BE546040A - - Google Patents
Info
- Publication number
- BE546040A BE546040A BE546040DA BE546040A BE 546040 A BE546040 A BE 546040A BE 546040D A BE546040D A BE 546040DA BE 546040 A BE546040 A BE 546040A
- Authority
- BE
- Belgium
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL339297X | 1955-03-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE546040A true BE546040A (en:Method) |
Family
ID=19784647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE546040D BE546040A (en:Method) | 1955-03-15 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US2914675A (en:Method) |
| BE (1) | BE546040A (en:Method) |
| CH (1) | CH339297A (en:Method) |
| DE (1) | DE1098634B (en:Method) |
| FR (1) | FR1148643A (en:Method) |
| GB (1) | GB793664A (en:Method) |
| NL (2) | NL97470C (en:Method) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3046397A (en) * | 1959-06-17 | 1962-07-24 | Tesla Np | Device for compensating axial astigmatism of electron-optical systems |
| NL271119A (en:Method) * | 1961-07-10 | |||
| US3223871A (en) * | 1961-08-22 | 1965-12-14 | Gen Electric | Electron optical system |
| US3287558A (en) * | 1961-09-08 | 1966-11-22 | High Voltage Engineering Corp | Charged particle deflecting device consisting of sequentially positioned uniform and non-uniform magnetic field sectors |
| US3150258A (en) * | 1962-07-05 | 1964-09-22 | Philips Electronic Pharma | Electromagnetic stigmators for correcting electron-optical deficiencies in the lenses of electron beam instruments |
| US3221133A (en) * | 1963-04-02 | 1965-11-30 | Japan Electron Optics Lab Co L | Electron microscope with means for treating and observing specimens |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB504802A (en) * | 1937-11-01 | 1939-05-01 | Frederick Hermes Nicoll | Improvements in or relating to permanent magnet devices for producing axially symmetrical magnetic fields |
| GB665094A (en) * | 1947-04-12 | 1952-01-16 | Ass Elect Ind | Improvements relating to the reduction of primary spherical aberration in magnetic electron lenses |
| BE481554A (en:Method) * | 1947-06-26 | |||
| US2520813A (en) * | 1947-12-10 | 1950-08-29 | Rudenberg Reinhold | Electron optical system |
| GB680300A (en) * | 1950-02-23 | 1952-10-01 | Vickers Electrical Co Ltd | Improvements relating to magnetic electron lenses |
-
0
- BE BE546040D patent/BE546040A/xx unknown
- NL NL195609D patent/NL195609A/xx unknown
- NL NL97470D patent/NL97470C/xx active
-
1956
- 1956-03-10 DE DEN11947A patent/DE1098634B/de active Pending
- 1956-03-12 GB GB7644/56A patent/GB793664A/en not_active Expired
- 1956-03-13 FR FR1148643D patent/FR1148643A/fr not_active Expired
- 1956-03-13 CH CH339297D patent/CH339297A/de unknown
- 1956-03-14 US US571458A patent/US2914675A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| NL195609A (en:Method) | |
| US2914675A (en) | 1959-11-24 |
| FR1148643A (fr) | 1957-12-12 |
| NL97470C (en:Method) | |
| GB793664A (en) | 1958-04-23 |
| DE1098634B (de) | 1961-02-02 |
| CH339297A (de) | 1959-06-30 |