NL7611983A - Werkwijze voor de inplantatie van ionen. - Google Patents
Werkwijze voor de inplantatie van ionen.Info
- Publication number
- NL7611983A NL7611983A NL7611983A NL7611983A NL7611983A NL 7611983 A NL7611983 A NL 7611983A NL 7611983 A NL7611983 A NL 7611983A NL 7611983 A NL7611983 A NL 7611983A NL 7611983 A NL7611983 A NL 7611983A
- Authority
- NL
- Netherlands
- Prior art keywords
- inplanting
- ions
- procedure
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
- H01L21/26513—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors of electrically active species
- H01L21/2652—Through-implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26586—Bombardment with radiation with high-energy radiation producing ion implantation characterised by the angle between the ion beam and the crystal planes or the main crystal surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/36—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the concentration or distribution of impurities in the bulk material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/92—Capacitors with potential-jump barrier or surface barrier
- H01L29/93—Variable capacitance diodes, e.g. varactors
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- High Energy & Nuclear Physics (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Semiconductor Memories (AREA)
- Recrystallisation Techniques (AREA)
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50129646A JPS5834931B2 (ja) | 1975-10-28 | 1975-10-28 | ハンドウタイヘノフジユンブツドウニユウホウ |
Publications (1)
Publication Number | Publication Date |
---|---|
NL7611983A true NL7611983A (nl) | 1977-05-02 |
Family
ID=15014653
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL7611983A NL7611983A (nl) | 1975-10-28 | 1976-10-28 | Werkwijze voor de inplantatie van ionen. |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPS5834931B2 (de) |
DE (1) | DE2649134A1 (de) |
FR (1) | FR2330143A1 (de) |
NL (1) | NL7611983A (de) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2351082A1 (fr) * | 1976-05-11 | 1977-12-09 | Rhone Poulenc Ind | Procede de fabrication d'acide terephtalique a partir de terephtalate dipotassique, realisation en deux etages |
DE2833319C2 (de) * | 1978-07-29 | 1982-10-07 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Kapazitätsdiode |
JPS608700A (ja) * | 1983-06-27 | 1985-01-17 | 重光 啓助 | 同孔内小割発破方法 |
JP2597976B2 (ja) * | 1985-03-27 | 1997-04-09 | 株式会社東芝 | 半導体装置及びその製造方法 |
JPS61178268U (de) * | 1985-04-24 | 1986-11-07 | ||
JPH0831428B2 (ja) * | 1985-06-20 | 1996-03-27 | 住友電気工業株式会社 | 結晶へのイオン注入方法 |
US4790890A (en) * | 1987-12-03 | 1988-12-13 | Ireco Incorporated | Packaged emulsion explosives and methods of manufacture thereof |
JPH04343479A (ja) * | 1991-05-21 | 1992-11-30 | Nec Yamagata Ltd | 可変容量ダイオード |
EP1139434A3 (de) | 2000-03-29 | 2003-12-10 | Tyco Electronics Corporation | Variable Kapazitätsdiode mit hyperabruptem Übergangsprofil |
-
1975
- 1975-10-28 JP JP50129646A patent/JPS5834931B2/ja not_active Expired
-
1976
- 1976-10-28 FR FR7632651A patent/FR2330143A1/fr active Granted
- 1976-10-28 DE DE19762649134 patent/DE2649134A1/de not_active Ceased
- 1976-10-28 NL NL7611983A patent/NL7611983A/xx not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
FR2330143B3 (de) | 1979-07-13 |
JPS5253658A (en) | 1977-04-30 |
DE2649134A1 (de) | 1977-05-12 |
FR2330143A1 (fr) | 1977-05-27 |
JPS5834931B2 (ja) | 1983-07-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
BA | A request for search or an international-type search has been filed | ||
A85 | Still pending on 85-01-01 | ||
BB | A search report has been drawn up | ||
BC | A request for examination has been filed | ||
BV | The patent application has lapsed |