NL8702874A - Inspectie apparaat met gedigitaliseerde elektronen detectie. - Google Patents

Inspectie apparaat met gedigitaliseerde elektronen detectie. Download PDF

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Publication number
NL8702874A
NL8702874A NL8702874A NL8702874A NL8702874A NL 8702874 A NL8702874 A NL 8702874A NL 8702874 A NL8702874 A NL 8702874A NL 8702874 A NL8702874 A NL 8702874A NL 8702874 A NL8702874 A NL 8702874A
Authority
NL
Netherlands
Prior art keywords
inspection device
radiation
radiation inspection
dac
detection
Prior art date
Application number
NL8702874A
Other languages
English (en)
Dutch (nl)
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Priority to NL8702874A priority Critical patent/NL8702874A/nl
Priority to EP88202706A priority patent/EP0319095A1/de
Priority to JP63300450A priority patent/JPH022968A/ja
Priority to US07/277,572 priority patent/US4985628A/en
Priority to KR1019880015804A priority patent/KR890011012A/ko
Publication of NL8702874A publication Critical patent/NL8702874A/nl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Measurement Of Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Current Or Voltage (AREA)
  • Tests Of Electronic Circuits (AREA)
NL8702874A 1987-12-01 1987-12-01 Inspectie apparaat met gedigitaliseerde elektronen detectie. NL8702874A (nl)

Priority Applications (5)

Application Number Priority Date Filing Date Title
NL8702874A NL8702874A (nl) 1987-12-01 1987-12-01 Inspectie apparaat met gedigitaliseerde elektronen detectie.
EP88202706A EP0319095A1 (de) 1987-12-01 1988-11-28 Inspektionsgerät mit digitalisierter Elektronendetektion
JP63300450A JPH022968A (ja) 1987-12-01 1988-11-28 ビーム査察装置
US07/277,572 US4985628A (en) 1987-12-01 1988-11-29 Inspection apparatus incorporating digital electron detection
KR1019880015804A KR890011012A (ko) 1987-12-01 1988-11-30 빔 조사 장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL8702874A NL8702874A (nl) 1987-12-01 1987-12-01 Inspectie apparaat met gedigitaliseerde elektronen detectie.
NL8702874 1987-12-01

Publications (1)

Publication Number Publication Date
NL8702874A true NL8702874A (nl) 1989-07-03

Family

ID=19851003

Family Applications (1)

Application Number Title Priority Date Filing Date
NL8702874A NL8702874A (nl) 1987-12-01 1987-12-01 Inspectie apparaat met gedigitaliseerde elektronen detectie.

Country Status (5)

Country Link
US (1) US4985628A (de)
EP (1) EP0319095A1 (de)
JP (1) JPH022968A (de)
KR (1) KR890011012A (de)
NL (1) NL8702874A (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5210487A (en) * 1991-06-04 1993-05-11 Schlumberger Technologies Inc. Double-gated integrating scheme for electron beam tester
JP3955450B2 (ja) * 2001-09-27 2007-08-08 株式会社ルネサステクノロジ 試料検査方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE401733B (sv) * 1976-12-06 1978-05-22 Atomenergi Ab Forfarande och apparat vid metning av plattjocklek
JPS5472980A (en) * 1977-11-24 1979-06-11 Hitachi Ltd Electron-beam drawing unit
JPS566438A (en) * 1979-06-27 1981-01-23 Fujitsu Ltd Electron beam exposure
US4301366A (en) * 1980-06-06 1981-11-17 Nucleonic Data Systems Chatter detection in thickness measuring gauges and the like
JPS59163506A (ja) * 1983-03-09 1984-09-14 Hitachi Ltd 電子ビ−ム測長装置
SE452526B (sv) * 1984-05-09 1987-11-30 Stiftelsen Inst Mikrovags Forfarande for att inspektera integrerade kretsar eller andra objekt
JPH0775155B2 (ja) * 1985-08-20 1995-08-09 富士通株式会社 ストロボ電子ビーム装置
DE3617044A1 (de) * 1986-05-21 1987-11-26 Siemens Ag Messverarbeitungsanordnung fuer korpuskularstrahlung
US4788426A (en) * 1986-06-11 1988-11-29 Kuehnle Manfred R Interactive image recording method and means
US4721910A (en) * 1986-09-12 1988-01-26 American Telephone And Telegraph Company, At&T Bell Laboratories High speed circuit measurements using photoemission sampling
JPS63119147A (ja) * 1986-11-07 1988-05-23 Jeol Ltd 荷電粒子線の集束状態を検出する装置
US4818873A (en) * 1987-10-30 1989-04-04 Vickers Instruments (Canada) Inc. Apparatus for automatically controlling the magnification factor of a scanning electron microscope

Also Published As

Publication number Publication date
EP0319095A1 (de) 1989-06-07
US4985628A (en) 1991-01-15
JPH022968A (ja) 1990-01-08
KR890011012A (ko) 1989-08-12

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Legal Events

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A1B A search report has been drawn up
BV The patent application has lapsed