Classifications

• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P32/00—Diffusion of dopants within, into or out of wafers, substrates or parts of devices
  • H10P32/10—Diffusion of dopants within, into or out of semiconductor bodies or layers
  • H10P32/14—Diffusion of dopants within, into or out of semiconductor bodies or layers within a single semiconductor body or layer in a solid phase; between different semiconductor bodies or layers, both in a solid phase
  • H10P32/1408—Diffusion of dopants within, into or out of semiconductor bodies or layers within a single semiconductor body or layer in a solid phase; between different semiconductor bodies or layers, both in a solid phase from or through or into an external applied layer, e.g. photoresist or nitride layers
  • H10P32/141—Diffusion of dopants within, into or out of semiconductor bodies or layers within a single semiconductor body or layer in a solid phase; between different semiconductor bodies or layers, both in a solid phase from or through or into an external applied layer, e.g. photoresist or nitride layers the applied layer comprising oxides only
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P32/00—Diffusion of dopants within, into or out of wafers, substrates or parts of devices
  • H10P32/10—Diffusion of dopants within, into or out of semiconductor bodies or layers
  • H10P32/17—Diffusion of dopants within, into or out of semiconductor bodies or layers characterised by the semiconductor material
  • H10P32/171—Diffusion of dopants within, into or out of semiconductor bodies or layers characterised by the semiconductor material being group IV material

Applications Claiming Priority (1)

Publications (1)

Family

ID=5762769

Family Applications (1)

Country Status (8)

Families Citing this family (4)

Family Cites Families (4)

• 1970
  • 1970-02-19 DE DE2007752A patent/DE2007752B2/de active Granted
• 1971
  • 1971-02-01 AT AT82571A patent/AT338335B/de not_active IP Right Cessation
  • 1971-02-03 CH CH158671A patent/CH519249A/de not_active IP Right Cessation
  • 1971-02-16 FR FR7105142A patent/FR2080610B1/fr not_active Expired
  • 1971-02-18 NL NL7102176A patent/NL7102176A/xx unknown
  • 1971-02-19 SE SE02166/71A patent/SE366227B/xx unknown
  • 1971-02-19 JP JP790471A patent/JPS5338597B1/ja active Pending
  • 1971-04-19 GB GB1289432D patent/GB1289432A/en not_active Expired

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