NL7101237A - - Google Patents

Info

Publication number
NL7101237A
NL7101237A NL7101237A NL7101237A NL7101237A NL 7101237 A NL7101237 A NL 7101237A NL 7101237 A NL7101237 A NL 7101237A NL 7101237 A NL7101237 A NL 7101237A NL 7101237 A NL7101237 A NL 7101237A
Authority
NL
Netherlands
Application number
NL7101237A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19702004184 external-priority patent/DE2004184C3/de
Application filed filed Critical
Publication of NL7101237A publication Critical patent/NL7101237A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Toxicology (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
NL7101237A 1970-01-30 1971-01-29 NL7101237A (cs)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702004184 DE2004184C3 (de) 1970-01-30 Verfahren und Vorrichtung zum Aufdampfen von Metallen oder Metallverbindungen auf einem Träger im Vakuum mit Hilfe einer Elektronenstrahlkanone

Publications (1)

Publication Number Publication Date
NL7101237A true NL7101237A (cs) 1971-08-03

Family

ID=5760947

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7101237A NL7101237A (cs) 1970-01-30 1971-01-29

Country Status (5)

Country Link
JP (1) JPS5123950B1 (cs)
CH (1) CH544157A (cs)
FR (1) FR2075059A5 (cs)
GB (1) GB1334599A (cs)
NL (1) NL7101237A (cs)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60225422A (ja) * 1984-04-24 1985-11-09 Hitachi Ltd 薄膜形成方法およびその装置
GB2264718B (en) * 1992-03-04 1995-04-26 Univ Hull Coatings produced by vapour deposition
JP7512194B2 (ja) 2018-05-21 2024-07-08 旭化成株式会社 ポリカーボネートジオール

Also Published As

Publication number Publication date
FR2075059A5 (cs) 1971-10-08
DE2004184B2 (de) 1975-07-03
CH544157A (de) 1973-11-15
DE2004184A1 (de) 1971-08-05
GB1334599A (en) 1973-10-24
JPS5123950B1 (cs) 1976-07-20

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Legal Events

Date Code Title Description
BN A decision not to publish the application has become irrevocable