JP2008523597A - 真空カプセル化したデバイスのリークレート測定方法 - Google Patents
真空カプセル化したデバイスのリークレート測定方法 Download PDFInfo
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- JP2008523597A JP2008523597A JP2007544866A JP2007544866A JP2008523597A JP 2008523597 A JP2008523597 A JP 2008523597A JP 2007544866 A JP2007544866 A JP 2007544866A JP 2007544866 A JP2007544866 A JP 2007544866A JP 2008523597 A JP2008523597 A JP 2008523597A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/16—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means
- G01M3/18—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
- G01M3/32—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators
- G01M3/3281—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators removably mounted in a test cell
- G01M3/329—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators removably mounted in a test cell for verifying the internal pressure of closed containers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/16—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means
- G01M3/18—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
- G01M3/186—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
- G01M3/226—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
- G01M3/32—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
- Micromachines (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
【解決手段】本発明は、カプセル化されたデバイスのリークレートを測定する方法に係り、ネオン又はアルゴン雰囲気で、少なくとも環境圧力よりも高いボンビング圧力を用いてボンビングする工程と、前記ボンビングの前後でクオリティファクタを測定する工程とを有する。好ましくは、ボンビングの時間は略10から100時間であり、ボンビング圧力は、略1.5から100バール、好ましくは1.5から5バール、最も好ましくは略4バールである。このテストにより、デバイスの微細リークのリークレートが測定される。このテストは、シールの完全性に影響を与え寿命を短くする十分な要因となるウエハプロセッシングに起因する統計的な表面汚染や欠陥を測定することに役立つ。更に、ダイシング、ダイアセンブリ、トランスファモールディングは、本発明の方法で検出される物理的な欠陥を引き起こす。最終的に、本発明の方法はプロセスの最適化に有用である。密閉度の測定は、シーリングプロセスの最適化に大いに助けとなる。
【選択図】図1
Description
dP/dt=L/V (1)
ここで、Lはリークレートであり、Vはデバイスの空洞容積である。現存するデバイスの典型的な空洞容積は0.1mm3から略5mm3であり、空洞容積は明らかに減少する風潮がある。
qgas=Lgas・(P1−P2) (2)
Lgas=8/3・r3/l・√(T/Mgas) (3)
Lgas=ΔP・V/(t・Pbomb) (4)
Lair=LNe・√(MNe/Mair)=LNe・0.8316 (5)
qair=Lair・Pair (6)
本発明により、最高で略10-16mbar・l/sのエアーリークレート感度が検出可能である。
ネオン中、3バールの絶対圧力で30hのボンビング時間により、10-14hPa・l/sの範囲の最大許容臨界リークレートを有するデバイスは、10-2hPaの圧力変化に対応するクオリティ測定に要求される感度をもつものと同一であるとみなされる。高い圧力の領域から低い圧力のタンクへの非常に小さなリークを介してのガス流れは、分子流条件に基礎をおく。ガスの流れは(T/M)1/2に比例する。ここで、Tはガス温度[K]、Mは分子量[g/mol]である。図9は、この明細書で記述したデバイスの最大操作温度での延長された操作時間の影響を示す。初期のリークレートの要求識別感度は、より過酷なボンビング条件によってだけ満たされ得る。
Claims (12)
- ネオン又はアルゴン雰囲気のデバイスを、少なくとも環境圧力よりも高いボンビング圧力を用いてボンビングする工程と、前記ボンビングの前後でクオリティファクタを測定する工程と、を有することを特徴とするカプセル化されたデバイスのリークレートの測定方法。
- 前記ボンビング時間は、略10から100時間であることを特徴とする請求項1に記載の方法。
- 前記ボンビング圧力は、略1.5から100バール、好ましくは1.5から5バール、最も好ましくは3から4バールであることを特徴とする請求項1又は2に記載の方法。
- 前記ボンビングは、50℃未満の温度で行われることを特徴とする請求項1〜3の何れか1項に記載の方法。
- 前記ボンビングは、アルゴン雰囲気中で、温度は室温と330℃の間で行われることを特徴とする請求項1〜3の何れか1項に記載の方法。
- 前記ボンビングの前後の前記クオリティファクタから、前記リークレートが決定されることを特徴とする請求項1〜5の何れか1項に記載の方法。
