NL8003286A - Elektronenmicroscoop met een kamer, in het bijzonder voor het observeren van stukken van relatief grote afmetingen. - Google Patents

Elektronenmicroscoop met een kamer, in het bijzonder voor het observeren van stukken van relatief grote afmetingen. Download PDF

Info

Publication number
NL8003286A
NL8003286A NL8003286A NL8003286A NL8003286A NL 8003286 A NL8003286 A NL 8003286A NL 8003286 A NL8003286 A NL 8003286A NL 8003286 A NL8003286 A NL 8003286A NL 8003286 A NL8003286 A NL 8003286A
Authority
NL
Netherlands
Prior art keywords
shaped body
cup
chamber
frame
guide members
Prior art date
Application number
NL8003286A
Other languages
English (en)
Dutch (nl)
Original Assignee
Agusta Aeronaut Costr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agusta Aeronaut Costr filed Critical Agusta Aeronaut Costr
Publication of NL8003286A publication Critical patent/NL8003286A/nl

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/20Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Microscoopes, Condenser (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
NL8003286A 1979-06-12 1980-06-05 Elektronenmicroscoop met een kamer, in het bijzonder voor het observeren van stukken van relatief grote afmetingen. NL8003286A (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT68260/79A IT1118775B (it) 1979-06-12 1979-06-12 Microscopio elettronico a scansione a camera scomponibile particolarmente per l osservazione di pezzi di dimensioni relativamente elevate
IT6826079 1979-06-12

Publications (1)

Publication Number Publication Date
NL8003286A true NL8003286A (nl) 1980-12-16

Family

ID=11308732

Family Applications (1)

Application Number Title Priority Date Filing Date
NL8003286A NL8003286A (nl) 1979-06-12 1980-06-05 Elektronenmicroscoop met een kamer, in het bijzonder voor het observeren van stukken van relatief grote afmetingen.

Country Status (8)

Country Link
US (1) US4313056A (Direct)
JP (1) JPS561453A (Direct)
CH (1) CH640366A5 (Direct)
DE (1) DE3022094A1 (Direct)
FR (1) FR2458893A1 (Direct)
GB (1) GB2052848B (Direct)
IT (1) IT1118775B (Direct)
NL (1) NL8003286A (Direct)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4418162A1 (de) * 1994-05-25 1995-11-30 Fraunhofer Ges Forschung Einrichtung zur Durchführung elektronenstrahltechnologischer Prozesse im Vakuum
US5948704A (en) * 1996-06-05 1999-09-07 Lam Research Corporation High flow vacuum chamber including equipment modules such as a plasma generating source, vacuum pumping arrangement and/or cantilevered substrate support
US5820723A (en) * 1996-06-05 1998-10-13 Lam Research Corporation Universal vacuum chamber including equipment modules such as a plasma generating source, vacuum pumping arrangement and/or cantilevered substrate support

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US408830A (en) * 1889-08-13 Watch-case
US2627580A (en) * 1948-10-23 1953-02-03 Rca Corp Demountable vacuumtight seal
FR1407511A (fr) * 1963-09-18 1965-07-30 Trueb Tauber & Co Dispositif pour l'examen des surfaces d'objet en microscopie électronique
US3405264A (en) * 1965-08-24 1968-10-08 Rca Corp Specimen injector for electron microscopes with a rotatable specimen holder

Also Published As

Publication number Publication date
JPS6346954B2 (Direct) 1988-09-19
DE3022094A1 (de) 1980-12-18
JPS561453A (en) 1981-01-09
IT7968260A0 (it) 1979-06-12
GB2052848B (en) 1983-01-26
IT1118775B (it) 1986-03-03
CH640366A5 (it) 1983-12-30
FR2458893B1 (Direct) 1984-12-07
GB2052848A (en) 1981-01-28
FR2458893A1 (fr) 1981-01-02
US4313056A (en) 1982-01-26

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Legal Events

Date Code Title Description
A85 Still pending on 85-01-01
BA A request for search or an international-type search has been filed
BB A search report has been drawn up
BV The patent application has lapsed