GB1370717A - Susceptors - Google Patents

Susceptors

Info

Publication number
GB1370717A
GB1370717A GB999872A GB999872A GB1370717A GB 1370717 A GB1370717 A GB 1370717A GB 999872 A GB999872 A GB 999872A GB 999872 A GB999872 A GB 999872A GB 1370717 A GB1370717 A GB 1370717A
Authority
GB
United Kingdom
Prior art keywords
susceptor
march
grooves
major surface
heading
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB999872A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic and Associated Industries Ltd filed Critical Philips Electronic and Associated Industries Ltd
Publication of GB1370717A publication Critical patent/GB1370717A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/02—Induction heating
    • H05B6/10—Induction heating apparatus, other than furnaces, for specific applications
    • H05B6/105—Induction heating apparatus, other than furnaces, for specific applications using a susceptor
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/12—Substrate holders or susceptors
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/14—Substrate holders or susceptors
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/02—Induction heating

Abstract

1370717 Susceptor PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd 3 March 1972 [6 March 1971] 9998/72 Heading H5H An elongate susceptor 7 of substantially rectangular cross-section has grooves 11 formed in one major surface which lie adjacent and parallel to the sides 10 of the susceptor. Such grooves are stated to improve the uniformity of the transverse temperature distribution on the other major surface 4 of the susceptor on which silicon semi-conductor bodies 1 are positioned for epitaxial deposition.
GB999872A 1971-03-06 1972-03-03 Susceptors Expired GB1370717A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7103019A NL7103019A (en) 1971-03-06 1971-03-06

Publications (1)

Publication Number Publication Date
GB1370717A true GB1370717A (en) 1974-10-16

Family

ID=19812633

Family Applications (1)

Application Number Title Priority Date Filing Date
GB999872A Expired GB1370717A (en) 1971-03-06 1972-03-03 Susceptors

Country Status (7)

Country Link
US (1) US3754110A (en)
JP (1) JPS5624368B1 (en)
DE (1) DE2209782A1 (en)
FR (1) FR2128647B1 (en)
GB (1) GB1370717A (en)
IT (1) IT949866B (en)
NL (1) NL7103019A (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7209297A (en) * 1972-07-01 1974-01-03
US3980854A (en) * 1974-11-15 1976-09-14 Rca Corporation Graphite susceptor structure for inductively heating semiconductor wafers
US4099041A (en) * 1977-04-11 1978-07-04 Rca Corporation Susceptor for heating semiconductor substrates
US4334354A (en) * 1977-07-12 1982-06-15 Trw Inc. Method of fabricating a solar array
US4409451A (en) * 1981-08-31 1983-10-11 United Technologies Corporation Induction furnace having improved thermal profile
DE19630703C2 (en) * 1996-07-30 2000-02-10 Mtu Muenchen Gmbh Method and device for repair welding of parts made of Ni-based alloys and application of the method and device
US8603248B2 (en) * 2006-02-10 2013-12-10 Veeco Instruments Inc. System and method for varying wafer surface temperature via wafer-carrier temperature offset
CN102144280B (en) * 2008-08-29 2016-05-04 威科仪器有限公司 There is the chip carrier that changes thermal resistance
US10316412B2 (en) 2012-04-18 2019-06-11 Veeco Instruments Inc. Wafter carrier for chemical vapor deposition systems
US10167571B2 (en) 2013-03-15 2019-01-01 Veeco Instruments Inc. Wafer carrier having provisions for improving heating uniformity in chemical vapor deposition systems
EP3100298B1 (en) 2014-01-27 2020-07-15 Veeco Instruments Inc. Wafer carrier having retention pockets with compound radii for chemical vapor deposition systems

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2773923A (en) * 1953-01-26 1956-12-11 Raytheon Mfg Co Zone-refining apparatus
US3168696A (en) * 1962-06-26 1965-02-02 Erick O Schonstedt Magnetic flux directing cylindrical core having a plurality of serially arranged interruptions
FR1360497A (en) * 1963-06-12 1964-05-08 Siemens Ag Process for producing crystalline layers of low volatility substances, in particular semiconductor substances
GB1121860A (en) * 1964-11-21 1968-07-31 Tokushu Denki Kabushiki Kaisha A heating rotary drum apparatus
US3524776A (en) * 1967-01-30 1970-08-18 Corning Glass Works Process for coating silicon wafers
US3399651A (en) * 1967-05-26 1968-09-03 Philco Ford Corp Susceptor for growing polycrystalline silicon on wafers of monocrystalline silicon
US3505499A (en) * 1968-04-04 1970-04-07 Siemens Ag Device for thermal processing of disc shaped objects for semiconductors
US3539759A (en) * 1968-11-08 1970-11-10 Ibm Susceptor structure in silicon epitaxy
US3608519A (en) * 1968-12-31 1971-09-28 Texas Instruments Inc Deposition reactor

Also Published As

Publication number Publication date
NL7103019A (en) 1972-09-08
IT949866B (en) 1973-06-11
US3754110A (en) 1973-08-21
DE2209782A1 (en) 1972-09-14
JPS5624368B1 (en) 1981-06-05
FR2128647B1 (en) 1977-07-15
FR2128647A1 (en) 1972-10-20

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee