NL7904226A - PROCEDURE FOR THE NON-CONTACT PERFORMING A POTENTIAL MEASUREMENT ON ELECTRONIC COMPONENTS, AND A DEVICE FOR CARRYING OUT SUCH PROCESS. - Google Patents

PROCEDURE FOR THE NON-CONTACT PERFORMING A POTENTIAL MEASUREMENT ON ELECTRONIC COMPONENTS, AND A DEVICE FOR CARRYING OUT SUCH PROCESS.

Info

Publication number
NL7904226A
NL7904226A NL7904226A NL7904226A NL7904226A NL 7904226 A NL7904226 A NL 7904226A NL 7904226 A NL7904226 A NL 7904226A NL 7904226 A NL7904226 A NL 7904226A NL 7904226 A NL7904226 A NL 7904226A
Authority
NL
Netherlands
Prior art keywords
procedure
carrying
electronic components
potential measurement
contact performing
Prior art date
Application number
NL7904226A
Other languages
Dutch (nl)
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of NL7904226A publication Critical patent/NL7904226A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams
NL7904226A 1978-05-30 1979-05-29 PROCEDURE FOR THE NON-CONTACT PERFORMING A POTENTIAL MEASUREMENT ON ELECTRONIC COMPONENTS, AND A DEVICE FOR CARRYING OUT SUCH PROCESS. NL7904226A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19782823642 DE2823642A1 (en) 1978-05-30 1978-05-30 METHOD FOR CONTACTLESS POTENTIAL MEASUREMENT ON AN ELECTRONIC COMPONENT

Publications (1)

Publication Number Publication Date
NL7904226A true NL7904226A (en) 1979-12-04

Family

ID=6040559

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7904226A NL7904226A (en) 1978-05-30 1979-05-29 PROCEDURE FOR THE NON-CONTACT PERFORMING A POTENTIAL MEASUREMENT ON ELECTRONIC COMPONENTS, AND A DEVICE FOR CARRYING OUT SUCH PROCESS.

Country Status (4)

Country Link
JP (1) JPS54157085A (en)
DE (1) DE2823642A1 (en)
GB (1) GB2021789B (en)
NL (1) NL7904226A (en)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3036660A1 (en) * 1980-09-29 1982-05-19 Siemens AG, 1000 Berlin und 8000 München ARRANGEMENT FOR STROBOSCOPIC POTENTIAL MEASUREMENTS WITH AN ELECTRON BEAM MEASURING DEVICE
US4415851A (en) * 1981-05-26 1983-11-15 International Business Machines Corporation System for contactless testing of multi-layer ceramics
US4417203A (en) * 1981-05-26 1983-11-22 International Business Machines Corporation System for contactless electrical property testing of multi-layer ceramics
DE3138929A1 (en) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München IMPROVED SECONDARY ELECTRON SPECTROMETER FOR POTENTIAL MEASUREMENT ON A SAMPLE WITH AN ELECTRON PROBE
DE3138901A1 (en) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München IMPROVED COUNTERFIELD SPECTROMETER FOR ELECTRON BEAM MEASUREMENT TECHNOLOGY
DE3138927A1 (en) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Imaging spectrometer for electron-beam metrology and an electron beam measurement apparatus
DE3138926A1 (en) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Electron-optical arrangement for high-resolution electron-beam metrology
DE3138990A1 (en) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Coaxial opposing field spectrometer of high acceptance for secondary electrons and an electron beam test set
DE3206309A1 (en) * 1982-02-22 1983-09-15 Siemens AG, 1000 Berlin und 8000 München SECONDARY ELECTRON SPECTROMETER AND METHOD FOR ITS OPERATION
JPS5932145A (en) * 1982-08-16 1984-02-21 Hitachi Ltd Potential detector
DE3232671A1 (en) * 1982-09-02 1984-03-08 Siemens AG, 1000 Berlin und 8000 München ARRANGEMENT AND METHOD FOR MEASURING VOLTAGE ON A CURVED MEASURING OBJECT
DE3235100A1 (en) * 1982-09-22 1984-03-22 Siemens AG, 1000 Berlin und 8000 München METHOD FOR MEASURING ELECTRICAL POTENTIALS AT BURNED SOLID MATERIAL
DE3235484A1 (en) * 1982-09-24 1984-03-29 Siemens AG, 1000 Berlin und 8000 München METHOD FOR SUPPRESSING A MALFUNCTION IN THE MEASUREMENT OF SIGNAL FLOWS WITH A BODY PROBE AND DEVICE FOR PERFORMING SUCH A METHOD
GB8515250D0 (en) 1985-06-17 1985-07-17 Texas Instruments Ltd Testing of integrated circuits
US4943769A (en) * 1989-03-21 1990-07-24 International Business Machines Corporation Apparatus and method for opens/shorts testing of capacitively coupled networks in substrates using electron beams
JP2973554B2 (en) * 1991-03-19 1999-11-08 富士通株式会社 Voltage measurement method using electron beam device
CN111108579B (en) 2017-09-29 2022-10-04 株式会社日立高新技术 Scanning electron microscope

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1246744A (en) * 1969-01-02 1971-09-15 Graham Stuart Plows Electron beam apparatus
GB1277303A (en) * 1969-09-16 1972-06-14 Gen Electric Method and apparatus for testing circuits with an electron beam

Also Published As

Publication number Publication date
JPS54157085A (en) 1979-12-11
GB2021789A (en) 1979-12-05
GB2021789B (en) 1982-07-07
DE2823642A1 (en) 1980-01-03

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Legal Events

Date Code Title Description
BA A request for search or an international-type search has been filed
A85 Still pending on 85-01-01
BB A search report has been drawn up
BC A request for examination has been filed
BV The patent application has lapsed