NL7114692A - - Google Patents
Info
- Publication number
- NL7114692A NL7114692A NL7114692A NL7114692A NL7114692A NL 7114692 A NL7114692 A NL 7114692A NL 7114692 A NL7114692 A NL 7114692A NL 7114692 A NL7114692 A NL 7114692A NL 7114692 A NL7114692 A NL 7114692A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB5119070 | 1970-10-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL7114692A true NL7114692A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-05-03 |
Family
ID=10459000
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL7114692A NL7114692A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1970-10-28 | 1971-10-26 |
Country Status (5)
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1441824A (en) * | 1973-04-19 | 1976-07-07 | Cambridge Scientific Instr Ltd | Scanning electronbeam instrument |
| JPS585956A (ja) * | 1981-07-01 | 1983-01-13 | Hitachi Ltd | 電子顕微鏡 |
| GB2118771B (en) * | 1982-04-08 | 1987-03-25 | Jeol Ltd | Electron microscope |
| US9390886B2 (en) * | 2005-02-17 | 2016-07-12 | Ebara Corporation | Electro-optical inspection apparatus using electron beam |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AT275617B (de) * | 1968-02-23 | 1969-10-27 | Zeiss Carl Fa | Verfahren und Anordnung zur Justierung des Elektronenstrahles in einem Elektronenmikroskop |
-
1971
- 1971-10-26 NL NL7114692A patent/NL7114692A/xx not_active Application Discontinuation
- 1971-10-27 US US00192856A patent/US3746855A/en not_active Expired - Lifetime
- 1971-10-27 FR FR7138635A patent/FR2110077A5/fr not_active Expired
- 1971-10-27 DE DE19712153406 patent/DE2153406A1/de active Pending
- 1971-10-28 GB GB5119070A patent/GB1333054A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB1333054A (en) | 1973-10-10 |
| DE2153406A1 (de) | 1972-05-04 |
| FR2110077A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-05-26 |
| US3746855A (en) | 1973-07-17 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| CNR | Transfer of rights (patent application after its laying open for public inspection) |
Free format text: KRATOS LTD. |
|
| BB | A search report has been drawn up | ||
| BV | The patent application has lapsed |