NL8902891A - Werkwijze en inrichting voor het versneld bepalen van de veroudering van een of meer elementen met een electromagnetische verouderingsparameter. - Google Patents

Werkwijze en inrichting voor het versneld bepalen van de veroudering van een of meer elementen met een electromagnetische verouderingsparameter. Download PDF

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Publication number
NL8902891A
NL8902891A NL8902891A NL8902891A NL8902891A NL 8902891 A NL8902891 A NL 8902891A NL 8902891 A NL8902891 A NL 8902891A NL 8902891 A NL8902891 A NL 8902891A NL 8902891 A NL8902891 A NL 8902891A
Authority
NL
Netherlands
Prior art keywords
oven
temperature
aging
parameter
heating element
Prior art date
Application number
NL8902891A
Other languages
English (en)
Dutch (nl)
Original Assignee
Imec Inter Uni Micro Electr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imec Inter Uni Micro Electr filed Critical Imec Inter Uni Micro Electr
Priority to NL8902891A priority Critical patent/NL8902891A/nl
Priority to AT90200990T priority patent/ATE124540T1/de
Priority to EP90200990A priority patent/EP0395149B1/fr
Priority to ES90200990T priority patent/ES2074119T3/es
Priority to PCT/EP1990/000291 priority patent/WO1990013042A1/fr
Priority to DK90200990.1T priority patent/DK0395149T3/da
Priority to DE69020420T priority patent/DE69020420T2/de
Priority to JP2506558A priority patent/JPH03506076A/ja
Publication of NL8902891A publication Critical patent/NL8902891A/nl
Priority to US08/372,383 priority patent/US5646540A/en
Priority to GR950402100T priority patent/GR3016984T3/el

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2862—Chambers or ovens; Tanks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2642—Testing semiconductor operation lifetime or reliability, e.g. by accelerated life tests
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2874—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2881—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to environmental aspects other than temperature, e.g. humidity or vibrations

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Environmental & Geological Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Electroluminescent Light Sources (AREA)
NL8902891A 1989-04-19 1989-11-22 Werkwijze en inrichting voor het versneld bepalen van de veroudering van een of meer elementen met een electromagnetische verouderingsparameter. NL8902891A (nl)

Priority Applications (10)

Application Number Priority Date Filing Date Title
NL8902891A NL8902891A (nl) 1989-04-19 1989-11-22 Werkwijze en inrichting voor het versneld bepalen van de veroudering van een of meer elementen met een electromagnetische verouderingsparameter.
AT90200990T ATE124540T1 (de) 1989-04-19 1990-04-19 Verfahren und anordnung zur beschleunigten bestimmung der alterung von einem oder mehreren elementen mit einem elektromagnetischen alterungsparameter.
EP90200990A EP0395149B1 (fr) 1989-04-19 1990-04-19 Méthode et dispositif pour la détermination accélérée du vieillissement d'éléments avec un paramètre de vieillissement électromagnétique
ES90200990T ES2074119T3 (es) 1989-04-19 1990-04-19 Metodo y dispositivo para la determinacion acelerada del envejecimiento de uno o mas elementos con un parametro de envejecimiento electromagnetico.
PCT/EP1990/000291 WO1990013042A1 (fr) 1989-04-19 1990-04-19 Procede et dispositif pour determiner rapidement le vieillissement d'un ou plusieurs elements avec un parametre de vieillissement electromagnetique
DK90200990.1T DK0395149T3 (da) 1989-04-19 1990-04-19 Fremgangsmåde og apparat til accelereret bestemmelse af ældning af et eller flere elementer med en elektromagnetisk ældningsparameter
DE69020420T DE69020420T2 (de) 1989-04-19 1990-04-19 Verfahren und Anordnung zur beschleunigten Bestimmung der Alterung von einem oder mehreren Elementen mit einem elektromagnetischen Alterungsparameter.
JP2506558A JPH03506076A (ja) 1989-04-19 1990-04-19 電磁エージングパラメータを有する１個または１個以上の素子のエージングについて加速された決定をおこなうための方法および装置
US08/372,383 US5646540A (en) 1989-04-19 1995-01-13 Apparatus and method for measuring electromagnetic ageing parameter of a circuit element and predicting its values
GR950402100T GR3016984T3 (en) 1989-04-19 1995-08-02 Method and device for accelerated determining of ageing of one or more elements with an electromagnetic ageing parameter.

