NL97470C - - Google Patents

Info

Publication number
NL97470C
NL97470C NL97470DA NL97470C NL 97470 C NL97470 C NL 97470C NL 97470D A NL97470D A NL 97470DA NL 97470 C NL97470 C NL 97470C
Authority
NL
Netherlands
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of NL97470C publication Critical patent/NL97470C/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
NL97470D 1955-03-15 NL97470C (en:Method)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL339297X 1955-03-15

Publications (1)

Publication Number Publication Date
NL97470C true NL97470C (en:Method)

Family

ID=19784647

Family Applications (2)

Application Number Title Priority Date Filing Date
NL97470D NL97470C (en:Method) 1955-03-15
NL195609D NL195609A (en:Method) 1955-03-15

Family Applications After (1)

Application Number Title Priority Date Filing Date
NL195609D NL195609A (en:Method) 1955-03-15

Country Status (7)

Country Link
US (1) US2914675A (en:Method)
BE (1) BE546040A (en:Method)
CH (1) CH339297A (en:Method)
DE (1) DE1098634B (en:Method)
FR (1) FR1148643A (en:Method)
GB (1) GB793664A (en:Method)
NL (2) NL195609A (en:Method)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3046397A (en) * 1959-06-17 1962-07-24 Tesla Np Device for compensating axial astigmatism of electron-optical systems
NL271119A (en:Method) * 1961-07-10
US3223871A (en) * 1961-08-22 1965-12-14 Gen Electric Electron optical system
US3287558A (en) * 1961-09-08 1966-11-22 High Voltage Engineering Corp Charged particle deflecting device consisting of sequentially positioned uniform and non-uniform magnetic field sectors
US3150258A (en) * 1962-07-05 1964-09-22 Philips Electronic Pharma Electromagnetic stigmators for correcting electron-optical deficiencies in the lenses of electron beam instruments
US3221133A (en) * 1963-04-02 1965-11-30 Japan Electron Optics Lab Co L Electron microscope with means for treating and observing specimens

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB504802A (en) * 1937-11-01 1939-05-01 Frederick Hermes Nicoll Improvements in or relating to permanent magnet devices for producing axially symmetrical magnetic fields
GB665094A (en) * 1947-04-12 1952-01-16 Ass Elect Ind Improvements relating to the reduction of primary spherical aberration in magnetic electron lenses
BE481554A (en:Method) * 1947-06-26
US2520813A (en) * 1947-12-10 1950-08-29 Rudenberg Reinhold Electron optical system
GB680300A (en) * 1950-02-23 1952-10-01 Vickers Electrical Co Ltd Improvements relating to magnetic electron lenses

Also Published As

Publication number Publication date
BE546040A (en:Method)
GB793664A (en) 1958-04-23
DE1098634B (de) 1961-02-02
NL195609A (en:Method)
US2914675A (en) 1959-11-24
FR1148643A (fr) 1957-12-12
CH339297A (de) 1959-06-30

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