GB793664A - Improvements in or relating to elements for correcting electron-optical systems - Google Patents

Improvements in or relating to elements for correcting electron-optical systems

Info

Publication number
GB793664A
GB793664A GB7644/56A GB764456A GB793664A GB 793664 A GB793664 A GB 793664A GB 7644/56 A GB7644/56 A GB 7644/56A GB 764456 A GB764456 A GB 764456A GB 793664 A GB793664 A GB 793664A
Authority
GB
United Kingdom
Prior art keywords
polepieces
energizing
elements
march
apertures
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB7644/56A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electrical Industries Ltd
Original Assignee
Philips Electrical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electrical Industries Ltd filed Critical Philips Electrical Industries Ltd
Publication of GB793664A publication Critical patent/GB793664A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

793,664. Electromagnets. PHILIPS ELECTRICAL INDUSTRIES, Ltd. March 12,1956 [March 15, 1955], No. 7644/56. Class 35. [Also in Group XL (a)] An electromagnet for correcting lens errors in an electron microscope (see Group XL (a)) consists of two pairs of polepieces 1, 3, and 2, 4, Fig. 1, which are insulated to act also as electrodes; each polepiece is hyperbolic or circular in cross-section with the generatrixes of the pole-face parallel to the axis of the system. Insulators 5 to 8 as well as the polepieces are of ferromagnetic material, e.g. a ferrite and also form cores for the energizing coils 9 to 12. In modifications the polepieces have radial stubs carrying the energizing coils, or they are elements 41, 44, Fig. 6, projecting alternately from two annular rings 39, 40. A single circumferential energizing coil 47 is provided. In Fig. 8 the polepieces 50, 51, 56 project upwards from an inner cylinder 54 into apertures in an outer cylinder 55. The solid extensions between the apertures form the other set of polepieces 51. Insulation is provided at 59, and the energizing winding 58 occupies the space between the cylinders.
GB7644/56A 1955-03-15 1956-03-12 Improvements in or relating to elements for correcting electron-optical systems Expired GB793664A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL339297X 1955-03-15

Publications (1)

Publication Number Publication Date
GB793664A true GB793664A (en) 1958-04-23

Family

ID=19784647

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7644/56A Expired GB793664A (en) 1955-03-15 1956-03-12 Improvements in or relating to elements for correcting electron-optical systems

Country Status (7)

Country Link
US (1) US2914675A (en)
BE (1) BE546040A (en)
CH (1) CH339297A (en)
DE (1) DE1098634B (en)
FR (1) FR1148643A (en)
GB (1) GB793664A (en)
NL (2) NL195609A (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3046397A (en) * 1959-06-17 1962-07-24 Tesla Np Device for compensating axial astigmatism of electron-optical systems
NL271119A (en) * 1961-07-10
US3223871A (en) * 1961-08-22 1965-12-14 Gen Electric Electron optical system
US3287558A (en) * 1961-09-08 1966-11-22 High Voltage Engineering Corp Charged particle deflecting device consisting of sequentially positioned uniform and non-uniform magnetic field sectors
US3150258A (en) * 1962-07-05 1964-09-22 Philips Electronic Pharma Electromagnetic stigmators for correcting electron-optical deficiencies in the lenses of electron beam instruments
US3221133A (en) * 1963-04-02 1965-11-30 Japan Electron Optics Lab Co L Electron microscope with means for treating and observing specimens

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB504802A (en) * 1937-11-01 1939-05-01 Frederick Hermes Nicoll Improvements in or relating to permanent magnet devices for producing axially symmetrical magnetic fields
GB665094A (en) * 1947-04-12 1952-01-16 Ass Elect Ind Improvements relating to the reduction of primary spherical aberration in magnetic electron lenses
BE481554A (en) * 1947-06-26
US2520813A (en) * 1947-12-10 1950-08-29 Rudenberg Reinhold Electron optical system
GB680300A (en) * 1950-02-23 1952-10-01 Vickers Electrical Co Ltd Improvements relating to magnetic electron lenses

Also Published As

Publication number Publication date
BE546040A (en)
US2914675A (en) 1959-11-24
DE1098634B (en) 1961-02-02
NL195609A (en)
CH339297A (en) 1959-06-30
FR1148643A (en) 1957-12-12
NL97470C (en)

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