NO20010965L - Fremgangsmåte for påföring av et belegg på et substrat - Google Patents

Fremgangsmåte for påföring av et belegg på et substrat

Info

Publication number
NO20010965L
NO20010965L NO20010965A NO20010965A NO20010965L NO 20010965 L NO20010965 L NO 20010965L NO 20010965 A NO20010965 A NO 20010965A NO 20010965 A NO20010965 A NO 20010965A NO 20010965 L NO20010965 L NO 20010965L
Authority
NO
Norway
Prior art keywords
coating
applying
substrate
Prior art date
Application number
NO20010965A
Other languages
English (en)
Other versions
NO20010965D0 (no
Inventor
Marius Pieter De Goeje
Peter Hillebrand De Haan
Gerardus Titus Van Heck
Original Assignee
Tno
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tno filed Critical Tno
Publication of NO20010965D0 publication Critical patent/NO20010965D0/no
Publication of NO20010965L publication Critical patent/NO20010965L/no

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C23C16/402—Silicon dioxide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/503—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using dc or ac discharges

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Inorganic Chemistry (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Laminated Bodies (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
NO20010965A 1998-08-27 2001-02-26 Fremgangsmåte for påföring av et belegg på et substrat NO20010965L (no)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL1009956A NL1009956C2 (nl) 1998-08-27 1998-08-27 Werkwijze voor het aanbrengen van een bekleding op een substraat.
PCT/NL1999/000533 WO2000012778A1 (en) 1998-08-27 1999-08-27 Method for applying a coating to a substrate

Publications (2)

Publication Number Publication Date
NO20010965D0 NO20010965D0 (no) 2001-02-26
NO20010965L true NO20010965L (no) 2001-04-25

Family

ID=19767717

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20010965A NO20010965L (no) 1998-08-27 2001-02-26 Fremgangsmåte for påföring av et belegg på et substrat

Country Status (8)

Country Link
US (1) US6649224B1 (no)
EP (1) EP1115901A1 (no)
JP (1) JP2002523235A (no)
AU (1) AU760293B2 (no)
CA (1) CA2341696A1 (no)
NL (1) NL1009956C2 (no)
NO (1) NO20010965L (no)
WO (1) WO2000012778A1 (no)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070049499A1 (en) * 2005-08-24 2007-03-01 Basf Corporation. Pesticide composition
JP4809022B2 (ja) * 2005-09-05 2011-11-02 Ｈｏｙａ株式会社 コンタクトレンズ材料の製造方法およびソフトコンタクトレンズの製造方法
US9339770B2 (en) 2013-11-19 2016-05-17 Applied Membrane Technologies, Inc. Organosiloxane films for gas separations
KR20210094694A (ko) 2020-01-21 2021-07-30 삼성전자주식회사 기판 처리 장치, 물질막 증착 장치, 및 상압 화학 기상 증착 장치

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5254688A (en) * 1975-10-30 1977-05-04 Sumitomo Chem Co Ltd Method of producing semipermeable memebrane
US5527629A (en) * 1990-12-17 1996-06-18 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Process of depositing a layer of silicon oxide bonded to a substrate of polymeric material using high pressure and electrical discharge
FR2692598B1 (fr) * 1992-06-17 1995-02-10 Air Liquide Procédé de dépôt d'un film contenant du silicium à la surface d'un substrat métallique et procédé de traitement anti-corrosion.
DE19515069A1 (de) * 1995-04-27 1996-10-31 Suratech Gmbh Verfahren zur Herstellung anorganischer Schichten auf Festkörperoberflächen mit Hilfe einer Coronaentladung

Also Published As

Publication number Publication date
NL1009956C2 (nl) 2000-02-29
WO2000012778A1 (en) 2000-03-09
EP1115901A1 (en) 2001-07-18
JP2002523235A (ja) 2002-07-30
AU760293B2 (en) 2003-05-08
CA2341696A1 (en) 2000-03-09
NO20010965D0 (no) 2001-02-26
US6649224B1 (en) 2003-11-18
AU5534699A (en) 2000-03-21

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