NL7705395A - Apparatuur voor het uit een smelt laten groeien van een kristal. - Google Patents

Apparatuur voor het uit een smelt laten groeien van een kristal.

Info

Publication number
NL7705395A
NL7705395A NL7705395A NL7705395A NL7705395A NL 7705395 A NL7705395 A NL 7705395A NL 7705395 A NL7705395 A NL 7705395A NL 7705395 A NL7705395 A NL 7705395A NL 7705395 A NL7705395 A NL 7705395A
Authority
NL
Netherlands
Prior art keywords
melting
equipment
crystal grow
grow
crystal
Prior art date
Application number
NL7705395A
Other languages
English (en)
Dutch (nl)
Original Assignee
Mobil Tyco Solar Energy Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mobil Tyco Solar Energy Corp filed Critical Mobil Tyco Solar Energy Corp
Publication of NL7705395A publication Critical patent/NL7705395A/xx

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30Mechanisms for rotating or moving either the melt or the crystal
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/002Continuous growth
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/005Simultaneous pulling of more than one crystal
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/14Heating of the melt or the crystallised materials
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20Controlling or regulating
    • C30B15/22Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
    • C30B15/24Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using mechanical means, e.g. shaping guides
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/34Edge-defined film-fed crystal-growth using dies or slits
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10Apparatus
    • Y10T117/1024Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032Seed pulling
    • Y10T117/1036Seed pulling including solid member shaping means other than seed or product [e.g., EDFG die]
    • Y10T117/1044Seed pulling including solid member shaping means other than seed or product [e.g., EDFG die] including means forming a flat shape [e.g., ribbon]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10Apparatus
    • Y10T117/1024Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032Seed pulling
    • Y10T117/1068Seed pulling including heating or cooling details [e.g., shield configuration]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10Apparatus
    • Y10T117/1024Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032Seed pulling
    • Y10T117/1072Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
NL7705395A 1977-01-24 1977-05-16 Apparatuur voor het uit een smelt laten groeien van een kristal. NL7705395A (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/761,941 US4118197A (en) 1977-01-24 1977-01-24 Cartridge and furnace for crystal growth

Publications (1)

Publication Number Publication Date
NL7705395A true NL7705395A (nl) 1978-07-26

Family

ID=25063674

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7705395A NL7705395A (nl) 1977-01-24 1977-05-16 Apparatuur voor het uit een smelt laten groeien van een kristal.

Country Status (10)

Country Link
US (1) US4118197A (xx)
JP (1) JPS597676B2 (xx)
AU (1) AU509354B2 (xx)
CA (1) CA1087073A (xx)
DE (1) DE2730161A1 (xx)
FR (1) FR2377841A1 (xx)
GB (2) GB1539125A (xx)
IL (1) IL51999A (xx)
IN (1) IN147431B (xx)
NL (1) NL7705395A (xx)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4335081A (en) * 1979-01-15 1982-06-15 Mobil Tyco Solar Energy Corporation Crystal growth furnace with trap doors
US4415401A (en) * 1980-03-10 1983-11-15 Mobil Solar Energy Corporation Control of atmosphere surrounding crystal growth zone
US4267010A (en) * 1980-06-16 1981-05-12 Mobil Tyco Solar Energy Corporation Guidance mechanism
US4443411A (en) * 1980-12-15 1984-04-17 Mobil Solar Energy Corporation Apparatus for controlling the atmosphere surrounding a crystal growth zone
US4390505A (en) * 1981-03-30 1983-06-28 Mobil Solar Energy Corporation Crystal growth apparatus
US4410494A (en) * 1981-04-13 1983-10-18 Siltec Corporation Apparatus for controlling flow of molten material between crystal growth furnaces and a replenishment crucible
US4937053A (en) * 1987-03-27 1990-06-26 Mobil Solar Energy Corporation Crystal growing apparatus
KR890700543A (ko) * 1987-03-27 1989-04-25 버나드 엠. 길스피 결정성장 장치
EP0437775B1 (en) * 1989-12-22 1995-03-08 Shin-Etsu Handotai Company Limited Apparatus for producing Czochralski-grown single crystals
US5037622A (en) * 1990-07-13 1991-08-06 Mobil Solar Energy Corporation Wet-tip die for EFG crystal growth apparatus
US6602345B1 (en) 1999-06-29 2003-08-05 American Crystal Technologies, Inc., Heater arrangement for crystal growth furnace
US6537372B1 (en) 1999-06-29 2003-03-25 American Crystal Technologies, Inc. Heater arrangement for crystal growth furnace
EP1743055B1 (en) * 2004-04-15 2010-12-29 Faculdade de Ciencias da Universidade de Lisboa Method and apparatus for the growth of semiconductor, particularly silicon, ribbons
US7959732B1 (en) * 2005-06-17 2011-06-14 Saint-Gobain Ceramics & Plastics, Inc. Apparatus and method for monitoring and controlling crystal growth
EP2152942A1 (en) * 2007-06-14 2010-02-17 Evergreen Solar, Inc. Removable thermal control for ribbon crystal pulling furnaces
EP2207910A1 (en) * 2007-08-31 2010-07-21 Faculdade de Ciencias da Universidade de Lisboa Method for the production of semiconductor ribbons from a gaseous feedstock
CN102124150B (zh) 2008-08-18 2013-07-31 长青太阳能股份有限公司 控制气载污染物跨晶带表面的转移
US8263914B2 (en) * 2008-08-27 2012-09-11 AMG IdealCast Corporation Cartridge heater and method of use
US9206525B2 (en) 2011-11-30 2015-12-08 General Electric Company Method for configuring a system to grow a crystal by coupling a heat transfer device comprising at least one elongate member beneath a crucible
WO2016100031A1 (en) * 2014-12-15 2016-06-23 Corning Incorporated Method and apparatus for locating a preform on a mold

