01J3/108—Arrangements of light sources specially adapted for spectrometry or colorimetry for measurement in the infrared range
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01K—ELECTRIC INCANDESCENT LAMPS
- H01K1/00—Details
- H01K1/02—Incandescent bodies
- H01K1/04—Incandescent bodies characterised by the material thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01K—ELECTRIC INCANDESCENT LAMPS
- H01K1/00—Details
- H01K1/02—Incandescent bodies
- H01K1/16—Electric connection thereto
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01K—ELECTRIC INCANDESCENT LAMPS
- H01K1/00—Details
- H01K1/18—Mountings or supports for the incandescent body
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Resistance Heating (AREA)
- Inspection Of Paper Currency And Valuable Securities (AREA)
- Carbon And Carbon Compounds (AREA)
- Telephone Function (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Radiation Pyrometers (AREA)
Priority Applications (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NO20043883A NO321281B1 (no) | 2004-09-15 | 2004-09-15 | Infrarod kilde |
| AT05779380T ATE474214T1 (de) | 2004-09-15 | 2005-09-13 | Infrarotquelle |
| PCT/NO2005/000335 WO2006031125A1 (en) | 2004-09-15 | 2005-09-13 | Infrared source |
| US11/575,218 US7741625B2 (en) | 2004-09-15 | 2005-09-13 | Infrared source |
| EP05779380A EP1789760B1 (de) | 2004-09-15 | 2005-09-13 | Infrarotquelle |
| DE602005022323T DE602005022323D1 (de) | 2004-09-15 | 2005-09-13 | Infrarotquelle |
| IL181850A IL181850A (en) | 2004-09-15 | 2007-03-11 | Infrared source |
| US12/774,012 US7989821B2 (en) | 2004-09-15 | 2010-05-05 | Infrared source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NO20043883A NO321281B1 (no) | 2004-09-15 | 2004-09-15 | Infrarod kilde |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| NO20043883D0 NO20043883D0 (no) | 2004-09-15 |
| NO321281B1 true NO321281B1 (no) | 2006-04-18 |
Family
ID=35057610
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NO20043883A NO321281B1 (no) | 2004-09-15 | 2004-09-15 | Infrarod kilde |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US7741625B2 (de) |
| EP (1) | EP1789760B1 (de) |
| AT (1) | ATE474214T1 (de) |
| DE (1) | DE602005022323D1 (de) |
| IL (1) | IL181850A (de) |
| NO (1) | NO321281B1 (de) |
| WO (1) | WO2006031125A1 (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8373568B2 (en) | 2007-07-17 | 2013-02-12 | Gassecure As | Detector system and method to detect or determine a specific gas within a gas mixture |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5223298B2 (ja) * | 2007-10-30 | 2013-06-26 | 横河電機株式会社 | 赤外線光源 |
| US8410560B2 (en) * | 2010-01-21 | 2013-04-02 | Cambridge Cmos Sensors Ltd. | Electromigration reduction in micro-hotplates |
| US8859303B2 (en) | 2010-01-21 | 2014-10-14 | Cambridge Cmos Sensors Ltd. | IR emitter and NDIR sensor |
| US9214604B2 (en) | 2010-01-21 | 2015-12-15 | Cambridge Cmos Sensors Limited | Plasmonic IR devices |
| KR102132359B1 (ko) | 2012-05-08 | 2020-07-10 | 사이오센스 비.브이. | 적외선 에미터 및 비분산 적외선 센서 |
| TW201432860A (zh) * | 2013-02-01 | 2014-08-16 | Oriental System Technology Inc | 晶片型紅外線發射器封裝件 |
| JP2015088481A (ja) * | 2013-09-26 | 2015-05-07 | パナソニックＩｐマネジメント株式会社 | 赤外線放射素子及びその製造方法 |
| CN104591076B (zh) * | 2015-01-07 | 2016-10-12 | 厦门大学 | 一种基于纳米结构的红外光源芯片 |
| DE102015206745B4 (de) * | 2015-04-15 | 2022-05-05 | Infineon Technologies Dresden Gmbh | Strahler und Verfahren zu dessen Herstellung |
| EP3096345B1 (de) * | 2015-05-22 | 2018-07-11 | CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement | Infrarotemitter |
| NO20151312A1 (en) | 2015-10-05 | 2017-04-06 | Sintef Tto As | Infrared source |
| FR3047842B1 (fr) * | 2016-02-12 | 2018-05-18 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Composant electronique a resistance metallique suspendue dans une cavite fermee |
| US10393712B2 (en) * | 2016-03-22 | 2019-08-27 | Cummins Inc. | Systems and methods using a gas quality sensor |
| FR3069707B1 (fr) * | 2017-07-27 | 2019-08-30 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Dispositif infrarouge |
| US10680150B2 (en) * | 2017-08-15 | 2020-06-09 | Dragan Grubisik | Electrically conductive-semitransparent solid state infrared emitter apparatus and method of use thereof |
| US10320143B2 (en) * | 2017-08-15 | 2019-06-11 | Alex Kropachev | Solid state particulate metal oxide infrared emitter apparatus and method of use thereof |
| US10883804B2 (en) | 2017-12-22 | 2021-01-05 | Ams Sensors Uk Limited | Infra-red device |
| US10636777B2 (en) * | 2017-12-22 | 2020-04-28 | Ams Sensors Uk Limited | Infra-red device |
| US11067422B2 (en) | 2018-03-28 | 2021-07-20 | Cambridge Gan Devices Limited | Thermal fluid flow sensor |
| US10593826B2 (en) | 2018-03-28 | 2020-03-17 | Cambridge Gan Devices Limited | Infra-red devices |
| US11187655B2 (en) | 2018-05-16 | 2021-11-30 | Sensera, Inc. | Compact gas sensors |
| EP3904846A1 (de) | 2020-04-29 | 2021-11-03 | Infineon Technologies AG | Wärmestrahler mit eingebettetem heizelement |
| DE102021111260A1 (de) * | 2021-04-30 | 2022-11-03 | Infrasolid Gmbh | Thermische Strahlungsquelle und Verfahren zur Messung der exakten Temperatur und / oder abgestrahlten Strahlungsleistung der thermischen Strahlungsquelle |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5285131A (en) * | 1990-12-03 | 1994-02-08 | University Of California - Berkeley | Vacuum-sealed silicon incandescent light |
| US5827438A (en) * | 1995-11-24 | 1998-10-27 | Vaisala Oy | Electrically modulatable thermal radiant source with specific filament |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3270823D1 (en) * | 1981-01-13 | 1986-06-05 | Mitsui Petrochemical Ind | Novel ethylene/alpha-olefin copolymer |
| US4754141A (en) * | 1985-08-22 | 1988-06-28 | High Technology Sensors, Inc. | Modulated infrared source |
| NO300078B1 (no) * | 1995-02-10 | 1997-04-01 | Sinvent As | Fotoakustisk gassdetektor |
| US5591679A (en) * | 1995-04-12 | 1997-01-07 | Sensonor A/S | Sealed cavity arrangement method |
| DE19600306C1 (de) * | 1996-01-05 | 1997-04-10 | Siemens Ag | Halbleiter-Bauelement, insb. mit einer optoelektronischen Schaltung bzw. Anordnung |
| WO1997047159A1 (fr) * | 1996-06-03 | 1997-12-11 | Kanagawa Prefectural Government | Procede de fabrication d'un dispositif emettant des infrarouges et dispositif emettant des infrarouges ainsi obtenu |
| NO301854B1 (no) * | 1996-09-19 | 1997-12-15 | Nyfotek As | Foto-akustisk infraröd detektor |
| US5955839A (en) * | 1997-03-26 | 1999-09-21 | Quantum Vision, Inc. | Incandescent microcavity lightsource having filament spaced from reflector at node of wave emitted |
| IT1291926B1 (it) * | 1997-06-06 | 1999-01-21 | Univ Roma | Sistema di rivelazione di radiazione infrarossa basato su sensori in silicio amorfo e sue leghe |
| US6433338B1 (en) * | 1998-02-09 | 2002-08-13 | Tomra Systems Asa | Method and device for identification of a type of material in an object and utilization therefor |
| NO313723B1 (no) * | 1999-03-01 | 2002-11-18 | Sintef | Sensorelement |
| US6297511B1 (en) * | 1999-04-01 | 2001-10-02 | Raytheon Company | High frequency infrared emitter |
| DE60030268T2 (de) * | 2000-07-10 | 2007-03-29 | Infineon Technologies Sensonor As | Beschleunigungssensor |
| NO315397B1 (no) * | 2001-11-13 | 2003-08-25 | Sinvent As | Optisk forskyvnings-sensor |
| NO315396B1 (no) * | 2001-11-27 | 2003-08-25 | Vivid As | Identifikasjonssystem |
| NO315177B1 (no) * | 2001-11-29 | 2003-07-21 | Sinvent As | Optisk forskyvnings-sensor |
| NO315915B1 (no) * | 2002-02-25 | 2003-11-10 | Sintef Elektronikk Og Kybernet | Fj¶rvekt |
| JP4055697B2 (ja) * | 2003-11-05 | 2008-03-05 | 株式会社デンソー | 赤外線光源 |
| US7279131B2 (en) * | 2004-07-01 | 2007-10-09 | Uop Llc | Method and apparatus for mass analysis of samples |
-
2004
- 2004-09-15 NO NO20043883A patent/NO321281B1/no unknown
-
2005
- 2005-09-13 WO PCT/NO2005/000335 patent/WO2006031125A1/en active Application Filing
- 2005-09-13 AT AT05779380T patent/ATE474214T1/de not_active IP Right Cessation
- 2005-09-13 EP EP05779380A patent/EP1789760B1/de active Active
- 2005-09-13 US US11/575,218 patent/US7741625B2/en active Active
- 2005-09-13 DE DE602005022323T patent/DE602005022323D1/de active Active
-
2007
- 2007-03-11 IL IL181850A patent/IL181850A/en active IP Right Grant
-
2010
- 2010-05-05 US US12/774,012 patent/US7989821B2/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5285131A (en) * | 1990-12-03 | 1994-02-08 | University Of California - Berkeley | Vacuum-sealed silicon incandescent light |
| US5827438A (en) * | 1995-11-24 | 1998-10-27 | Vaisala Oy | Electrically modulatable thermal radiant source with specific filament |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8373568B2 (en) | 2007-07-17 | 2013-02-12 | Gassecure As | Detector system and method to detect or determine a specific gas within a gas mixture |
Also Published As
| Publication number | Publication date |
|---|---|
| IL181850A0 (en) | 2007-07-04 |
| NO20043883D0 (no) | 2004-09-15 |
| WO2006031125A1 (en) | 2006-03-23 |
| IL181850A (en) | 2011-01-31 |
| US20080272389A1 (en) | 2008-11-06 |
| US7741625B2 (en) | 2010-06-22 |
| DE602005022323D1 (de) | 2010-08-26 |
| EP1789760A1 (de) | 2007-05-30 |
| US20100213500A1 (en) | 2010-08-26 |
| EP1789760B1 (de) | 2010-07-14 |
| ATE474214T1 (de) | 2010-07-15 |
| US7989821B2 (en) | 2011-08-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| CHAD | Change of the owner's name or address (par. 44 patent law, par. patentforskriften) |
Owner name: SINTEF TTO AS, NO |