NO20073525L - Fremgangsmate for testing av lekkasjegraden til vakuuminnkapslede innretninger - Google Patents

Fremgangsmate for testing av lekkasjegraden til vakuuminnkapslede innretninger

Info

Publication number
NO20073525L
NO20073525L NO20073525A NO20073525A NO20073525L NO 20073525 L NO20073525 L NO 20073525L NO 20073525 A NO20073525 A NO 20073525A NO 20073525 A NO20073525 A NO 20073525A NO 20073525 L NO20073525 L NO 20073525L
Authority
NO
Norway
Prior art keywords
bombing
testing
leakage
vacuum
degree
Prior art date
Application number
NO20073525A
Other languages
English (en)
Inventor
Wolfgang Reinert
Dirk Kaehler
Peter Merz
Original Assignee
Fraunhofer Ges Forschung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Ges Forschung filed Critical Fraunhofer Ges Forschung
Publication of NO20073525L publication Critical patent/NO20073525L/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/16—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means
    • G01M3/18—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • G01M3/32—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators
    • G01M3/3281—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators removably mounted in a test cell
    • G01M3/329—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators removably mounted in a test cell for verifying the internal pressure of closed containers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/16—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means
    • G01M3/18—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • G01M3/186—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • G01M3/226—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • G01M3/32—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators

Abstract

Foreliggende oppfinnelse er rettet mot en fremgangsmåte for testing av lekkasjegraden til en innkapslet innretning, omfattende følgende trinn: bombardering av innretningen med en neon- og/eller argonatmosfære ved bruk av et bombarderingstrykk på minst mer enn omgivelsestrykk og måling av kvalitetsfaktoren før og etter bombardering. Fortrinnsvis er bombarderingstiden ved ca. 10- 100 timer og bombarderingstrykket er 1,5-100 bar, mer foretrukket 1,5-5 bar og mest foretrukket ca. 4 bar. Med denne test kan lekkasjegraden for fine lekkasjer for innretningen bli bestemt. Testen er fordelaktig ved bestemmelsen av statistiske flateforurensninger eller defekter forårsaket av waferprosessering som påvirker tetningsintegriteten akkurat tilstrekkelig til å bevirke kortere levetid. Videre vil oppkuttingen, formsammensetningen og overføringsformingen også kunne innføre fysiske defekter som kan bli detektert med den foreliggende metode. Endelig kan testmetoden være anvendbar for prosessoptimalisering: hermetiske lukningstester er til stor hjelp for optimalisering av tetningsprosesser.
NO20073525A 2004-12-07 2007-07-09 Fremgangsmate for testing av lekkasjegraden til vakuuminnkapslede innretninger NO20073525L (no)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP04028993 2004-12-07
PCT/EP2005/055890 WO2006061302A1 (en) 2004-12-07 2005-11-10 Method for testing the leakage rate of vacuum capsulated devices

Publications (1)

Publication Number Publication Date
NO20073525L true NO20073525L (no) 2007-07-09

Family

ID=35734937

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20073525A NO20073525L (no) 2004-12-07 2007-07-09 Fremgangsmate for testing av lekkasjegraden til vakuuminnkapslede innretninger

Country Status (9)

Country Link
US (1) US7739900B2 (no)
EP (1) EP1831664B1 (no)
JP (1) JP5368705B2 (no)
KR (1) KR101288751B1 (no)
AT (1) ATE541196T1 (no)
CA (1) CA2588854C (no)
IL (1) IL183488A (no)
NO (1) NO20073525L (no)
WO (1) WO2006061302A1 (no)

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US8007166B2 (en) * 2005-05-25 2011-08-30 Northrop Grumman Systems Corporation Method for optimizing direct wafer bond line width for reduction of parasitic capacitance in MEMS accelerometers
US20100139373A1 (en) * 2005-08-19 2010-06-10 Honeywell Internationa Inc. Mems sensor package
EP2102630B1 (en) * 2006-12-28 2014-12-03 Agency for Science, Technology And Research Encapsulated device with integrated gas permeation sensor
CN103105269B (zh) * 2011-11-09 2015-04-01 华北电力科学研究院有限责任公司 空预器一次风漏风率测量方法
DE102013020388A1 (de) 2012-12-13 2014-06-18 Tesat-Spacecom Gmbh & Co. Kg Verfahren zur Dichteprüfung eines Gehäuses
US9442131B2 (en) * 2013-03-13 2016-09-13 Analog Devices, Inc. System and method for run-time hermeticity detection of a capped MEMS device
US8921128B2 (en) 2013-05-29 2014-12-30 Analog Devices, Inc. Method of manufacturing MEMS devices with reliable hermetic seal
US9463976B2 (en) 2014-06-27 2016-10-11 Freescale Semiconductor, Inc. MEMS fabrication process with two cavities operating at different pressures
RU2576635C1 (ru) * 2014-09-05 2016-03-10 Открытое акционерное общество "Тамбовский завод "Электроприбор" Способ контроля негерметичности кольцевых лазерных гироскопов
US9738516B2 (en) * 2015-04-29 2017-08-22 Taiwan Semiconductor Manufacturing Co., Ltd. Structure to reduce backside silicon damage
CN105043689B (zh) * 2015-06-24 2017-05-10 华北电力科学研究院有限责任公司 空预器漏风率确定方法及装置
CN105021357B (zh) * 2015-06-24 2017-05-10 华北电力科学研究院有限责任公司 空预器漏风率确定方法及装置
DE102015224533A1 (de) 2015-12-08 2017-06-08 Robert Bosch Gmbh Reaktives Verschlussgas zur gezielten Anpassung des Kaverneninnendruckes
US9796585B2 (en) * 2015-12-17 2017-10-24 Texas Instruments Incorporated Leak detection using cavity surface quality factor
FR3047842B1 (fr) * 2016-02-12 2018-05-18 Commissariat A L'energie Atomique Et Aux Energies Alternatives Composant electronique a resistance metallique suspendue dans une cavite fermee
RU2638135C1 (ru) * 2016-10-31 2017-12-11 Публичное Акционерное Общество "Тамбовский завод "Электроприбор" Способ локализации негерметичности кольцевых лазерных гироскопов
US10081536B2 (en) * 2016-12-14 2018-09-25 Texas Instruments Incorporated Gasses for increasing yield and reliability of MEMS devices
US11460384B2 (en) 2019-11-25 2022-10-04 International Business Machines Corporation Pressure test apparatus including a top plate assembly and an air block

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US3070992A (en) 1959-05-25 1963-01-01 Robert C Nemeth Pressure gauge and method of operation
US3227872A (en) 1959-05-25 1966-01-04 Robert C Nemeth Mass spectrometer leak detecting device in combination with a gettering chamber
SE398392B (sv) 1975-05-14 1977-12-19 Atomenergi Ab Forfarande for tethetsprovning av en forslutbar behallare, speciellt en transportflaska for radioaktivt material
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Also Published As

Publication number Publication date
JP5368705B2 (ja) 2013-12-18
CA2588854A1 (en) 2006-06-15
KR101288751B1 (ko) 2013-07-23
EP1831664B1 (en) 2012-01-11
WO2006061302A1 (en) 2006-06-15
ATE541196T1 (de) 2012-01-15
CA2588854C (en) 2013-12-31
IL183488A0 (en) 2007-09-20
KR20070086477A (ko) 2007-08-27
IL183488A (en) 2011-11-30
EP1831664A1 (en) 2007-09-12
JP2008523597A (ja) 2008-07-03
US20080141759A1 (en) 2008-06-19
US7739900B2 (en) 2010-06-22

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