NO20053804L - Micromechanical or microoptoelectronic device with deposition of getter material and integrated heating device and support plate for production thereof - Google Patents

Micromechanical or microoptoelectronic device with deposition of getter material and integrated heating device and support plate for production thereof

Info

Publication number
NO20053804L
NO20053804L NO20053804A NO20053804A NO20053804L NO 20053804 L NO20053804 L NO 20053804L NO 20053804 A NO20053804 A NO 20053804A NO 20053804 A NO20053804 A NO 20053804A NO 20053804 L NO20053804 L NO 20053804L
Authority
NO
Norway
Prior art keywords
getter material
micromechanical
deposition
support plate
microoptoelectronic
Prior art date
Application number
NO20053804A
Other languages
Norwegian (no)
Inventor
Marco Amiotti
Original Assignee
Getters Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Getters Spa filed Critical Getters Spa
Publication of NO20053804L publication Critical patent/NO20053804L/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032—Packages or encapsulation
    • B81B7/0035—Packages or encapsulation for maintaining a controlled atmosphere inside of the chamber containing the MEMS
    • B81B7/0038—Packages or encapsulation for maintaining a controlled atmosphere inside of the chamber containing the MEMS using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Micromachines (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

Mikromekaniske (10, 20) eller mikrooptoelekttoniske (30) anordninger beskrives. Disse omfatter en avsetning av gettermateriale (17, 25, 35) for sorpsjon av gasser som er skadelige for operasjon av nevnte anordninger, og et integrert system (18, 18', 19, 19") for oppvarming av gettermaterialet fra utsiden på hvert tidspunkt dette kreves i løpet av levetiden til anordningen. Forskjellige utførelser av en støtteplate ("support") for fremstilling av disse anordningene beskrives også.Micromechanical (10, 20) or microoptoelectronic (30) devices are described. These include a deposition of getter material (17, 25, 35) for sorption of gases which are detrimental to the operation of said devices, and an integrated system (18, 18 ', 19, 19 ") for heating the getter material from the outside at each time point This is required during the life of the device. Various embodiments of a support plate ("support") for manufacturing these devices are also described.

NO20053804A 2003-01-17 2005-08-12 Micromechanical or microoptoelectronic device with deposition of getter material and integrated heating device and support plate for production thereof NO20053804L (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT000069A ITMI20030069A1 (en) 2003-01-17 2003-01-17 MICROMECHANICAL OR MICROOPTOELECTRONIC DEVICES WITH STORAGE OF GETTER MATERIAL AND INTEGRATED HEATER.
PCT/IT2003/000857 WO2004065289A2 (en) 2003-01-17 2003-12-24 Micromechanical or microoptoelectronic devices with deposit of getter material and integrated heater, and support for the production thereof

Publications (1)

Publication Number Publication Date
NO20053804L true NO20053804L (en) 2005-08-12

Family

ID=32750478

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20053804A NO20053804L (en) 2003-01-17 2005-08-12 Micromechanical or microoptoelectronic device with deposition of getter material and integrated heating device and support plate for production thereof

Country Status (12)

