IT949866B - Metodo per il trattamento termico di un corpo per mezzo di un suscet tore - Google Patents

Metodo per il trattamento termico di un corpo per mezzo di un suscet tore

Info

Publication number
IT949866B
IT949866B IT21396/72A IT2139672A IT949866B IT 949866 B IT949866 B IT 949866B IT 21396/72 A IT21396/72 A IT 21396/72A IT 2139672 A IT2139672 A IT 2139672A IT 949866 B IT949866 B IT 949866B
Authority
IT
Italy
Prior art keywords
suscet
tore
heat treatment
treatment
heat
Prior art date
Application number
IT21396/72A
Other languages
English (en)
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Application granted granted Critical
Publication of IT949866B publication Critical patent/IT949866B/it

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/02—Induction heating
    • H05B6/10—Induction heating apparatus, other than furnaces, for specific applications
    • H05B6/105—Induction heating apparatus, other than furnaces, for specific applications using a susceptor
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/12—Substrate holders or susceptors
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/14—Substrate holders or susceptors
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/02—Induction heating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
IT21396/72A 1971-03-06 1972-03-03 Metodo per il trattamento termico di un corpo per mezzo di un suscet tore IT949866B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7103019A NL7103019A (it) 1971-03-06 1971-03-06

Publications (1)

Publication Number Publication Date
IT949866B true IT949866B (it) 1973-06-11

Family

ID=19812633

Family Applications (1)

Application Number Title Priority Date Filing Date
IT21396/72A IT949866B (it) 1971-03-06 1972-03-03 Metodo per il trattamento termico di un corpo per mezzo di un suscet tore

Country Status (7)

Country Link
US (1) US3754110A (it)
JP (1) JPS5624368B1 (it)
DE (1) DE2209782A1 (it)
FR (1) FR2128647B1 (it)
GB (1) GB1370717A (it)
IT (1) IT949866B (it)
NL (1) NL7103019A (it)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7209297A (it) * 1972-07-01 1974-01-03
US3980854A (en) * 1974-11-15 1976-09-14 Rca Corporation Graphite susceptor structure for inductively heating semiconductor wafers
US4099041A (en) * 1977-04-11 1978-07-04 Rca Corporation Susceptor for heating semiconductor substrates
US4334354A (en) * 1977-07-12 1982-06-15 Trw Inc. Method of fabricating a solar array
US4409451A (en) * 1981-08-31 1983-10-11 United Technologies Corporation Induction furnace having improved thermal profile
DE19630703C2 (de) * 1996-07-30 2000-02-10 Mtu Muenchen Gmbh Verfahren und Vorrichtung zum Reparaturschweissen von Teilen aus Ni-Basis-Legierungen sowie Anwendung des Verfahrens und Vorrichtung
US8603248B2 (en) * 2006-02-10 2013-12-10 Veeco Instruments Inc. System and method for varying wafer surface temperature via wafer-carrier temperature offset
EP2338164A4 (en) * 2008-08-29 2012-05-16 Veeco Instr Inc VARIABLE THERMAL RESISTANCE PLATE HOLDER
US10316412B2 (en) 2012-04-18 2019-06-11 Veeco Instruments Inc. Wafter carrier for chemical vapor deposition systems
US10167571B2 (en) 2013-03-15 2019-01-01 Veeco Instruments Inc. Wafer carrier having provisions for improving heating uniformity in chemical vapor deposition systems
EP3100298B1 (en) 2014-01-27 2020-07-15 Veeco Instruments Inc. Wafer carrier having retention pockets with compound radii for chemical vapor deposition systems

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2773923A (en) * 1953-01-26 1956-12-11 Raytheon Mfg Co Zone-refining apparatus
US3168696A (en) * 1962-06-26 1965-02-02 Erick O Schonstedt Magnetic flux directing cylindrical core having a plurality of serially arranged interruptions
FR1360497A (fr) * 1963-06-12 1964-05-08 Siemens Ag Procédé pour réaliser des couches cristallines en des substances peu volatiles, notamment des substances semi-conductrices
GB1121860A (en) * 1964-11-21 1968-07-31 Tokushu Denki Kabushiki Kaisha A heating rotary drum apparatus
US3524776A (en) * 1967-01-30 1970-08-18 Corning Glass Works Process for coating silicon wafers
US3399651A (en) * 1967-05-26 1968-09-03 Philco Ford Corp Susceptor for growing polycrystalline silicon on wafers of monocrystalline silicon
US3505499A (en) * 1968-04-04 1970-04-07 Siemens Ag Device for thermal processing of disc shaped objects for semiconductors
US3539759A (en) * 1968-11-08 1970-11-10 Ibm Susceptor structure in silicon epitaxy
US3608519A (en) * 1968-12-31 1971-09-28 Texas Instruments Inc Deposition reactor

Also Published As

Publication number Publication date
US3754110A (en) 1973-08-21
FR2128647A1 (it) 1972-10-20
JPS5624368B1 (it) 1981-06-05
NL7103019A (it) 1972-09-08
GB1370717A (en) 1974-10-16
FR2128647B1 (it) 1977-07-15
DE2209782A1 (de) 1972-09-14

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