NL7812571A - Method and apparatus for sputtering multiple cylinders. - Google Patents
Method and apparatus for sputtering multiple cylinders.Info
- Publication number
- NL7812571A NL7812571A NL7812571A NL7812571A NL7812571A NL 7812571 A NL7812571 A NL 7812571A NL 7812571 A NL7812571 A NL 7812571A NL 7812571 A NL7812571 A NL 7812571A NL 7812571 A NL7812571 A NL 7812571A
- Authority
- NL
- Netherlands
- Prior art keywords
- multiple cylinders
- sputtering multiple
- sputtering
- cylinders
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Coating By Spraying Or Casting (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/864,375 US4151059A (en) | 1977-12-27 | 1977-12-27 | Method and apparatus for sputtering multiple cylinders simultaneously |
Publications (1)
Publication Number | Publication Date |
---|---|
NL7812571A true NL7812571A (nl) | 1979-06-29 |
Family
ID=25343133
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL7812571A NL7812571A (nl) | 1977-12-27 | 1978-12-27 | Method and apparatus for sputtering multiple cylinders. |
Country Status (7)
Country | Link |
---|---|
US (1) | US4151059A (fr) |
AU (1) | AU525621B2 (fr) |
CH (1) | CH626191A5 (fr) |
FR (1) | FR2413478B1 (fr) |
GB (1) | GB2010916B (fr) |
NL (1) | NL7812571A (fr) |
SE (1) | SE447830B (fr) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6037188B2 (ja) * | 1981-08-27 | 1985-08-24 | 三菱マテリアル株式会社 | スパツタリング装置 |
US4526670A (en) * | 1983-05-20 | 1985-07-02 | Lfe Corporation | Automatically loadable multifaceted electrode with load lock mechanism |
FR2602798B1 (fr) * | 1986-08-13 | 1992-10-23 | Alcatel Thomson Faisceaux | Procede de depot par pulverisation cathodique d'une couche de materiau sur des substrats et dispositif de mise en oeuvre d'un tel procede |
US5618388A (en) * | 1988-02-08 | 1997-04-08 | Optical Coating Laboratory, Inc. | Geometries and configurations for magnetron sputtering apparatus |
US5225057A (en) * | 1988-02-08 | 1993-07-06 | Optical Coating Laboratory, Inc. | Process for depositing optical films on both planar and non-planar substrates |
US5798027A (en) * | 1988-02-08 | 1998-08-25 | Optical Coating Laboratory, Inc. | Process for depositing optical thin films on both planar and non-planar substrates |
US5037676A (en) * | 1989-12-27 | 1991-08-06 | Xerox Corporation | Method and apparatus for cleaning, coating and curing receptor substrates in an enclosed planetary array |
DE4230872C2 (de) * | 1992-09-16 | 1999-10-21 | Leybold Ag | Vorrichtung zur gleichzeitigen Halterung einer Vielzahl von Substraten |
US5730847A (en) * | 1993-03-15 | 1998-03-24 | Kabushiki Kaisha Kobeseikosho | Arc ion plating device and arc ion plating system |
US5830272A (en) * | 1995-11-07 | 1998-11-03 | Sputtered Films, Inc. | System for and method of providing a controlled deposition on wafers |
US5961798A (en) * | 1996-02-13 | 1999-10-05 | Diamond Black Technologies, Inc. | System and method for vacuum coating of articles having precise and reproducible positioning of articles |
US5932078A (en) * | 1997-08-30 | 1999-08-03 | United Technologies Corporation | Cathodic arc vapor deposition apparatus |
DE19807032A1 (de) * | 1998-02-19 | 1999-08-26 | Leybold Systems Gmbh | Verfahren und Vorrichtung zum Transportieren zu beschichtender zylindrischer Substrate |
US6376018B1 (en) | 1998-06-17 | 2002-04-23 | Wilfred C. Kittler, Jr. | Method for the production of unsupported thin film particles |
