NO136167C - Anordning for fremstilling av masker for mikrokretser. - Google Patents

Anordning for fremstilling av masker for mikrokretser.

Info

Publication number
NO136167C
NO136167C NO740827A NO740827A NO136167C NO 136167 C NO136167 C NO 136167C NO 740827 A NO740827 A NO 740827A NO 740827 A NO740827 A NO 740827A NO 136167 C NO136167 C NO 136167C
Authority
NO
Norway
Prior art keywords
microcreets
masks
manufacture
Prior art date
Application number
NO740827A
Other languages
English (en)
Other versions
NO740827L (no
NO136167B (no
Inventor
Gerhard Westerberg
Original Assignee
Gerhard Westerberg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gerhard Westerberg filed Critical Gerhard Westerberg
Publication of NO740827L publication Critical patent/NO740827L/no
Publication of NO136167B publication Critical patent/NO136167B/no
Publication of NO136167C publication Critical patent/NO136167C/no

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Amplifiers (AREA)
NO740827A 1973-11-19 1974-03-08 Anordning for fremstilling av masker for mikrokretser. NO136167C (no)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US416885A US3903536A (en) 1973-11-19 1973-11-19 Device for generating masks for microcircuits

Publications (3)

Publication Number Publication Date
NO740827L NO740827L (no) 1975-05-21
NO136167B NO136167B (no) 1977-04-18
NO136167C true NO136167C (no) 1977-07-27

Family

ID=23651711

Family Applications (1)

Application Number Title Priority Date Filing Date
NO740827A NO136167C (no) 1973-11-19 1974-03-08 Anordning for fremstilling av masker for mikrokretser.

Country Status (4)

Country Link
US (1) US3903536A (no)
DE (1) DE2411508C2 (no)
FR (1) FR2251842B1 (no)
NO (1) NO136167C (no)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE399628B (sv) * 1975-02-13 1978-02-20 Westerberg Erik Gerhard Natana Drivanordning, speciellt for anvendning vid en avsokningsanordning for framstellning av masker for mikrokretsar
US4095891A (en) * 1976-12-27 1978-06-20 Gca Corporation On-the-fly photoresist exposure apparatus
US4119976A (en) * 1977-04-25 1978-10-10 Itek Corporation Phototypesetter lens carriage arrangement
SE407715B (sv) * 1977-05-17 1979-04-09 Bofors Aerotronics Ab Anvendning av en anordning for att alstra stora datorbereknade hologram med hog upplosning
US4209240A (en) * 1978-10-10 1980-06-24 California Institute Of Technology Reticle exposure apparatus and method
JPS5645021A (en) * 1979-09-19 1981-04-24 Hitachi Ltd Moving apparatus
SE449531B (sv) * 1980-12-11 1987-05-04 Gerhard Westerberg Forfarande och anordning for kontroll av mikromasker
JPS59129633A (ja) * 1983-01-08 1984-07-26 Canon Inc ステージ装置
DE102012217241A1 (de) * 2012-09-25 2014-03-27 Schaeffler Technologies Gmbh & Co. Kg Lagerelement für zwei Raumrichtungen
JP7020078B2 (ja) * 2017-11-24 2022-02-16 株式会社島津製作所 フーリエ変換型分光光度計

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1900566A (en) * 1930-05-23 1933-03-07 Clarence W Kanolt Depthograph plate holder
US1857706A (en) * 1931-08-17 1932-05-10 Zabrocki Tony Camera back
US2259084A (en) * 1938-03-28 1941-10-14 Rosenhaft Walter Hand camera for the production therewith of small-sized photographs in series
US2459552A (en) * 1945-08-07 1949-01-18 Justus S Stoner Apparatus for producing photographic multiple copies
GB961227A (en) * 1961-07-12 1964-06-17 Crosfield Electronics Ltd Improvements in or relating to image reproduction systems
NL301413A (no) * 1963-12-05
FR2038520A5 (no) * 1969-03-18 1971-01-08 Panhard & Levassor

Also Published As

Publication number Publication date
NO740827L (no) 1975-05-21
NO136167B (no) 1977-04-18
DE2411508A1 (de) 1975-05-22
FR2251842B1 (no) 1978-02-10
DE2411508C2 (de) 1985-11-14
US3903536A (en) 1975-09-02
FR2251842A1 (no) 1975-06-13

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