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
NL8900982 1989-04-19
NL8900982 1989-04-19
NL8902891A NL8902891A (nl) 1989-04-19 1989-11-22 Werkwijze en inrichting voor het versneld bepalen van de veroudering van een of meer elementen met een electromagnetische verouderingsparameter.
NL8902891 1989-11-22

Publications (1)

Publication Number Publication Date
NL8902891A true NL8902891A (nl) 1990-11-16

Family

ID=26646514

Family Applications (1)

Application Number Title Priority Date Filing Date
NL8902891A NL8902891A (nl) 1989-04-19 1989-11-22 Werkwijze en inrichting voor het versneld bepalen van de veroudering van een of meer elementen met een electromagnetische verouderingsparameter.

Country Status (9)

Country Link
EP (1) EP0395149B1 (fr)
JP (1) JPH03506076A (fr)
AT (1) ATE124540T1 (fr)
DE (1) DE69020420T2 (fr)
DK (1) DK0395149T3 (fr)
ES (1) ES2074119T3 (fr)
GR (1) GR3016984T3 (fr)
NL (1) NL8902891A (fr)
WO (1) WO1990013042A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5833365A (en) * 1995-03-24 1998-11-10 Interuniversitair Micro-Electronika Centrum Vzw Method for local temperature sensing for use in performing high resolution in-situ parameter measurements
EP0733909B1 (fr) * 1995-03-24 2004-11-17 Interuniversitair Micro Elektronica Centrum Vzw Méthode et appareil pour mesurer localement la température pour mesure in-situ avec haute résolution
EP0907085A1 (fr) * 1997-10-03 1999-04-07 Interuniversitair Microelektronica Centrum Vzw Procédé de mesure de changements de résistance par électromigration
EP1596210A1 (fr) * 2004-05-11 2005-11-16 Interuniversitair Micro-Elektronica Centrum (IMEC) Procédé de détermination de la durée de vie des interconnexions submicrométrique
WO2011156037A2 (fr) 2010-03-16 2011-12-15 The Penn State Research Foundation Procédés et appareil pour la détection de température ultra-sensible à l'aide de dispositifs résonants

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2375154A (en) * 1943-10-07 1945-05-01 Metals & Controls Corp Electric furnace
GB970426A (en) * 1961-02-09 1964-09-23 Scholemann Ag Improvements in electrically heated billet-containers for metal-extrusion or tube presses
US3677329A (en) * 1970-11-16 1972-07-18 Trw Inc Annular heat pipe
US3823685A (en) * 1971-08-05 1974-07-16 Ncr Co Processing apparatus
US4554437A (en) * 1984-05-17 1985-11-19 Pet Incorporated Tunnel oven
DE3470609D1 (en) * 1984-07-20 1988-05-26 Deutsches Elektronen Synchr Low temperature measuring circuit
US4777434A (en) * 1985-10-03 1988-10-11 Amp Incorporated Microelectronic burn-in system
US4782291A (en) * 1985-10-04 1988-11-01 Blandin Bruce A Method and apparatus for the testing of active or passive electrical devices in a sub-zero environment

Also Published As

Publication number Publication date
WO1990013042A1 (fr) 1990-11-01
JPH03506076A (ja) 1991-12-26
GR3016984T3 (en) 1995-11-30
ATE124540T1 (de) 1995-07-15
DK0395149T3 (da) 1995-08-28
DE69020420T2 (de) 1995-11-16
ES2074119T3 (es) 1995-09-01
DE69020420D1 (de) 1995-08-03
EP0395149A1 (fr) 1990-10-31
EP0395149B1 (fr) 1995-06-28

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BV The patent application has lapsed