NL85499C - - Google Patents

Info

Publication number
NL85499C
NL85499C NL85499DA NL85499C NL 85499 C NL85499 C NL 85499C NL 85499D A NL85499D A NL 85499DA NL 85499 C NL85499 C NL 85499C
Authority
NL
Netherlands
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of NL85499C publication Critical patent/NL85499C/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10Lenses
    • H01J37/14Lenses magnetic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10Lenses
    • H01J37/14Lenses magnetic
    • H01J37/141Electromagnetic lenses

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Electron Tubes For Measurement (AREA)
  • Lenses (AREA)
  • Electron Beam Exposure (AREA)
NL85499D 1952-09-16 NL85499C (enrdf_load_html_response)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL314474X 1952-09-16

Publications (1)

Publication Number Publication Date
NL85499C true NL85499C (enrdf_load_html_response)

Family

ID=19783758

Family Applications (2)

Application Number Title Priority Date Filing Date
NLAANVRAGE7313365,A NL172506B (nl) 1952-09-16 Kaasrijpingsorgaan.
NL85499D NL85499C (enrdf_load_html_response) 1952-09-16

Family Applications Before (1)

Application Number Title Priority Date Filing Date
NLAANVRAGE7313365,A NL172506B (nl) 1952-09-16 Kaasrijpingsorgaan.

Country Status (7)

Country Link
US (1) US2880324A (enrdf_load_html_response)
BE (1) BE522811A (enrdf_load_html_response)
CH (1) CH314474A (enrdf_load_html_response)
DE (1) DE1006984B (enrdf_load_html_response)
FR (1) FR1083345A (enrdf_load_html_response)
GB (1) GB738121A (enrdf_load_html_response)
NL (2) NL85499C (enrdf_load_html_response)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3300681A (en) * 1965-10-22 1967-01-24 Gen Electric Adjustable magnet for a magnetron
US3787696A (en) * 1972-03-15 1974-01-22 Etec Corp Scanning electron microscope electron-optical column construction
FR2597259A1 (fr) * 1986-04-15 1987-10-16 Thomson Csf Dispositif a faisceau electronique pour projeter l'image d'un objet sur un echantillon

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE904095C (de) * 1940-06-01 1954-02-15 Siemens Ag Als Objektiv fuer ein Elektronenmikroskop dienende Elektronenlinse
US2356535A (en) * 1940-08-31 1944-08-22 Ruska Ernst Electronic lens
US2295403A (en) * 1940-11-15 1942-09-08 Rca Corp Apertured electron lens and method of alignment
DE898217C (de) * 1943-01-27 1953-11-30 Siemens Ag Anordnung zur Veraenderung der mit einer magnetischen Elektronenlinse erzielbaren Vergroesserungen
US2369782A (en) * 1943-04-01 1945-02-20 Rca Corp Electron lens system
NL89013C (enrdf_load_html_response) * 1944-05-31
GB609480A (en) * 1944-09-30 1948-10-01 Otto Ernst Heinrich Klemperer Improvements in or relating to a electron discharge apparatus in which a flattened or ribbon-shaped electron beam is employed
US2567674A (en) * 1949-11-08 1951-09-11 Rca Corp Velocity modulated electron discharge device
US2587942A (en) * 1949-12-27 1952-03-04 Leitz Ernst Gmbh Electronic optical correction mechanism for magnetic lenses
US2679018A (en) * 1950-06-30 1954-05-18 Rca Corp Magnetic electron lens pole piece

Also Published As

Publication number Publication date
FR1083345A (fr) 1955-01-07
BE522811A (enrdf_load_html_response)
NL172506B (nl)
US2880324A (en) 1959-03-31
DE1006984B (de) 1957-04-25
GB738121A (en) 1955-10-05
CH314474A (de) 1956-06-15

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