Country Link
EP (1) EP1592643A2 (en)
JP (1) JP2006513046A (en)
KR (1) KR20050092426A (en)
CN (1) CN100453442C (en)
AU (1) AU2003295223A1 (en)
CA (1) CA2511836A1 (en)
HK (1) HK1087090A1 (en)
IT (1) ITMI20030069A1 (en)
MY (1) MY157923A (en)
NO (1) NO20053804L (en)
TW (1) TW200500291A (en)
WO (1) WO2004065289A2 (en)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005001449B3 (en) * 2005-01-12 2006-07-20 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. A method for generating a predetermined internal pressure in a cavity of a semiconductor device
ITMI20052343A1 (en) * 2005-12-06 2007-06-07 Getters Spa PROCESS FOR THE PRODUCTION OF MICROMECHANICAL DEVICES CONTAINING A GETTER MATERIAL AND DEVICES SO MANUFACTURED
FR2898597B1 (en) 2006-03-16 2008-09-19 Commissariat Energie Atomique ENCAPSULATION IN A HERMETIC CAVITY OF A MICROELECTRONIC COMPOUND, IN PARTICULAR A MEMS
FR2903678B1 (en) * 2006-07-13 2008-10-24 Commissariat Energie Atomique ENCAPSULATED MICROCOMPONENT EQUIPPED WITH AT LEAST ONE GETTER
US7402905B2 (en) * 2006-08-07 2008-07-22 Honeywell International Inc. Methods of fabrication of wafer-level vacuum packaged devices
ITMI20070301A1 (en) 2007-02-16 2008-08-17 Getters Spa SUPPORTS INCLUDING GETTER MATERIALS AND ALKALINE OR ALKALINE-TERROSI METALS FOR THERMOREGULATION SYSTEMS BASED ON TUNNEL EFFECT
FR2933389B1 (en) 2008-07-01 2010-10-29 Commissariat Energie Atomique STRUCTURE BASED ON SUSPENDED GETTER MATERIAL
JP2010251702A (en) * 2009-03-27 2010-11-04 Kyocera Corp Electronic component, package and infrared sensor
FR2956521B1 (en) * 2010-02-16 2012-08-17 Thales Sa DEVICE COMPRISING ELECTRICAL, ELECTRONIC, ELECTROMECHANICAL OR ELECTRO-OPTICAL COMPONENTS WITH REDUCED SENSITIVITY AT LOW RATE OF DOSE
US9491802B2 (en) 2012-02-17 2016-11-08 Honeywell International Inc. On-chip alkali dispenser
EP2736071B8 (en) 2012-11-22 2017-04-19 Tronic's Microsystems S.A. Wafer level package with getter
US9479138B2 (en) 2013-05-24 2016-10-25 Epcos Ag Microelectromechanical systems device package and method for producing the microelectromechanical systems device package
EP2813465B1 (en) 2013-06-12 2020-01-15 Tronic's Microsystems MEMS device with getter layer
FR3008965B1 (en) * 2013-07-26 2017-03-03 Commissariat Energie Atomique ENCAPSULATION STRUCTURE COMPRISING A MECHANICALLY REINFORCED HOOD AND GETTER EFFECT
CN104743502A (en) * 2013-12-31 2015-07-01 北京有色金属研究总院 MEMS component with composite getter layer and preparation method thereof
JP2017224704A (en) 2016-06-15 2017-12-21 セイコーエプソン株式会社 Vacuum package, electronic device, electronic equipment, and mobile
CN109173690B (en) * 2018-09-20 2020-10-09 内蒙古科技大学 Air consumption agent for metal material heat treatment
CN114057156A (en) * 2021-12-21 2022-02-18 罕王微电子（辽宁）有限公司 Metal diffusion adsorption system and process for wafer-level MEMS vacuum packaging

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5734226A (en) * 1992-08-12 1998-03-31 Micron Technology, Inc. Wire-bonded getters useful in evacuated displays
US5610438A (en) * 1995-03-08 1997-03-11 Texas Instruments Incorporated Micro-mechanical device with non-evaporable getter
US5837935A (en) * 1996-02-26 1998-11-17 Ford Motor Company Hermetic seal for an electronic component having a secondary chamber
SE9700612D0 (en) * 1997-02-20 1997-02-20 Cecap Ab Sensor element with integrated reference pressure
US6992375B2 (en) * 2000-11-30 2006-01-31 Texas Instruments Incorporated Anchor for device package

Also Published As

Publication number Publication date
KR20050092426A (en) 2005-09-21
TW200500291A (en) 2005-01-01
WO2004065289A2 (en) 2004-08-05
AU2003295223A1 (en) 2004-08-13
CN100453442C (en) 2009-01-21
JP2006513046A (en) 2006-04-20
WO2004065289A3 (en) 2005-01-06
EP1592643A2 (en) 2005-11-09
MY157923A (en) 2016-08-15
CA2511836A1 (en) 2004-08-05
HK1087090A1 (en) 2006-10-06
CN1738765A (en) 2006-02-22
ITMI20030069A1 (en) 2004-07-18

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