- 前記クオリティファクタの測定は、前記カプセル化されたデバイス内での共振リングのダンピング特性を測定すること(“リング−ダウン方法”)により為されることを特徴とする請求項1〜6の何れか1項に記載の方法。
- 前記カプセル化されたデバイスは、真空カプセル化されたデバイスであることを特徴とする請求項1〜7の何れか1項に記載の方法。
- 前記デバイスは、略10―4から1000ミリバールの間の空洞圧力下でカプセル化されていることを特徴とする請求項7に記載の方法。
- 前記デバイスは、環境圧力又は過圧力下でカプセル化されていることを特徴とする請求項1〜7の何れか1項に記載の方法。
- 前記ボンビングは、バッチ的なモードで、複数のデバイスで為されることを特徴とする請求項1〜10の何れか1項に記載の方法。
- 前記方法は、リークしているデバイスの特定、又は好ましくは5から15年の要求されるサービス寿命を提供できるほど十分に密封されていないデバイスの特定、若しくは前記デバイスの更なるプロセッシング、例えばプラスチックカプセル化に起因するダメージに対して用いられることを特徴とする請求項1〜11の何れか1項に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP04028993.6 | 2004-12-07 | ||
EP04028993 | 2004-12-07 | ||
PCT/EP2005/055890 WO2006061302A1 (en) | 2004-12-07 | 2005-11-10 | Method for testing the leakage rate of vacuum capsulated devices |
Publications (2)
Publication Number | Publication Date |
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JP2008523597A true JP2008523597A (ja) | 2008-07-03 |
JP5368705B2 JP5368705B2 (ja) | 2013-12-18 |
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JP2007544866A Active JP5368705B2 (ja) | 2004-12-07 | 2005-11-10 | 真空カプセル化したデバイスのリークレート測定方法 |
Country Status (9)
Country | Link |
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US (1) | US7739900B2 (ja) |
EP (1) | EP1831664B1 (ja) |
JP (1) | JP5368705B2 (ja) |
KR (1) | KR101288751B1 (ja) |
AT (1) | ATE541196T1 (ja) |
CA (1) | CA2588854C (ja) |
IL (1) | IL183488A (ja) |
NO (1) | NO20073525L (ja) |
WO (1) | WO2006061302A1 (ja) |
Cited By (1)
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JP2010515050A (ja) * | 2006-12-28 | 2010-05-06 | エージェンシー フォー サイエンス,テクノロジー アンド リサーチ | 集積化気体透過センサを有するカプセル化デバイス |
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WO2006127814A2 (en) * | 2005-05-25 | 2006-11-30 | Northrop Grumman Corporation | Method for optimizing direct wafer bond line width for reduction of parasitic capacitance in mems accelerometers |
US20100139373A1 (en) * | 2005-08-19 | 2010-06-10 | Honeywell Internationa Inc. | Mems sensor package |
CN103105269B (zh) * | 2011-11-09 | 2015-04-01 | 华北电力科学研究院有限责任公司 | 空预器一次风漏风率测量方法 |
DE102013020388A1 (de) | 2012-12-13 | 2014-06-18 | Tesat-Spacecom Gmbh & Co. Kg | Verfahren zur Dichteprüfung eines Gehäuses |
US9442131B2 (en) * | 2013-03-13 | 2016-09-13 | Analog Devices, Inc. | System and method for run-time hermeticity detection of a capped MEMS device |
US8921128B2 (en) | 2013-05-29 | 2014-12-30 | Analog Devices, Inc. | Method of manufacturing MEMS devices with reliable hermetic seal |
US9463976B2 (en) | 2014-06-27 | 2016-10-11 | Freescale Semiconductor, Inc. | MEMS fabrication process with two cavities operating at different pressures |
RU2576635C1 (ru) * | 2014-09-05 | 2016-03-10 | Открытое акционерное общество "Тамбовский завод "Электроприбор" | Способ контроля негерметичности кольцевых лазерных гироскопов |
US9738516B2 (en) * | 2015-04-29 | 2017-08-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | Structure to reduce backside silicon damage |