US6669824B2 (en) | 2000-07-10 | 2003-12-30 | Unaxis Usa, Inc. | Dual-scan thin film processing system |
US6495010B2 (en) | 2000-07-10 | 2002-12-17 | Unaxis Usa, Inc. | Differentially-pumped material processing system |
TW593669B (en) * | 2001-11-21 | 2004-06-21 | Ciba Sc Holding Ag | Aqueous functional fluids with antioxidants |
DE10202311B4 (de) * | 2002-01-23 | 2007-01-04 | Schott Ag | Vorrichtung und Verfahren zur Plasmabehandlung von dielektrischen Körpern |
TWI379916B (en) * | 2009-02-24 | 2012-12-21 | Ind Tech Res Inst | Vacuum coating device and coating method |
US20120321788A1 (en) * | 2011-06-16 | 2012-12-20 | Pinecone Material Inc. | Rotation system for thin film formation |
DE102018126862A1 (de) | 2018-10-26 | 2020-04-30 | Oerlikon Surface Solutions Ag, Pfäffikon | Werkstückträgereinrichtung und Beschichtungsanordnung |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1440590A (fr) * | 1965-07-21 | 1966-05-27 | Euratom | Appareil de métallisation sous vide, particulièrement pour la métallisation de corps de forme allongée, notamment cylindriques ou parallélipipédiques |
US3723276A (en) * | 1969-06-03 | 1973-03-27 | Warner Lambert Co | Article coating method |
US3725238A (en) * | 1969-07-28 | 1973-04-03 | Gillette Co | Target element |
GB1321486A (en) * | 1970-12-05 | 1973-06-27 | Hunt C J L | Vacuum metallising or vacuum coating |
US3845739A (en) * | 1972-04-17 | 1974-11-05 | Xerox Corp | System for vapor deposition of thin films |
US3897325A (en) * | 1972-10-20 | 1975-07-29 | Nippon Electric Varian Ltd | Low temperature sputtering device |
US4014779A (en) * | 1974-11-01 | 1977-03-29 | Coulter Information Systems, Inc. | Sputtering apparatus |
MX145314A (es) * | 1975-12-17 | 1982-01-27 | Coulter Systems Corp | Mejoras a un aparato chisporroteador para producir pelicula electrofotografica |
DE2624700A1 (de) * | 1976-06-02 | 1977-12-15 | Leybold Heraeus Gmbh & Co Kg | Verfahren und vorrichtung zum gleichfoermigen beschichten von flaechigen substraten |
US4126530A (en) * | 1977-08-04 | 1978-11-21 | Telic Corporation | Method and apparatus for sputter cleaning and bias sputtering |
-
1977
- 1977-12-27 US US05/864,375 patent/US4151059A/en not_active Expired - Lifetime
-
1978
- 1978-12-21 GB GB7849556A patent/GB2010916B/en not_active Expired
- 1978-12-27 FR FR7836511A patent/FR2413478B1/fr not_active Expired
- 1978-12-27 NL NL7812571A patent/NL7812571A/xx active Search and Examination
- 1978-12-27 SE SE7813335A patent/SE447830B/sv not_active IP Right Cessation
- 1978-12-27 CH CH1317078A patent/CH626191A5/fr not_active IP Right Cessation
-
1979
- 1979-01-02 AU AU43029/79A patent/AU525621B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
CH626191A5 (fr) | 1981-10-30 |
AU4302979A (en) | 1980-07-10 |
SE7813335L (sv) | 1979-06-28 |
FR2413478A1 (fr) | 1979-07-27 |
GB2010916B (en) | 1982-08-25 |
SE447830B (sv) | 1986-12-15 |
FR2413478B1 (fr) | 1985-08-09 |
US4151059A (en) | 1979-04-24 |
GB2010916A (en) | 1979-07-04 |
AU525621B2 (en) | 1982-11-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A85 | Still pending on 85-01-01 | ||
BA | A request for search or an international-type search has been filed | ||
BB | A search report has been drawn up | ||
BC | A request for examination has been filed | ||
CNR | Transfer of rights (patent application after its laying open for public inspection) |
Free format text: STORK COLORPROOFING B.V. |
|
BN | A decision not to publish the application has become irrevocable |