NO172667C - Fremgangsmaate for fremstilling av et tynnfilm-motstandstermometer - Google Patents
Fremgangsmaate for fremstilling av et tynnfilm-motstandstermometerInfo
- Publication number
- NO172667C NO172667C NO86861041A NO861041A NO172667C NO 172667 C NO172667 C NO 172667C NO 86861041 A NO86861041 A NO 86861041A NO 861041 A NO861041 A NO 861041A NO 172667 C NO172667 C NO 172667C
- Authority
- NO
- Norway
- Prior art keywords
- procedure
- manufacturing
- thin film
- film resistor
- resistor thermometer
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
- G01K7/18—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
- G01K7/183—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer characterised by the use of the resistive element
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/003—Apparatus or processes specially adapted for manufacturing resistors using lithography, e.g. photolithography
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
- H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/02—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having positive temperature coefficient
- H01C7/021—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having positive temperature coefficient formed as one or more layers or coatings
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Thermistors And Varistors (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Electrodes Of Semiconductors (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US63614284A | 1984-07-31 | 1984-07-31 | |
US63614184A | 1984-07-31 | 1984-07-31 |
Publications (3)
Publication Number | Publication Date |
---|---|
NO861041L NO861041L (no) | 1986-03-18 |
NO172667B NO172667B (no) | 1993-05-10 |
NO172667C true NO172667C (no) | 1993-08-18 |
Family
ID=27092537
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NO86861041A NO172667C (no) | 1984-07-31 | 1986-03-18 | Fremgangsmaate for fremstilling av et tynnfilm-motstandstermometer |
Country Status (8)
Country | Link |
---|---|
EP (1) | EP0191052B1 (no) |
AU (1) | AU584632B2 (no) |
BR (1) | BR8506847A (no) |
DE (1) | DE3587324T2 (no) |
IL (1) | IL75957A (no) |
IN (1) | IN165267B (no) |
NO (1) | NO172667C (no) |
WO (1) | WO1986001027A1 (no) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4791398A (en) * | 1986-02-13 | 1988-12-13 | Rosemount Inc. | Thin film platinum resistance thermometer with high temperature diffusion barrier |
US4734641A (en) * | 1987-03-09 | 1988-03-29 | Tektronix, Inc. | Method for the thermal characterization of semiconductor packaging systems |
DE4000301C1 (no) * | 1990-01-08 | 1991-05-23 | Degussa Ag, 6000 Frankfurt, De | |
FI126956B (fi) | 2010-10-14 | 2017-08-31 | Janesko Oy | Menetelmä ja mitta-anturi lämpötilan mittaamiseksi |
FI125815B (fi) | 2010-10-14 | 2016-02-29 | Janesko Oy | Mitta-anturi lämpötilan mittaamiseksi |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2188158A1 (no) * | 1972-06-14 | 1974-01-18 | Bailey Meter Co | |
DE2507731C3 (de) * | 1975-02-22 | 1978-09-07 | Deutsche Gold- Und Silber-Scheideanstalt Vormals Roessler, 6000 Frankfurt | Meßwiderstand für Widerstandsthermometer und Verfahren zu seiner Herstellung |
DE2527739C3 (de) * | 1975-06-21 | 1978-08-31 | W.C. Heraeus Gmbh, 6450 Hanau | Verfahren zur Herstellung eines elektrischen Meßwiderstandes für ein Widerstandsthermometer |
US4129848A (en) * | 1975-09-03 | 1978-12-12 | Raytheon Company | Platinum film resistor device |
DE2558752C3 (de) * | 1975-12-24 | 1978-10-19 | Deutsche Gold- Und Silber-Scheideanstalt Vormals Roessler, 6000 Frankfurt | Verfahren zur Herstellung eines Schichrwiderstandes als Meßwiderstand für Widerstandsthermometer |
DE2706418C3 (de) * | 1977-02-16 | 1981-04-09 | W.C. Heraeus Gmbh, 6450 Hanau | Verfahren zur Herstellung eines Temperaturmeßwiderstandes für ein Widerstandsthermometer |
US4286377A (en) * | 1978-07-03 | 1981-09-01 | General Electric Company | Method of manufacture for a resistance heater and temperature sensor |
GB2096645B (en) * | 1981-03-24 | 1984-10-31 | Rosemount Eng Co Ltd | A method of producing a resistance element for a resistance thermometer |
-
1985
- 1985-07-23 IN IN569/MAS/85A patent/IN165267B/en unknown
- 1985-07-25 DE DE85903923T patent/DE3587324T2/de not_active Expired - Fee Related
- 1985-07-25 EP EP85903923A patent/EP0191052B1/en not_active Expired - Lifetime
- 1985-07-25 WO PCT/US1985/001398 patent/WO1986001027A1/en active IP Right Grant
- 1985-07-25 AU AU46762/85A patent/AU584632B2/en not_active Ceased
- 1985-07-25 BR BR8506847A patent/BR8506847A/pt not_active IP Right Cessation
- 1985-07-30 IL IL75957A patent/IL75957A/xx not_active IP Right Cessation
-
1986
- 1986-03-18 NO NO86861041A patent/NO172667C/no not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
IL75957A (en) | 1991-06-30 |
AU4676285A (en) | 1986-02-25 |
WO1986001027A1 (en) | 1986-02-13 |
EP0191052B1 (en) | 1993-05-05 |
NO172667B (no) | 1993-05-10 |
AU584632B2 (en) | 1989-06-01 |
EP0191052A1 (en) | 1986-08-20 |
IL75957A0 (en) | 1985-12-31 |
IN165267B (no) | 1989-09-09 |
EP0191052A4 (en) | 1986-11-26 |
BR8506847A (pt) | 1986-09-23 |
DE3587324T2 (de) | 1993-10-07 |
DE3587324D1 (de) | 1993-06-09 |
NO861041L (no) | 1986-03-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM1K | Lapsed by not paying the annual fees |
Free format text: LAPSED IN JANUARY 2001 |