CN105043689B (zh) * | 2015-06-24 | 2017-05-10 | 华北电力科学研究院有限责任公司 | 空预器漏风率确定方法及装置 |
CN105021357B (zh) * | 2015-06-24 | 2017-05-10 | 华北电力科学研究院有限责任公司 | 空预器漏风率确定方法及装置 |
DE102015224533A1 (de) | 2015-12-08 | 2017-06-08 | Robert Bosch Gmbh | Reaktives Verschlussgas zur gezielten Anpassung des Kaverneninnendruckes |
US9796585B2 (en) * | 2015-12-17 | 2017-10-24 | Texas Instruments Incorporated | Leak detection using cavity surface quality factor |
FR3047842B1 (fr) * | 2016-02-12 | 2018-05-18 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Composant electronique a resistance metallique suspendue dans une cavite fermee |
RU2638135C1 (ru) * | 2016-10-31 | 2017-12-11 | Публичное Акционерное Общество "Тамбовский завод "Электроприбор" | Способ локализации негерметичности кольцевых лазерных гироскопов |
US10081536B2 (en) * | 2016-12-14 | 2018-09-25 | Texas Instruments Incorporated | Gasses for increasing yield and reliability of MEMS devices |
US11460384B2 (en) | 2019-11-25 | 2022-10-04 | International Business Machines Corporation | Pressure test apparatus including a top plate assembly and an air block |
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2005
- 2005-11-10 JP JP2007544866A patent/JP5368705B2/ja active Active
- 2005-11-10 KR KR1020077014018A patent/KR101288751B1/ko active IP Right Grant
- 2005-11-10 US US11/792,074 patent/US7739900B2/en active Active - Reinstated
- 2005-11-10 AT AT05810986T patent/ATE541196T1/de active
- 2005-11-10 CA CA2588854A patent/CA2588854C/en active Active
- 2005-11-10 WO PCT/EP2005/055890 patent/WO2006061302A1/en active Application Filing
- 2005-11-10 EP EP05810986A patent/EP1831664B1/en active Active
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2007
- 2007-05-28 IL IL183488A patent/IL183488A/en active IP Right Grant
- 2007-07-09 NO NO20073525A patent/NO20073525L/no not_active Application Discontinuation
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JP2010515050A (ja) * | 2006-12-28 | 2010-05-06 | エージェンシー フォー サイエンス,テクノロジー アンド リサーチ | 集積化気体透過センサを有するカプセル化デバイス |
US8915121B2 (en) | 2006-12-28 | 2014-12-23 | Agency For Science, Technology And Research | Encapsulated device with integrated gas permeation sensor |
Also Published As
Publication number | Publication date |
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CA2588854C (en) | 2013-12-31 |
WO2006061302A1 (en) | 2006-06-15 |
US20080141759A1 (en) | 2008-06-19 |
KR20070086477A (ko) | 2007-08-27 |
IL183488A (en) | 2011-11-30 |
KR101288751B1 (ko) | 2013-07-23 |
IL183488A0 (en) | 2007-09-20 |
ATE541196T1 (de) | 2012-01-15 |
EP1831664B1 (en) | 2012-01-11 |
CA2588854A1 (en) | 2006-06-15 |
NO20073525L (no) | 2007-07-09 |
JP5368705B2 (ja) | 2013-12-18 |
EP1831664A1 (en) | 2007-09-12 |
US7739900B2 (en) | 2010-06-22 |
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