NL7012388A - - Google Patents

Info

Publication number
NL7012388A
NL7012388A NL7012388A NL7012388A NL7012388A NL 7012388 A NL7012388 A NL 7012388A NL 7012388 A NL7012388 A NL 7012388A NL 7012388 A NL7012388 A NL 7012388A NL 7012388 A NL7012388 A NL 7012388A
Authority
NL
Netherlands
Application number
NL7012388A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to NL7012388A priority Critical patent/NL7012388A/xx
Priority to DE19712137510 priority patent/DE2137510C3/de
Priority to CA120799A priority patent/CA934075A/en
Priority to GB3875371A priority patent/GB1364930A/en
Priority to FR7130437A priority patent/FR2104604A5/fr
Publication of NL7012388A publication Critical patent/NL7012388A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/84—Traps for removing or diverting unwanted particles, e.g. negative ions, fringing electrons; Arrangements for velocity or mass selection
    • H01J29/845—Traps for removing or diverting unwanted particles, e.g. negative ions, fringing electrons; Arrangements for velocity or mass selection by means of magnetic systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
NL7012388A 1970-08-21 1970-08-21 NL7012388A (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
NL7012388A NL7012388A (fr) 1970-08-21 1970-08-21
DE19712137510 DE2137510C3 (de) 1970-08-21 1971-07-27 Elektronenoptische Anordnung mit einer Energieselektionsanordnung
CA120799A CA934075A (en) 1970-08-21 1971-08-18 Electron-optical device comprising an energy-selection filter
GB3875371A GB1364930A (en) 1970-08-21 1971-08-18 Microscope employing a beam of chargedparticles
FR7130437A FR2104604A5 (fr) 1970-08-21 1971-08-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7012388A NL7012388A (fr) 1970-08-21 1970-08-21

Publications (1)

Publication Number Publication Date
NL7012388A true NL7012388A (fr) 1972-02-23

Family

ID=19810828

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7012388A NL7012388A (fr) 1970-08-21 1970-08-21

Country Status (5)

Country Link
CA (1) CA934075A (fr)
DE (1) DE2137510C3 (fr)
FR (1) FR2104604A5 (fr)
GB (1) GB1364930A (fr)
NL (1) NL7012388A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0555911A1 (fr) * 1992-02-12 1993-08-18 Koninklijke Philips Electronics N.V. Procédé pour réduire une dispersion spatiale d'énergie d'un faisceau électronique et appareil à faisceau électronique convenant pour la mise en oeuvre d'un tel procédé

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7404363A (nl) * 1974-04-01 1975-10-03 Philips Nv Elektronenmikroskoop met energieanalysator.
FR2584234B1 (fr) * 1985-06-28 1988-12-09 Cameca Testeur de circuit integre a faisceau d'electrons
US6184524B1 (en) 1996-08-07 2001-02-06 Gatan, Inc. Automated set up of an energy filtering transmission electron microscope
US5798524A (en) * 1996-08-07 1998-08-25 Gatan, Inc. Automated adjustment of an energy filtering transmission electron microscope
DE69920182T2 (de) * 1998-12-17 2005-02-17 Fei Co., Hillsboro Korpuskularstrahloptisches gerät mit auger-elektronendetektion
JP3757371B2 (ja) * 1999-07-05 2006-03-22 日本電子株式会社 エネルギーフィルタ及びそれを用いた電子顕微鏡
US6410924B1 (en) * 1999-11-16 2002-06-25 Schlumberger Technologies, Inc. Energy filtered focused ion beam column
EP1521289B1 (fr) * 2003-09-11 2008-06-25 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Système à un seul étage pour réduire la dispersion en énergie d'un faisceau de particules chargées pour un système à faisceau de particules chargées
EP1783811A3 (fr) 2005-11-02 2008-02-27 FEI Company Correcteur pour la correction d'aberrations chromatiques dans un appareil optique à particules
GB0700754D0 (en) * 2007-01-15 2007-02-21 Oxford Instr Analytical Ltd Charged particle analyser and method
EP2166557A1 (fr) 2008-09-22 2010-03-24 FEI Company Procédé de correction de distorsions dans un appareil optique corpusculaire
EP2325862A1 (fr) 2009-11-18 2011-05-25 Fei Company Correcteur pour aberrations axiales d'une lentille à particules chargées
EP2511936B1 (fr) 2011-04-13 2013-10-02 Fei Company Correction d'astigmatisme sans distorsion d'un TEM

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0555911A1 (fr) * 1992-02-12 1993-08-18 Koninklijke Philips Electronics N.V. Procédé pour réduire une dispersion spatiale d'énergie d'un faisceau électronique et appareil à faisceau électronique convenant pour la mise en oeuvre d'un tel procédé

Also Published As

Publication number Publication date
DE2137510A1 (de) 1972-02-24
GB1364930A (en) 1974-08-29
DE2137510C3 (de) 1978-11-09
FR2104604A5 (fr) 1972-04-14
DE2137510B2 (de) 1978-03-16
CA934075A (en) 1973-09-18

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