FR2128647B1 - - Google Patents
Info
- Publication number
- FR2128647B1 FR2128647B1 FR7207653A FR7207653A FR2128647B1 FR 2128647 B1 FR2128647 B1 FR 2128647B1 FR 7207653 A FR7207653 A FR 7207653A FR 7207653 A FR7207653 A FR 7207653A FR 2128647 B1 FR2128647 B1 FR 2128647B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/02—Induction heating
- H05B6/10—Induction heating apparatus, other than furnaces, for specific applications
- H05B6/105—Induction heating apparatus, other than furnaces, for specific applications using a susceptor
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/12—Substrate holders or susceptors
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/14—Substrate holders or susceptors
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/02—Induction heating
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL7103019A NL7103019A (it) | 1971-03-06 | 1971-03-06 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2128647A1 FR2128647A1 (it) | 1972-10-20 |
FR2128647B1 true FR2128647B1 (it) | 1977-07-15 |
Family
ID=19812633
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7207653A Expired FR2128647B1 (it) | 1971-03-06 | 1972-03-06 |
Country Status (7)
Country | Link |
---|---|
US (1) | US3754110A (it) |
JP (1) | JPS5624368B1 (it) |
DE (1) | DE2209782A1 (it) |
FR (1) | FR2128647B1 (it) |
GB (1) | GB1370717A (it) |
IT (1) | IT949866B (it) |
NL (1) | NL7103019A (it) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL7209297A (it) * | 1972-07-01 | 1974-01-03 | ||
US3980854A (en) * | 1974-11-15 | 1976-09-14 | Rca Corporation | Graphite susceptor structure for inductively heating semiconductor wafers |
US4099041A (en) * | 1977-04-11 | 1978-07-04 | Rca Corporation | Susceptor for heating semiconductor substrates |
US4334354A (en) * | 1977-07-12 | 1982-06-15 | Trw Inc. | Method of fabricating a solar array |
US4409451A (en) * | 1981-08-31 | 1983-10-11 | United Technologies Corporation | Induction furnace having improved thermal profile |
DE19630703C2 (de) * | 1996-07-30 | 2000-02-10 | Mtu Muenchen Gmbh | Verfahren und Vorrichtung zum Reparaturschweissen von Teilen aus Ni-Basis-Legierungen sowie Anwendung des Verfahrens und Vorrichtung |
US8603248B2 (en) * | 2006-02-10 | 2013-12-10 | Veeco Instruments Inc. | System and method for varying wafer surface temperature via wafer-carrier temperature offset |
US20100055318A1 (en) * | 2008-08-29 | 2010-03-04 | Veeco Instruments Inc. | Wafer carrier with varying thermal resistance |
US10316412B2 (en) | 2012-04-18 | 2019-06-11 | Veeco Instruments Inc. | Wafter carrier for chemical vapor deposition systems |
US10167571B2 (en) | 2013-03-15 | 2019-01-01 | Veeco Instruments Inc. | Wafer carrier having provisions for improving heating uniformity in chemical vapor deposition systems |
EP3100298B1 (en) | 2014-01-27 | 2020-07-15 | Veeco Instruments Inc. | Wafer carrier having retention pockets with compound radii for chemical vapor deposition systems |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2773923A (en) * | 1953-01-26 | 1956-12-11 | Raytheon Mfg Co | Zone-refining apparatus |
US3168696A (en) * | 1962-06-26 | 1965-02-02 | Erick O Schonstedt | Magnetic flux directing cylindrical core having a plurality of serially arranged interruptions |
FR1360497A (fr) * | 1963-06-12 | 1964-05-08 | Siemens Ag | Procédé pour réaliser des couches cristallines en des substances peu volatiles, notamment des substances semi-conductrices |
GB1121860A (en) * | 1964-11-21 | 1968-07-31 | Tokushu Denki Kabushiki Kaisha | A heating rotary drum apparatus |
US3524776A (en) * | 1967-01-30 | 1970-08-18 | Corning Glass Works | Process for coating silicon wafers |
US3399651A (en) * | 1967-05-26 | 1968-09-03 | Philco Ford Corp | Susceptor for growing polycrystalline silicon on wafers of monocrystalline silicon |
US3505499A (en) * | 1968-04-04 | 1970-04-07 | Siemens Ag | Device for thermal processing of disc shaped objects for semiconductors |
US3539759A (en) * | 1968-11-08 | 1970-11-10 | Ibm | Susceptor structure in silicon epitaxy |
US3608519A (en) * | 1968-12-31 | 1971-09-28 | Texas Instruments Inc | Deposition reactor |
-
1971
- 1971-03-06 NL NL7103019A patent/NL7103019A/xx unknown
-
1972
- 1972-02-16 US US00226888A patent/US3754110A/en not_active Expired - Lifetime
- 1972-03-01 DE DE19722209782 patent/DE2209782A1/de active Pending
- 1972-03-03 IT IT21396/72A patent/IT949866B/it active
- 1972-03-03 GB GB999872A patent/GB1370717A/en not_active Expired
- 1972-03-03 JP JP2270972A patent/JPS5624368B1/ja active Pending
- 1972-03-06 FR FR7207653A patent/FR2128647B1/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
FR2128647A1 (it) | 1972-10-20 |
DE2209782A1 (de) | 1972-09-14 |
US3754110A (en) | 1973-08-21 |
NL7103019A (it) | 1972-09-08 |
IT949866B (it) | 1973-06-11 |
JPS5624368B1 (it) | 1981-06-05 |
GB1370717A (en) | 1974-10-16 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |