NL7205670A - - Google Patents

Info

Publication number
NL7205670A
NL7205670A NL7205670A NL7205670A NL7205670A NL 7205670 A NL7205670 A NL 7205670A NL 7205670 A NL7205670 A NL 7205670A NL 7205670 A NL7205670 A NL 7205670A NL 7205670 A NL7205670 A NL 7205670A
Authority
NL
Netherlands
Application number
NL7205670A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL7205670A publication Critical patent/NL7205670A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
NL7205670A 1972-03-16 1972-04-26 NL7205670A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH406672 1972-03-16

Publications (1)

Publication Number Publication Date
NL7205670A true NL7205670A (ja) 1973-09-18

Family

ID=4269175

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7205670A NL7205670A (ja) 1972-03-16 1972-04-26

Country Status (5)

Country Link
US (1) US3799110A (ja)
DE (1) DE2306173B2 (ja)
FR (1) FR2176019B1 (ja)
GB (1) GB1393496A (ja)
NL (1) NL7205670A (ja)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH599982A5 (ja) * 1975-09-02 1978-06-15 Balzers Patent Beteilig Ag
US4276855A (en) * 1979-05-02 1981-07-07 Optical Coating Laboratory, Inc. Coating apparatus
DE2951465C2 (de) * 1979-12-20 1982-10-21 Siemens AG, 1000 Berlin und 8000 München Halterung für Substrate in Bedampfungsanlagen
JPS61227165A (ja) * 1985-03-29 1986-10-09 Mitsubishi Electric Corp 蒸着装置
CH668430A5 (de) * 1986-07-31 1988-12-30 Satis Vacuum Ag Vakuum-beschichtungsanlage fuer optische substrate.
DE3908894C1 (en) * 1989-03-17 1990-01-11 Siemens Ag, 1000 Berlin Und 8000 Muenchen, De Substrate turning device for a vacuum coating installation (facility)
CH681308A5 (ja) * 1990-05-22 1993-02-26 Satis Vacuum Ag
DE59202577D1 (de) * 1991-03-05 1995-07-27 Balzers Hochvakuum Verfahren zur Herstellung einer doppelseitigen Beschichtung von optischen Werkstücken.
CH691308A5 (de) * 1996-05-10 2001-06-29 Satis Vacuum Ind Vertriebs Ag Substrat-Träger für Vakuum-Beschichtungsanlagen.
CH691306A5 (de) * 1996-05-10 2001-06-29 Satis Vacuum Ind Vertriebs Ag Vakuum-Beschichtunsanlage zum Aufdampfen von Vergütungsschichten auf optische Substrate.
CH693747A5 (de) * 1999-05-04 2004-01-15 Satis Vacuum Ind Vetriebs Ag Vakuum-Beschichtungsanlage zum Aufdampfen von Verguetungsschichten auf optische Substrate.
US6082296A (en) * 1999-09-22 2000-07-04 Xerox Corporation Thin film deposition chamber
WO2003083162A1 (en) * 2002-03-28 2003-10-09 Satis Vacuum Industries S.P.A. Vacuum deposition apparatus and method for depositing thin optical films on high curvature substrates
DE102004041854B4 (de) * 2004-04-27 2008-11-13 Von Ardenne Anlagentechnik Gmbh Verfahren und Vorrichtung zur thermischen Vakuumbeschichtung
TWI280986B (en) * 2004-04-30 2007-05-11 Hon Hai Prec Ind Co Ltd Vacuum vapor deposition apparatus
US20060099342A1 (en) * 2004-10-28 2006-05-11 Denton Vacuum Deposition of coatings
KR20120083712A (ko) * 2011-01-18 2012-07-26 삼성엘이디 주식회사 서셉터 및 이를 구비하는 화학 기상 증착 장치
CN102899618A (zh) * 2011-07-26 2013-01-30 御林汽配(昆山)有限公司 改进真空镀膜机传动机构
CN103184416B (zh) * 2011-12-29 2015-05-20 财团法人金属工业研究发展中心 具自转及公转复合式真空溅镀设备
CN103243307B (zh) * 2013-05-29 2015-04-29 东南大学 一种具有双旋转机构的oled镀膜机
TWI794475B (zh) * 2018-05-09 2023-03-01 德商索萊爾有限公司 用於接收多個基板以進行處理之保持裝置、處理系統及方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2912351A (en) * 1956-09-21 1959-11-10 Sylvania Electric Prod Lens coating apparatus and process
US2997979A (en) * 1958-09-15 1961-08-29 Tassara Luigi Apparatus for applying metallic film to electrical components and the like
US3396696A (en) * 1966-10-06 1968-08-13 Ralph F. Becker Lens turner for high vacuum evaporators

Also Published As

Publication number Publication date
US3799110A (en) 1974-03-26
FR2176019A1 (ja) 1973-10-26
DE2306173B2 (de) 1974-10-03
DE2306173A1 (de) 1973-10-18
FR2176019B1 (ja) 1977-02-04
GB1393496A (en) 1975-05-07

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