NL7103019A - - Google Patents

Info

Publication number
NL7103019A
NL7103019A NL7103019A NL7103019A NL7103019A NL 7103019 A NL7103019 A NL 7103019A NL 7103019 A NL7103019 A NL 7103019A NL 7103019 A NL7103019 A NL 7103019A NL 7103019 A NL7103019 A NL 7103019A
Authority
NL
Netherlands
Application number
NL7103019A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to NL7103019A priority Critical patent/NL7103019A/xx
Priority to US00226888A priority patent/US3754110A/en
Priority to DE19722209782 priority patent/DE2209782A1/de
Priority to GB999872A priority patent/GB1370717A/en
Priority to JP2270972A priority patent/JPS5624368B1/ja
Priority to IT21396/72A priority patent/IT949866B/it
Priority to FR7207653A priority patent/FR2128647B1/fr
Publication of NL7103019A publication Critical patent/NL7103019A/xx

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/02—Induction heating
    • H05B6/10—Induction heating apparatus, other than furnaces, for specific applications
    • H05B6/105—Induction heating apparatus, other than furnaces, for specific applications using a susceptor
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/12—Substrate holders or susceptors
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/14—Substrate holders or susceptors
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/02—Induction heating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
NL7103019A 1971-03-06 1971-03-06 NL7103019A (enrdf_load_stackoverflow)

Priority Applications (7)

Application Number Priority Date Filing Date Title
NL7103019A NL7103019A (enrdf_load_stackoverflow) 1971-03-06 1971-03-06
US00226888A US3754110A (en) 1971-03-06 1972-02-16 A susceptor having grooves
DE19722209782 DE2209782A1 (de) 1971-03-06 1972-03-01 Verfahren zur Wärmebehandlung eines Körpers unter Anwendung eines Suszeptors
GB999872A GB1370717A (en) 1971-03-06 1972-03-03 Susceptors
JP2270972A JPS5624368B1 (enrdf_load_stackoverflow) 1971-03-06 1972-03-03
IT21396/72A IT949866B (it) 1971-03-06 1972-03-03 Metodo per il trattamento termico di un corpo per mezzo di un suscet tore
FR7207653A FR2128647B1 (enrdf_load_stackoverflow) 1971-03-06 1972-03-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7103019A NL7103019A (enrdf_load_stackoverflow) 1971-03-06 1971-03-06

Publications (1)

Publication Number Publication Date
NL7103019A true NL7103019A (enrdf_load_stackoverflow) 1972-09-08

Family

ID=19812633

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7103019A NL7103019A (enrdf_load_stackoverflow) 1971-03-06 1971-03-06

Country Status (7)

Country Link
US (1) US3754110A (enrdf_load_stackoverflow)
JP (1) JPS5624368B1 (enrdf_load_stackoverflow)
DE (1) DE2209782A1 (enrdf_load_stackoverflow)
FR (1) FR2128647B1 (enrdf_load_stackoverflow)
GB (1) GB1370717A (enrdf_load_stackoverflow)
IT (1) IT949866B (enrdf_load_stackoverflow)
NL (1) NL7103019A (enrdf_load_stackoverflow)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7209297A (enrdf_load_stackoverflow) * 1972-07-01 1974-01-03
US3980854A (en) * 1974-11-15 1976-09-14 Rca Corporation Graphite susceptor structure for inductively heating semiconductor wafers
US4099041A (en) * 1977-04-11 1978-07-04 Rca Corporation Susceptor for heating semiconductor substrates
US4334354A (en) * 1977-07-12 1982-06-15 Trw Inc. Method of fabricating a solar array
US4409451A (en) * 1981-08-31 1983-10-11 United Technologies Corporation Induction furnace having improved thermal profile
DE19630703C2 (de) * 1996-07-30 2000-02-10 Mtu Muenchen Gmbh Verfahren und Vorrichtung zum Reparaturschweissen von Teilen aus Ni-Basis-Legierungen sowie Anwendung des Verfahrens und Vorrichtung
US8603248B2 (en) * 2006-02-10 2013-12-10 Veeco Instruments Inc. System and method for varying wafer surface temperature via wafer-carrier temperature offset
WO2010024943A2 (en) * 2008-08-29 2010-03-04 Veeco Instruments Inc. Wafer carrier with varying thermal resistance
US10316412B2 (en) 2012-04-18 2019-06-11 Veeco Instruments Inc. Wafter carrier for chemical vapor deposition systems
US10167571B2 (en) 2013-03-15 2019-01-01 Veeco Instruments Inc. Wafer carrier having provisions for improving heating uniformity in chemical vapor deposition systems
JP6559706B2 (ja) 2014-01-27 2019-08-14 ビーコ インストルメンツ インコーポレイテッド 化学蒸着システム用の複合半径を有する保持ポケットを有するウェハキャリア

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2773923A (en) * 1953-01-26 1956-12-11 Raytheon Mfg Co Zone-refining apparatus
US3168696A (en) * 1962-06-26 1965-02-02 Erick O Schonstedt Magnetic flux directing cylindrical core having a plurality of serially arranged interruptions
FR1360497A (fr) * 1963-06-12 1964-05-08 Siemens Ag Procédé pour réaliser des couches cristallines en des substances peu volatiles, notamment des substances semi-conductrices
GB1121860A (en) * 1964-11-21 1968-07-31 Tokushu Denki Kabushiki Kaisha A heating rotary drum apparatus
US3524776A (en) * 1967-01-30 1970-08-18 Corning Glass Works Process for coating silicon wafers
US3399651A (en) * 1967-05-26 1968-09-03 Philco Ford Corp Susceptor for growing polycrystalline silicon on wafers of monocrystalline silicon
US3505499A (en) * 1968-04-04 1970-04-07 Siemens Ag Device for thermal processing of disc shaped objects for semiconductors
US3539759A (en) * 1968-11-08 1970-11-10 Ibm Susceptor structure in silicon epitaxy
US3608519A (en) * 1968-12-31 1971-09-28 Texas Instruments Inc Deposition reactor

Also Published As

Publication number Publication date
FR2128647A1 (enrdf_load_stackoverflow) 1972-10-20
IT949866B (it) 1973-06-11
JPS5624368B1 (enrdf_load_stackoverflow) 1981-06-05
GB1370717A (en) 1974-10-16
DE2209782A1 (de) 1972-09-14
FR2128647B1 (enrdf_load_stackoverflow) 1977-07-15
US3754110A (en) 1973-08-21

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