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2927008A (en) * 1956-10-29 1960-03-01 Shockley Transistor Corp Crystal growing apparatus
DE1090868B (de) * 1958-10-15 1960-10-13 Siemens Ag Verfahren zum Ziehen von einkristallinen Halbleiterstaeben aus Schmelzen
US3124489A (en) * 1960-05-02 1964-03-10 Method of continuously growing thin strip crystals
DE1193475B (de) * 1962-08-23 1965-05-26 Westinghouse Electric Corp Vorrichtung zum Drehen, Heben und Senken des Tiegels beim Ziehen von dendritischen Einkristallen
US3291571A (en) * 1963-12-23 1966-12-13 Gen Motors Corp Crystal growth
US3265469A (en) * 1964-09-21 1966-08-09 Gen Electric Crystal growing apparatus
US3453352A (en) * 1964-12-14 1969-07-01 Texas Instruments Inc Method and apparatus for producing crystalline semiconductor ribbon
US3471266A (en) * 1967-05-29 1969-10-07 Tyco Laboratories Inc Growth of inorganic filaments
US3650703A (en) * 1967-09-08 1972-03-21 Tyco Laboratories Inc Method and apparatus for growing inorganic filaments, ribbon from the melt
US3591348A (en) * 1968-01-24 1971-07-06 Tyco Laboratories Inc Method of growing crystalline materials
US3701636A (en) * 1970-09-23 1972-10-31 Tyco Laboratories Inc Crystal growing apparatus
BE811057A (fr) * 1974-02-15 1974-08-16 Elphiac Sa Machine universelle pour l'elaboration de monocristaux de materiaux semiconducteurs ou autres suivant les methodes classiques.
US3961905A (en) * 1974-02-25 1976-06-08 Corning Glass Works Crucible and heater assembly for crystal growth from a melt
DE2557186A1 (de) * 1975-12-18 1977-06-23 Siemens Ag Verfahren und vorrichtung zum herstellen von halbleitermaterialstaeben, insbesondere von siliciumstaeben mit grossen durchmessern, durch tiegelfreies zonenschmelzen

Also Published As

Publication number Publication date
US4118197A (en) 1978-10-03
GB1539126A (en) 1979-01-24
FR2377841B1 (xx) 1983-12-16
JPS597676B2 (ja) 1984-02-20
CA1087073A (en) 1980-10-07
IN147431B (xx) 1980-02-23
JPS5393183A (en) 1978-08-15
AU509354B2 (en) 1980-05-08
FR2377841A1 (fr) 1978-08-18
GB1539125A (en) 1979-01-24
IL51999A (en) 1980-07-31
DE2730161C2 (xx) 1991-02-21
AU2484077A (en) 1978-11-09
IL51999A0 (en) 1977-07-31
DE2730161A1 (de) 1978-07-27

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Legal Events

Date Code Title Description
BA A request for search or an international-type search has been filed
BB A search report has been drawn up
DNT Communications of changes of names of applicants whose applications have been laid open to public inspection

Free format text: MOBIL SOLAR ENERGY CORPORATION

BC A request for examination has been filed
A85 Still pending on 85-01-01
BV The patent application has lapsed